Semiconductor integrated circuit including an inductor and method of manufacturing the same
First Claim
1. A semiconductor integrated circuit, comprising:
- an inductor on a substrate;
a first metal layer inside the inductor when viewed from a direction perpendicular to a surface of the substrate, a lower surface of the first metal layer being no higher than a lower surface of the inductor;
a ferromagnetic substance layer on the first metal layer, a lower surface of the ferromagnetic substance layer being lower than an upper surface of the inductor, an upper surface of the ferromagnetic substance layer being higher than the lower surface of the inductor; and
a second metal layer that covers an upper and side surface of the ferromagnetic substance layer, an upper surface of the second metal layer being no lower than the upper surface of the inductor.
3 Assignments
0 Petitions
Accused Products
Abstract
A semiconductor integrated circuit device, and method of manufacturing the same, includes an inductor with improved inductance and an improved quality factor (Q-factor) that can be miniaturized. In one example, an inductor (3) is provided on an insulating layer (2) of a multilayer interconnection layer (1). The inductor (3) is formed by a spiral arrangement of a wiring (3a). A lamination film (14) is provided in an internal region (13) of an inductor (3) on insulating layer (2), and can be formed by laminating a titanium-tungsten (TiW) layer (9), a copper (Cu) layer (10), a ferromagnetic substance layer (15) made of nickel (Ni), a Cu layer (11), and a TiW layer (12), in that order. A lower surface of ferromagnetic substance layer (15) can be lower than an upper surface of wiring layer (3a), and an upper surface of ferromagnetic substance layer (15) can be higher than a lower surface of wiring layer (3a). As a result, a lower portion of ferromagnetic substance layer (15) can be at the same layer (level) as wiring layer (3a). An upper surface of lamination film (14) can be made higher than a wiring layer (3a), and a lower surface of lamination film (14) can be made lower than a lower surface of a wiring layer (3a).
20 Citations
20 Claims
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1. A semiconductor integrated circuit, comprising:
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an inductor on a substrate;
a first metal layer inside the inductor when viewed from a direction perpendicular to a surface of the substrate, a lower surface of the first metal layer being no higher than a lower surface of the inductor;
a ferromagnetic substance layer on the first metal layer, a lower surface of the ferromagnetic substance layer being lower than an upper surface of the inductor, an upper surface of the ferromagnetic substance layer being higher than the lower surface of the inductor; and
a second metal layer that covers an upper and side surface of the ferromagnetic substance layer, an upper surface of the second metal layer being no lower than the upper surface of the inductor. - View Dependent Claims (2, 3, 4, 5)
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6. A semiconductor integrated circuit, comprising:
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an inductor on a substrate; and
a laminated film beside the inductor wherein the laminated film having a ferromagnetic substance layer and a metal layer covering the ferromagnetic substance layer to prevent diffusion of the ferromagnetic substance layer. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A semiconductor integrated circuit comprising:
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an inductor on a substrate;
a laminated film beside the inductor wherein the laminated film having a ferromagnetic substance layer and a metal layer covering the ferromagnetic substance layer to prevent diffusion of the ferromagnetic substance layer; and
the metal layer having a first layer and a second layer; and
a lower surface of the ferromagnetic substance layer is covered with the first layer and an upper surface and a side surface of the ferromagnetic substance layer is covered with the second layer. - View Dependent Claims (17, 18)
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19. A semiconductor integrated circuit comprising:
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an inductor on a substrate;
a laminated film beside the inductor wherein the laminated film having a ferromagnetic substance layer and a metal layer covering the ferromagnetic substance layer to prevent diffusion of the ferromagnetic substance layer; and
the metal layer includes a barrier metal layer.
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20. A semiconductor integrated circuit comprising:
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an inductor on a substrate;
a laminated film beside the inductor wherein the laminated film having a ferromagnetic substance layer and a metal layer covering the ferromagnetic substance layer to prevent diffusion of the ferromagnetic substance layer; and
a multilayer interconnection layer on the substrate wherein the inductor and the laminated film are formed on an uppermost layer of the multilayer interconnection layer.
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Specification