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Flow cell humidity sensor system

  • US 7,051,574 B2
  • Filed: 11/16/2004
  • Issued: 05/30/2006
  • Est. Priority Date: 12/13/2001
  • Status: Expired due to Fees
First Claim
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1. An array production system comprising:

  • an environment for holding a chemical array substrate, and a capacitance measurement system comprising,a body defining a chamber having first and second ports, said chamber containing a capacitance sensor probe,first and second valves, said first valve in communication with said first port and said second valve in communication with said second port, anda dry gas source,wherein a sampling conduit provides fluid communication through said first port between said chamber and said environment, andwherein said valves am positioned to allow dry gas to flow through said chamber in one state to dehydrate said sensor, and a gaseous sample from said environment to flow through said chamber in another state.

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