Integrating tool, module, and fab level control

• US 7,047,099 B2
• Filed: 06/18/2002
• Issued: 05/16/2006
• Est. Priority Date: 06/19/2001
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Schwarm, Alexander T., Shanmugasundram, Arulkumar P.
• Primary Examiner(s): Paladini, Albert W.
• Assistant Examiner(s): SHECHTMAN, SEAN P
• Application Number:
  US10/173,108
• Publication Number:
  US 20020193902A1
• Time in Patent Office: 1,428 Days
• Field of Search: 700/19, 700/31, 700/51, 700/121, 438/5, 438/17
• US Class Current: 700/121
• CPC Class Codes: B24B 49/18 taking regard of the presence of dressing tools
• CPC Class Codes: B24B 53/017 Devices or means for dressing, cleaning or otherwise conditioning lapping tools
• CPC Class Codes: G05B 19/41865 characterised by job scheduling, process planning, material flow
• CPC Class Codes: G05B 2219/32053 Adjust work parameter as function of other cell
• CPC Class Codes: G05B 2219/32065 Synchronise set points of processes
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

Semiconductor wafers are processed in a fab in a manner that integrates control at multiple functional unit levels. Examples of functional units include fabs, modules, tools, and the like. Initially, a number of functional unit property targets are received at a functional unit. The functional unit property targets are utilized to generate a number of tool targets for any number of tool level functional units. From there, the tool targets are forwarded to the corresponding tool level functional units. At these tool level functional units, a number of tool recipes, each of which define a number of process setpoints, may be generated by processing the tool targets. The process setpoints define a number of parameters which must be satisfied in order to attain the corresponding tool targets. In addition, in at least some embodiments, the tool targets and tool recipes are determined utilizing feedback information including functional unit states and measurements of controlled parameters.

Claims

1. A computer-implemented method for processing wafers, said method comprising the steps of:

(1) receiving, at a first non tool level functional unit, one or more wafer characteristics;

(2) generating, at the first non tool level functional unit, from the one or more wafer characteristics one or more tool targets for one or more tool level functional units;

(3) forwarding said one or more tool targets from said first non tool level functional unit to said one or more tool level functional units; and

(4) generating, at a tool level functional unit, from said one or more tool targets one or more tool recipes defining one or more process setpoints.

2. The method of claim 1, wherein said first non tool level functional unit comprises a fab.

3. The method of claim 1, wherein said first non tool level functional unit comprises a module.

4. The method of claim 1, wherein said one or more tool recipes are generated according to tool measurements of controlled parameters.

5. The method of claim 1, wherein said one or more tool targets are generated according to state information from at least one tool level functional unit other than said one or more tool level functional units.

6. The method of claim 1, wherein said one or more tool recipes are generated according to measurements of controlled parameters measured from a second non tool level functional unit or said tool level functional units.

7. The method of claim 1, wherein said one or more tool recipes are generated according to state information from a second non tool level functional unit or said tool level functional units.

8. The method of claim 1, further comprising utilizing a tool recipe of said one or more tool recipes corresponding to a first tool level functional unit in obtaining a tool final product associated with a second tool level functional unit.

9. The method of claim 1, further comprising:

receiving, at a second non tool level functional unit, one or more wafer characteristics associated with said second non tool level functional unit;

generating said one or more wafer characteristics for at least said first non tool level functional unit from the one or more wafer characteristics associated with said second non tool level functional unit; and

forwarding said one or more wafer characteristics generated for said first non tool level functional unit from said second non tool level functional unit to said first non tool level functional unit.

10. The method of claim 1, wherein at least one tool level functional unit of said one or more tool level functional units includes an integrated metrology device or sensor for measuring controlled parameters.

11. The method of claim 1, wherein said one or more tool recipes are generated on a wafer to wafer basis.

12. The method of claim 1, wherein one or more models are used to generate said one or more tool targets.

13. The method of claim 1, wherein one or more models are used to generate said one or more tool recipes.

14. The method of claim 1, wherein one or more models are used to generate said one or more tool targets and wherein said one or more models are constructed utilizing design of experiment techniques.

15. The method of claim 1, wherein one or more models are used to generate said one or more tool targets and wherein said one or more models are constructed utilizing design constraints based on physical and/or empirical knowledge of said first non tool level functional unit or said tool level functional units.

16. The method of claim 1, wherein said wafer characteristics associated with said first non tool level functional unit are used to generate one or more wafer characteristics associated with a second non tool level functional unit, and wherein said one or more tool targets are generated by processing said one or more wafer characteristics associated with said second non tool level functional unit.

17. The method of claim 1, further comprising the step of:

(5) executing said one or more tool recipes on said one or more tool level functional units.

46. The method according to claim 1, wherein at least one of said one or more tool level functional units utilize feedback for use in optimizing subsequent runs.

18. A system for processing wafers, said system comprising:

a first non tool level functional unit comprising a controller capable of receiving one or more wafer characteristics associated with said first non tool level functional unit and generating one or more tool targets for one or more tool level functional units associated with said first non tool level functional unit;

said one or more tool level functional units capable of receiving said one or more tool targets from said first non tool level functional unit and generating one or more tool recipes defining one or more process setpoints, by processing said one or more tool targets, wherein said one or more tool targets may be accomplished by attaining said one or more process setpoints.

19. The system of claim 18, further comprising an integrated metrology device or sensor for measuring controlled parameters.

20. The system of claim 18, further comprising:

a second non tool level functional unit comprising a controller capable of receiving one or more wafer characteristics associated with said second non tool level functional unit, generating said one or more tool targets for at least said first tool level functional unit from the wafer characteristics associated with said second non tool level functional unit, and forwarding said one or more tool targets generated by said second non tool level functional unit to said first non tool level functional unit.

21. The system of claim 18, wherein said one or more tool targets are generated according to state information from at least one tool level functional unit other than said one or more tool level functional units.

22. The system of claim 18, wherein said one or more tool recipes are generated according to measurements of controlled parameters measured from a second non tool level functional unit or said tool level functional units.

23. The system of claim 18, wherein said one or more tool recipes are generated according to state information from a second non tool level functional unit or said tool level functional units.

24. The system of claim 18, wherein a tool recipe of said one or more tool recipes corresponding to a first tool level functional unit in obtaining a tool final product is associated with a second tool level functional unit.

25. The system of claim 18, wherein said one or more tool recipes are generated according to tool measurements of controlled parameters.

26. The system of claim 18, wherein one or more models are used to generate said one or more tool targets and wherein said one or more models are constructed utilizing design constraints based on physical and/or empirical knowledge of said first non tool level functional unit or said tool level functional units.

27. The system of claim 18, further comprising a first non tool level functional unit controller for generating one or more wafer characteristics associated with a second non tool level functional unit, and wherein said one or more tool targets are generated by processing said one or more wafer characteristics associated with said second non tool level functional unit.

28. The system of claim 18, wherein said first non tool level functional unit comprises a fab.

29. The system of claim 18, wherein said first non tool level functional unit comprises a module.

30. A system for processing wafers, said system comprising:

means for receiving, at a first non tool level functional unit, one or more wafer characteristics associated with said first non tool level functional unit;

means for generating, at the first non tool level functional unit, from the one or more wafer characteristics one or more tool targets for one or more tool level functional units;

means for forwarding said one or more tool targets from said first non tool level functional unit to said one or more tool level functional units; and

means for generating, at a tool level functional unit, from said one or more tool targets one or more tool recipes defining one or more process setpoints.

31. The system of claim 30, further comprising means for measuring controlled parameters.

32. The system of claim 30, wherein said one or more tool targets are generated according to state information from at least one tool level functional unit other than said one or more tool level functional units.

33. The system of claim 30, wherein said one or more tool recipes are generated according to measurements of controlled parameters measured from a second non tool level functional unit or said tool level functional units.

34. The system of claim 30, wherein said one or more tool recipes are generated according to state information from a second non tool level functional unit or said tool level functional units.

35. The system of claim 30, further comprising means for utilizing a tool recipe of said one or more tool recipes corresponding to a first tool level functional unit in obtaining a tool final product associated with a second tool level functional unit.

36. The system of claim 30, further comprising:

means for receiving, at a second non tool level functional unit, one or more wafer characteristics associated with said second non tool level functional unit;

means for generating said one or more wafer characteristics for at least said first non tool level functional unit from said one or more wafer characteristics associated with said second non tool level functional unit; and

means for forwarding said one or more wafer characteristics generated for said first non tool level functional unit from said second non tool level functional unit to said first non tool level functional unit.

37. The system of claim 30, wherein one or more models are used to generate said one or more tool targets and wherein said one or more models are constructed utilizing design constraints based on physical and/or empirical knowledge of said first non tool level functional unit or said tool level functional units.

38. A computer readable medium for use in processing wafers, said computer readable medium comprising:

computer readable instructions for receiving, at a first non tool level functional unit, one or more wafer characteristics;

computer readable instructions for generating, at the first functional unit, from the one or more wafer characteristics one or more tool targets for one or more tool level functional units;

computer readable instructions for forwarding said one or more tool targets from said first functional unit to said one or more tool level functional units; and

computer readable instructions for generating, at a tool level functional unit, from said one or more tool targets one or more tool recipes defining one or more process setpoints.

39. The computer readable medium of claim 38, further comprising computer readable instructions for executing said one or more tool recipes on said one or more tool level functional units.

40. The computer readable medium of claim 38, wherein said one or more tool recipes are generated according to measurements of controlled parameters measured from a second non tool level functional unit or said tool level functional units.

41. The computer readable medium of claim 38, wherein said one or more tool recipes are generated according to state information from a second non tool level functional unit or said tool level functional units.

42. The computer readable medium of claim 38, further comprising computer readable instructions for utilizing a tool recipe of said one or more tool recipes corresponding to a first tool level functional unit in obtaining a tool final product associated with a second tool level functional unit.

43. The computer readable medium of claim 38, further comprising:

computer readable instructions for receiving, at a second non tool level functional unit, one or more wafer characteristics associated with said second non tool level functional unit;

computer readable instructions for generating said one or more tool targets for at least said first non tool level functional unit, by processing said one or more wafer characteristics associated with said second non tool level functional unit; and

computer readable instructions for forwarding said one or more tool targets associated with said second non tool level functional unit to said first non tool level functional unit.

44. The computer readable medium of claim 38, further comprising computer readable instructions for measuring controlled parameters.

45. The computer readable medium of claim 38, wherein said one or more tool targets are generated according to state information from at least one tool level functional unit other than said one or more tool level functional units.