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Reflection-type light modulating array element and exposure apparatus

  • US 7,046,422 B2
  • Filed: 10/15/2004
  • Issued: 05/16/2006
  • Est. Priority Date: 10/16/2003
  • Status: Expired due to Fees
First Claim
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1. A reflection-type light modulating array element comprising:

  • a substrate;

    a movable member comprising a beam body provided on said substrate through a first gap, a light reflector capable of rotational displacement by twisting of said beam body, and an electrically conducting part formed at least in a partial portion of said movable member;

    a lower electrode provided on a substrate side to face said movable member through said first gap, andan upper electrode provided on a side opposite to said lower electrode to face said movable member through a second gap, and thereby said movable member is between said lower electrode and said upper electrode,wherein a voltage is applied to said upper electrode, said lower electrode and said electrically conducting part to cause an rocking displacement of said light reflector and thereby deflect a reflection direction of a light.

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