Reflection-type light modulating array element and exposure apparatus
First Claim
1. A reflection-type light modulating array element comprising:
- a substrate;
a movable member comprising a beam body provided on said substrate through a first gap, a light reflector capable of rotational displacement by twisting of said beam body, and an electrically conducting part formed at least in a partial portion of said movable member;
a lower electrode provided on a substrate side to face said movable member through said first gap, andan upper electrode provided on a side opposite to said lower electrode to face said movable member through a second gap, and thereby said movable member is between said lower electrode and said upper electrode,wherein a voltage is applied to said upper electrode, said lower electrode and said electrically conducting part to cause an rocking displacement of said light reflector and thereby deflect a reflection direction of a light.
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Accused Products
Abstract
A reflection-type light modulating array element has: a substrate; a movable member provided with a beam body provided on the substrate through a first gap, a light reflector capable of rotational displacement by twisting of the beam body, and an electrically conducting part formed at least in a partial portion of the movable member; a lower electrode provided on a substrate side to face the movable member through the first gap, and an upper electrode provided on a side opposite to the lower electrode to face the movable member through a second gap, and thereby the movable member is between the lower electrode and the upper electrode, wherein a voltage is applied to the upper electrode, the lower electrode and the electrically conducting part to cause an rocking displacement of the light reflector and thereby deflect a reflection direction of a light.
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Citations
7 Claims
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1. A reflection-type light modulating array element comprising:
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a substrate; a movable member comprising a beam body provided on said substrate through a first gap, a light reflector capable of rotational displacement by twisting of said beam body, and an electrically conducting part formed at least in a partial portion of said movable member; a lower electrode provided on a substrate side to face said movable member through said first gap, and an upper electrode provided on a side opposite to said lower electrode to face said movable member through a second gap, and thereby said movable member is between said lower electrode and said upper electrode, wherein a voltage is applied to said upper electrode, said lower electrode and said electrically conducting part to cause an rocking displacement of said light reflector and thereby deflect a reflection direction of a light. - View Dependent Claims (2, 3, 4, 5, 6, 7)
wherein the reflection-type light modulating array element further comprises a microlens array having a plurality of microlenses therein, and said microlenses are disposed to face respective light reflectors of said reflection-type light modulating elements which are arrayed in one of a one-dimensional state and a two-dimensional state. -
7. An exposure apparatus comprising the reflection-type light modulating array element according to claim 6, wherein
a light from a light source is injected into said reflection-type light modulating array element through an illumination optical system and a microlens array, the reflected light reflected by said reflection-type light modulating array element is injected into a projection optical system through said microlens array, transmitted through said projection optical system, and then irradiated on an exposure object.
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Specification