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Electromagnetic induction type position sensor

  • US 7,049,924 B2
  • Filed: 06/29/2005
  • Issued: 05/23/2006
  • Est. Priority Date: 06/30/2004
  • Status: Active Grant
First Claim
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1. An electromagnetic induction type position sensor comprising:

  • AC magnetic flux generating means for generating an AC magnetic flux which repeatedly becomes strong and weak substantially at a wavelength λ

    in a movement direction of a position detection target; and

    a plurality of coils which receives the AC magnetic flux to output electromagnetic induction voltages different from each other in phase of an amplitude change,wherein each coil includes a plurality of conductive patterns formed in each of an even number of layers laminated via insulating materials,a shape of each conductive pattern is a sinusoidal shape at the wavelength λ

    extending in the movement direction of the position detection target,each conductive pattern pairs with the sinusoidal conductive pattern in a reverse phase formed at the same position in another layer,two or more conductive patterns of the plurality of conductive patterns constituting a same coil and formed in the same layer are adjacently arranged with a space between them in an amplitude direction of the sinusoidal shape, andall of the conductive patterns constituting a same coil are connected in series so that a direction of an electric current of these conductive patterns is opposite to that of the paired conductive patterns when viewed from a front of the layers.

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