Method for forming a low thermal budget spacer

• US 7,049,200 B2
• Filed: 05/25/2004
• Issued: 05/23/2006
• Est. Priority Date: 05/25/2004
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Arghavani, Reza, M'Saad, Hichem, MacWilliams, Ken
• Primary Examiner(s): SARKAR, ASOK K
• Application Number:
  US10/854,013
• Publication Number:
  US 20050266622A1
• Time in Patent Office: 728 Days
• Field of Search: 427/253.29, 427/255.37, 427/255.393, 427/255.394, 438/199, 438/299, 438/301, 438/303, 438/306.786, 438/790, 438/791, 438/794
• US Class Current: 438/303
• CPC Class Codes: H01L 21/02126 the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
• CPC Class Codes: H01L 21/02164 the material being a silicon oxide, e.g. SiO2
• CPC Class Codes: H01L 21/0217 the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz H01L21/02126 and H01L21/0214 take precedence
• CPC Class Codes: H01L 21/022 the layer being a laminate, i.e. composed of sublayers, e.g. stacks of alternating high-k metal oxides adhesion layers or buffer layers H01L21/02304, H01L21/02362
• CPC Class Codes: H01L 21/02211 the compound being a silane, e.g. disilane, methylsilane or chlorosilane
• CPC Class Codes: H01L 21/02274 in the presence of a plasma [PECVD]
• CPC Class Codes: H01L 21/3145 formed by deposition from a gas or vapour
• CPC Class Codes: H01L 21/31612 on a silicon body
• CPC Class Codes: H01L 21/3185 of siliconnitrides

Abstract

A method of forming a sidewall spacer on a gate electrode of a metal oxide semiconductor device that includes striking a first plasma to form an oxide layer on a side of the gate electrode, where the first plasma is generated from a oxide gas that includes O₃ and bis-(tertiarybutylamine)silane, and striking a second plasma to form a carbon-doped nitride layer on the oxide layer, where the second plasma may be generated from a nitride gas that includes NH₃ and the bis-(tertiarybutylamine)silane. The first and second plasmas may be formed using plasma CVD and the bis-(tertiarybutylamine)silane flows uninterrupted between the striking of the first plasma and the striking of the second plasma.

Claims

1. A method of forming a sidewall spacer on a gate electrode of a metal oxide semiconductor device comprising:

forming a first plasma to form an oxide layer on a side of the gate electrode, wherein the first plasma is generated from a oxide gas comprising O₃ and an amino silane; and

forming a second plasma to form a carbon-doped nitride layer on the oxide layer, wherein the second plasma is generated from a nitride gas comprising NH₃ and an amino silane, wherein the first and second plasmas are formed using plasma CVD, wherein the amino silane flows uninterrupted between the forming of the first plasma and the forming of the second plasma.

2. The method of claim 1, wherein the amino silane is bis-(tertiarybutylamine)silane.

3. The method of claim 1, wherein the formation of the oxide layer and the nitride layer occurs at a temperature from about 250°

C. to about 400°

C.

4. The method of claim 3, wherein the high frequency RF power is about 100 W to about 300 W, and a low frequency RF power is about 0 W to about 200 W.

5. The method of claim 1, wherein, during the formation of the nitride layer, a first flow rate of the amino silane is about 200 mgm to about 600 mgm, and a second flow rate of the NH₃ is about 200 sccm to about 3000 sccm.

6. The method of claim 1, wherein the first and the second plasmas are formed using an RF power source comprising high frequency RF power.

7. The method of claim 6, wherein, during the formation of the nitride layer, a flow rate of the helium is about 1000 sccm to about 3000 sccm.

8. The method of claim 1, wherein the nitride gas comprises helium.

9. The method of claim 1, wherein a pressure for the nitride gas is about 2.5 torr to about 6 torr.

10. The method of claim 1, wherein the oxide layer has a thickness of about 50 Å

.

11. The method of claim 1, wherein the nitride layer has a thickness of about 400 Å

to about 1500 Å

.

12. A method of forming a metal-oxide semiconductor device, the method comprising:

forming a gate oxide and a gate electrode over a semiconductor substrate;

forming a halo section in the substrate; and

forming a first sidewall spacer along a first side of the gate electrode and over the halo section, and a second sidewall spacer along a second side of the gate electrode opposite the first side,

wherein the first and the second sidewall spacers comprise an oxide layer contacting the gate electrode and a carbon-doped nitride layer contacting the oxide layer, and wherein both the oxide layer and the nitride layer are formed by way of plasma CVD using a silicon source comprising bis-(tertiarybutylamine)silane, wherein the bis-(tertiarybutylamine)silane flows uninterrupted between the formation of the oxide layer and the nitride layer.

13. The method of claim 12, wherein the first and the second sidewall layers are formed at a temperature from about 250°

C. to about 400°

C.

14. The method of claim 12, wherein the oxide layer is formed from a oxide gas comprising O₃ and the bis-(tertiarybutylamine)silane.

15. The method of claim 12, wherein the nitride layer is formed form a nitride gas comprising NH₃ and the bis-(tertiarybutylamine)silane.

16. The method of claim 12, wherein the forming of the halo section comprises implanting a dopant in the substrate at a dose of about 1×

10¹³ cm<sup>−

2</sup> to about 5×

10¹⁵ cm<sup>−

2</sup>.

17. The method of claim 16, wherein the dopant comprises boron.

18. The method of claim 12, wherein the halo section has a dopant concentration of about 1×

10¹⁸ cm<sup>−

3</sup> or more.

19. The method of claim 12, comprising, prior to forming the first and second sidewall spacer, annealing the halo section at a temperature from about 500°

C. to about 800°

C.

20. A method of forming a field effect transistor in a low thermal budget process, the method comprising:

forming a gate electrode over a semiconductor substrate;

forming a halo section comprising a boron dopant in the substrate; and

forming a first sidewall spacer along a first side of the gate electrode and over the halo section, and a second sidewall spacer along a second side of the gate electrode opposite the first side,

wherein the first and the second sidewall spacers comprise an oxide layer contacting the gate electrode and a carbon-doped nitride layer contacting the oxide layer, and wherein both the oxide layer and the nitride layer are formed by way of plasma CVD operating at a temperature from about 250°

C. to about 400°

C. and using a silicon source comprising bis-(tertiarybutylamine)silane, wherein the bis-(tertiarybutylamine)silane flows uninterrupted between the formation of the oxide layer and the nitride layer.