Fabrication of a printhead chip incorporating a plurality of nozzle arrangements
First Claim
1. A method of fabricating a printhead chip that incorporates a plurality of nozzle arrangements, each nozzle arrangement having nozzle chamber walls that define a nozzle chamber and an ink ejection port bounded by a rim, the method comprising the steps of:
- depositing a sacrificial layer on a substrate having drive circuitry formed on the substrate;
etching the sacrificial layer to define deposition zones for the nozzle chamber walls and the rim;
depositing a conformal layer of structural material on the sacrificial layer;
planarizing the conformal layer to a predetermined depth to define each ink ejection port bounded by its respective rim; and
etching away the sacrificial layer.
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Accused Products
Abstract
A method of fabricating a printhead chip that includes a plurality of nozzle arrangements, each nozzle arrangement having nozzle chamber walls that define a nozzle chamber and an ink ejection port bounded by a rim includes the step of depositing a sacrificial layer on a substrate having drive circuitry formed on the substrate. The sacrificial layer is etched to define deposition zones for the nozzle chamber walls and the rim. A conformal layer of structural material is deposited on the sacrificial layer. The conformal layer is planarized to a predetermined depth to define each ink ejection port bounded by its respective rim. The sacrificial layer is then etched away.
21 Citations
9 Claims
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1. A method of fabricating a printhead chip that incorporates a plurality of nozzle arrangements, each nozzle arrangement having nozzle chamber walls that define a nozzle chamber and an ink ejection port bounded by a rim, the method comprising the steps of:
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depositing a sacrificial layer on a substrate having drive circuitry formed on the substrate;
etching the sacrificial layer to define deposition zones for the nozzle chamber walls and the rim;
depositing a conformal layer of structural material on the sacrificial layer;
planarizing the conformal layer to a predetermined depth to define each ink ejection port bounded by its respective rim; and
etching away the sacrificial layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification