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Substrate processing system managing apparatus information of substrate processing apparatus

  • US 7,047,100 B2
  • Filed: 07/02/2002
  • Issued: 05/16/2006
  • Est. Priority Date: 07/05/2001
  • Status: Expired due to Term
First Claim
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1. A substrate processing system having a substrate processing apparatus and a computer processing apparatus information of said substrate processing apparatus connected to each other through a network, comprising:

  • an operation information acquisition element acquiring time-series information as to operations of said substrate processing apparatus, said information comprising operation information;

    an operation information storage element storing said operation information;

    a warning element generating a warning signal when said substrate processing apparatus is indicative of a failure;

    an extraction element extracting, when said warning signal is generated, failure-relevant operation information relevant to the cause of said warning signal being generated, said failure-relevant operation information being extracted from said operation information stored in said operation information acquisition element;

    a storage element storing said extracted failure-relevant operation information; and

    an apparatus information element converting said failure-relevant operation information stored in said storage element readable from said computer through said network.

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