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Micro-electromechanical sensor

  • US 7,047,814 B2
  • Filed: 07/17/2002
  • Issued: 05/23/2006
  • Est. Priority Date: 07/17/2001
  • Status: Active Grant
First Claim
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1. A device, comprising:

  • a substrate configured to act as a first electrode of a capacitor;

    a resilient element, configured to act as a second electrode of the capacitor, at least a first portion of which is secured at a position spaced from the substrate by a predetermined gap;

    a layer of dielectric material disposed between the substrate and the resilient element, said layer having a thickness corresponding to said predetermined gap; and

    a spacing member configured to separate a second portion of the resilient element from the substrate by a distance greater than said predetermined gap to define an effective electrode area of the capacitor corresponding to an area wherein the substrate and resilient element are separated by said predetermined gap, the effective electrode area chancing in response to movement of the resilient element relative to the substrate and resulting in a change in capacitance of the capacitor.

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