Substrate processing system managing apparatus information of substrate processing apparatus
First Claim
1. A substrate processing system having a substrate processing apparatus and a computer processing apparatus information of said substrate processing apparatus connected to each other through a network, comprising:
- an operation information acquisition element acquiring time-series information as to operations of said substrate processing apparatus, said information comprising operation information;
an operation information storage element storing said operation information;
a warning element generating a warning signal when said substrate processing apparatus is indicative of a failure;
an extraction element extracting, when said warning signal is generated, failure-relevant operation information relevant to the cause of said warning signal being generated, said failure-relevant operation information being extracted from said operation information stored in said operation information acquisition element;
a storage element storing said extracted failure-relevant operation information; and
an apparatus information element converting said failure-relevant operation information stored in said storage element readable from said computer through said network.
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Accused Products
Abstract
A substrate processing system comprises a substrate processing apparatus, an information storage server and a support computer, which are connected to a network respectively. When the substrate processing apparatus causes a failure, an alarm processing part extracts a necessary relevant log file and stores the same in a hard disk of the information storage server. A failure information generation part generates failure information, which in turn is finally stored in the hard disk of the information storage servers as a failure information database. An apparatus information uncasing part renders the relevant log file and the failure information database readable from the support computer located in a remote place. Thus, the relevant log file and the failure information database can be immediately read. In other words, provided is a substrate processing system rendering operation information immediately readable from a remote place when the substrate processing apparatus causes a failure.
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Citations
13 Claims
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1. A substrate processing system having a substrate processing apparatus and a computer processing apparatus information of said substrate processing apparatus connected to each other through a network, comprising:
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an operation information acquisition element acquiring time-series information as to operations of said substrate processing apparatus, said information comprising operation information; an operation information storage element storing said operation information; a warning element generating a warning signal when said substrate processing apparatus is indicative of a failure; an extraction element extracting, when said warning signal is generated, failure-relevant operation information relevant to the cause of said warning signal being generated, said failure-relevant operation information being extracted from said operation information stored in said operation information acquisition element; a storage element storing said extracted failure-relevant operation information; and an apparatus information element converting said failure-relevant operation information stored in said storage element readable from said computer through said network. - View Dependent Claims (2, 3, 4, 5)
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6. A substrate processing apparatus capable of making communication with an external computer through a network, comprising:
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an operation information acquisition element acquiring time-series information as to operation of said substrate processing apparatus as operation information; an operation information storage element storing acquired said operation information; a warning element generating a warning signal when said substrate processing apparatus causes a failure; an extraction element extracting, when said warning signal is generated, failure-relevant operation information relevant to the cause of generated said warning signal from said operation information stored in said operation information storage element; a storage element storing extracted said failure-relevant operation information; and an apparatus information converting element rendering said failure-relevant operation information stored in said storage element readable from said external computer through said network. - View Dependent Claims (7, 8, 9, 10, 11, 12)
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13. A method of managing a substrate processing apparatus from an external computer connected to said substrate processing apparatus through a network, said method comprising steps of:
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acquiring time-series information as to operation of said substrate processing apparatus as operation information; storing acquired said operation information; generating a warning signal when said substrate processing apparatus causes a failure; extracting, when said warning signal is generated, failure-relevant operation information relevant to the cause of generated said warning signal from said operation information; storing extracted said failure-relevant operation information in said storage element; and rendering said failure-relevant operation information stored in said storage element readable from an external computer through a network.
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Specification