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Method of measuring weak gas flows

  • US 7,051,418 B2
  • Filed: 08/14/2003
  • Issued: 05/30/2006
  • Est. Priority Date: 03/31/1999
  • Status: Expired due to Fees
First Claim
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1. A method of measuring a weak gas flow, which comprises:

  • producing an assembly of self-supporting microstructures by;

    a) providing a supporting frame with at least one opening;

    b) applying, on the supporting frame, an adhesive film spanning the opening in the supporting frame flatly;

    c) applying an auxiliary layer on an underside of the adhesive film and adjacent regions of the supporting frame with the auxiliary layer spanning the opening in the supporting frame on one side flush with the supporting frame;

    d) removing the adhesive film;

    e) constructing microstructures on the common plane including the auxiliary layer and the supporting frame; and

    f) removing the auxiliary layer formed in step c);

    integrating the self-supporting microstructures configured as electrically heatable resistance grids in a device for measuring weak gas flows; and

    exposing the resistance grids to the weak gas flow and measuring the weak gas flow.

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