Method of manufacturing a display device having a driver circuit attached to a display substrate
First Claim
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1. A method of manufacturing an active matrix display device wherein said display device has a first substrate provided with a plurality of pixel electrodes and switching thin film transistors for switching said pixel electrodes, and a first electrode comprising a transparent conductive oxide, the method comprising the steps of:
- forming a semiconductor film over a glass substrate;
crystallizing said semiconductor film;
patterning the crystallized semiconductor film into a plurality of semiconductor islands;
forming a plurality of thin film transistors using said semiconductor islands;
forming a driver circuit with said plurality of thin film transistors;
forming a passivation film over said driver circuit;
forming a second electrode comprising a transparent conductive oxide over said passivation film, said second electrode electrically connected to said driver circuit through a contact hole of said passivation film;
attaching said glass substrate provided with said driver circuit to said first substrate so that said second electrode is electrically connected to said first electrode.
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Abstract
A method of fabricating a driver circuit for use with a passive matrix or active matrix electrooptical display device such as a liquid crystal display. The driver circuit occupies less space than heretofore. A circuit (stick crystal) having a length substantially equal to the length of one side of the matrix of the display device is used as the driver circuit. The circuit is bonded to one substrate of the display device, and then the terminals of the circuit are connected with the terminals of the display device. Subsequently, the substrate of the driver circuit is removed. This makes the configuration of the circuit much simpler than the configuration of the circuit heretofore required by the TAB method or COG method, because conducting lines are not laid in a complex manner. The driver circuit can be formed on a large-area substrate such as a glass substrate. The display device can be formed on a lightweight material having a high shock resistance such as a plastic substrate. Hence, a display device having excellent portability can be obtained.
221 Citations
27 Claims
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1. A method of manufacturing an active matrix display device wherein said display device has a first substrate provided with a plurality of pixel electrodes and switching thin film transistors for switching said pixel electrodes, and a first electrode comprising a transparent conductive oxide, the method comprising the steps of:
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forming a semiconductor film over a glass substrate;
crystallizing said semiconductor film;
patterning the crystallized semiconductor film into a plurality of semiconductor islands;
forming a plurality of thin film transistors using said semiconductor islands;
forming a driver circuit with said plurality of thin film transistors;
forming a passivation film over said driver circuit;
forming a second electrode comprising a transparent conductive oxide over said passivation film, said second electrode electrically connected to said driver circuit through a contact hole of said passivation film;
attaching said glass substrate provided with said driver circuit to said first substrate so that said second electrode is electrically connected to said first electrode.
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2. A method of manufacturing a display device comprising:
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preparing at least one display substrate provided with first electrodes comprising a transparent conductive oxide;
forming a semiconductor film over a glass substrate;
crystallizing said semiconductor film formed over said glass substrate;
patterning the crystallized semiconductor film into a plurality of semiconductor islands;
forming a plurality of thin film transistors with said semiconductor islands for constituting a plurality of driver circuits;
forming a passivation film over said plurality of thin film transistors;
forming second electrodes comprising a transparent conductive oxide over said passivation film, said second electrodes electrically connected to said driver circuits through contact holes of said passivation film;
dividing said glass substrate to obtain at least one divided glass substrate wherein said divided glass substrate carries at least one of said driver circuits and at least one of said second electrodes thereon; and
attaching said divided glass substrate to a display substrate so that said at least one of the second electrodes is electrically connected to said first electrodes. - View Dependent Claims (3, 4, 5)
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6. A method of manufacturing a display device comprising:
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preparing at least one display substrate provided with first electrodes wherein said display substrate comprises a plastic;
forming a semiconductor film over a glass substrate;
crystallizing said semiconductor film formed over said display substrate;
patterning the crystallized semiconductor film into a plurality of semiconductor islands;
forming a plurality of thin film transistors with said semiconductor islands as an active layer thereof for constituting a plurality of driver circuits;
forming a passivation film over said plurality of thin film transistors;
forming second electrodes over said passivation film, said second electrodes electrically connected to said driver circuits through contact holes of said passivation film;
dividing said glass substrate to obtain at least one divided glass substrate wherein said divided glass substrate carries at least one of said driver circuits thereon and at least one of said second electrodes; and
attaching said divided glass substrate to a display substrate so that said at least one of the second electrodes is electrically connected to said first electrodes, wherein both of said first and second electrodes comprise a transparent conductive oxide. - View Dependent Claims (7, 8)
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9. A method of manufacturing an active matrix type display device comprising:
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preparing at least one display substrate provided with a plurality of pixel electrodes and switching thin film transistors for switching said pixel electrodes and first electrodes for supplying signals to said switching thin film transistors;
forming a semiconductor film over a glass substrate;
crystallizing said semiconductor film;
patterning the crystallized semiconductor film into a plurality of semiconductor islands;
forming a plurality of thin film transistors with said semiconductor islands as an active layer thereof for constituting a plurality of driver circuits;
forming a passivation film over said plurality of thin film transistors;
forming second electrodes over said passivation film, said second electrodes electrically connected to said driver circuits through contact holes of said passivation film;
dividing said glass substrate to obtain at least one divided glass substrate wherein said divided glass substrate carries at least one of said driver circuits thereon and at least one of said second electrodes; and
attaching said divided glass substrate to a display substrate so that said at least one of the second electrodes is electrically connected to at least one of said first electrodes, wherein both of said first and second electrodes comprise a transparent conductive oxide. - View Dependent Claims (10, 11)
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12. A method of manufacturing an active matrix type display device comprising:
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preparing at least one display substrate provided with a plurality of pixel electrodes and switching thin film transistors for switching said pixel electrodes and first electrodes for supplying signals to said thin film transistors;
forming a semiconductor film over a glass substrate;
crystallizing said semiconductor film wherein the crystallization is promoted by adding a catalyst to said semiconductor film;
patterning the crystallized semiconductor film into a plurality of semiconductor islands;
forming a plurality of thin film transistors with said semiconductor islands as an active layer thereof for constituting a plurality of driver circuits;
forming a passivation film over said plurality of thin film transistors;
forming second electrodes over said passivation film, said second electrodes electrically connected to said driver circuits through contact holes of said passivation film;
dividing said glass substrate to obtain at least one divided glass substrate wherein said divided glass substrate carries at least one of said driver circuits thereon and at least one of said second electrodes; and
attaching said divided glass substrate to a display substrate so that said at least one of the second electrodes is electrically connected to said first electrodes, wherein both of said first and second electrodes comprise a transparent conductive oxide. - View Dependent Claims (13, 14, 15)
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16. A method of manufacturing a display device comprising:
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preparing at least one display substrate provided with a plurality of first electrodes comprising a transparent oxide;
forming a semiconductor film over a glass substrate;
crystallizing said semiconductor film;
patterning the crystallized semiconductor film into a plurality of semiconductor islands;
forming a plurality of thin film transistors with said semiconductor islands as an active layer thereof for constituting a plurality of driver circuits;
forming a passivation film over the plurality of thin film transistors;
forming transparent electrodes over said passivation film wherein said transparent electrodes comprise a transparent conductive oxide;
forming metal bumps on said transparent electrodes;
dividing said glass substrate to obtain at least one divided glass substrate wherein said divided glass substrate carries at least one of said driver circuits thereon; and
attaching said divided glass substrate to a display substrate so that said driver circuit is electrically connected to said first electrodes through said transparent electrodes and said metal bumps. - View Dependent Claims (17, 18, 19, 20, 21)
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22. A method of manufacturing a display device comprising:
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preparing at least one display substrate provided with a plurality of first transparent electrodes;
forming a semiconductor film over a glass substrate;
crystallizing said semiconductor film;
patterning the crystallized semiconductor film into a plurality of semiconductor islands;
forming a plurality of thin film transistors with said semiconductor islands as an active layer thereof for constituting a plurality of driver circuits;
forming a passivation film over the plurality of thin film transistors;
forming second transparent electrodes over said passivation film wherein said transparent electrodes comprise a transparent conductive oxide;
dividing said glass substrate to obtain at least one divided glass substrate wherein said divided glass substrate carries at least one of said driver circuits thereon; and
attaching said divided glass substrate to a display substrate so that said driver circuit is electrically connected to said electrodes through said first and second transparent electrodes. - View Dependent Claims (23, 24, 25, 26, 27)
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Specification
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Current AssigneeSemiconductor Energy Laboratory Co., Ltd.
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Original AssigneeSemiconductor Energy Laboratory Co., Ltd.
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InventorsNakajima, Setsuo, Arai, Yasuyuki, Takemura, Yasuhiko, Yamazaki, Shunpei
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Primary Examiner(s)Parker, Kenneth
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Application NumberUS09/517,354Time in Patent Office2,273 DaysField of Search349/42, 349/43, 349/45, 349/149, 349/151, 349/152US Class Current349/152CPC Class CodesG02F 1/1303 Apparatus specially adapted...G02F 1/133305 Flexible substrates, e.g. p...G02F 1/1345 Conductors connecting elect...G02F 1/13452 Conductors connecting drive...G02F 1/13454 Drivers integrated on the a...H01L 21/67132 Apparatus for placing on an...H01L 2221/68363 used in a transfer process ...H01L 2224/16 of an individual bump conne...H01L 2924/01079 Gold [Au]
