Coated article including titanium oxycarbide and method of making same
First Claim
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1. A method of making a coated article, the method comprising:
- providing a glass substrate;
sputtering a layer comprising titanium oxide TiOx (where x is from 1 to
3) on the substrate, thereby forming a sputtered layer; and
utilizing at least one ion source using anode-cathode voltage of at least about 1,500 V to cause at least carbon ions to be directed toward the sputtered layer comprising titanium oxide so that at least some of the carbon ions are implanted into the sputtered layer to a depth of at least 25 Å
below a surface of the sputtered layer, so that a layer comprising titanium oxycarbide is an outermost layer of a coating of the coated article.
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Abstract
A coated article is provided which includes a layer including titanium oxycarbide. In order to form the coated article, a layer of titanium oxide is deposited on a substrate by sputtering or the like. After sputtering of the layer including titanium oxide, an ion beam source(s) is used to implant at least carbon ions into the titanium oxide. When implanting, the carbon ions have sufficient ion energy so as to knock off oxygen (O) from TiOx molecules so as to enable a substantially continuous layer comprising titanium oxycarbide to form near a surface of the previously sputtered layer.
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Citations
46 Claims
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1. A method of making a coated article, the method comprising:
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providing a glass substrate; sputtering a layer comprising titanium oxide TiOx (where x is from 1 to
3) on the substrate, thereby forming a sputtered layer; andutilizing at least one ion source using anode-cathode voltage of at least about 1,500 V to cause at least carbon ions to be directed toward the sputtered layer comprising titanium oxide so that at least some of the carbon ions are implanted into the sputtered layer to a depth of at least 25 Å
below a surface of the sputtered layer, so that a layer comprising titanium oxycarbide is an outermost layer of a coating of the coated article. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of making a coated article, the method comprising:
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providing a substrate; sputtering a layer comprising titanium oxide on the substrate, thereby forming a sputtered layer; directing at least carbon ions toward the sputtered layer comprising titanium oxide, at least some of the carbon ions having an ion energy of at least 200 eV per carbon ion so that at least some of the carbon ions implant in the sputtered layer thereby forming a layer comprising titanium oxycarbide which is an outermost layer of the resulting coated article; and wherein at least some of the carbon ions implant into the sputtered layer to a depth of at least 25 Å
below a surface of the sputtered layer. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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33. A method of making a coated article, the method comprising:
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providing a substrate; forming a layer comprising a metal oxide on the substrate; directing at least carbon ions toward the layer comprising the metal oxide, at least some of the carbon ions having an ion energy of at least 200 eV per carbon ion so that at least some of the carbon ions implant in the layer thereby forming a layer comprising an oxycarbide which is an outermost layer of the resulting coated article; and wherein at least some of the carbon ions implant into the layer to a depth of at least 25 Å
below a surface of the layer. - View Dependent Claims (34, 35, 36, 37, 38, 39, 40)
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41. A method of making a coated article, the method comprising:
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providing a glass substrate; sputtering a layer comprising a metal (M) oxide MOx (where x is from 1 to
3) on the substrate, thereby forming a sputtered layer; andutilizing at least one ion source using anode-cathode voltage of at least about 1,500 V to cause at least carbon ions to be directed toward the sputtered layer comprising the metal oxide so that at least some of the carbon ions are implanted into the sputtered layer to a depth of at least 25 Å
below a surface of the sputtered layer thereby forming a layer comprising oxycarbide; andwherein the oxycarbide is at an outermost portion of a coating of the coated article so as to be exposed to surrounding atmosphere. - View Dependent Claims (42, 43)
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44. A method of making a coated article, the method comprising:
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providing a substrate; forming a layer comprising a metal oxide on the substrate; directing at least carbon ions toward the layer comprising the metal oxide, at least some of the carbon ions having an ion energy sufficient so as to cause at least some of the carbon ions to implant in the layer to a depth of at least 25 Å
below a surface of the layer and form a layer comprising an oxycarbide, wherein the oxycarbide is at an outermost portion of the coated article and is exposed to surrounding atmosphere in the resulting coated article. - View Dependent Claims (45, 46)
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Specification