Scan data collection for better overall data accuracy

• US 7,053,369 B1
• Filed: 10/18/2002
• Issued: 05/30/2006
• Est. Priority Date: 10/19/2001
• Status: Active Grant

• Current Assignee: Bruker Nano, Inc. (Bruker Corporation)
• Original Assignee: Rave LLC (Bruker Corporation)
• Inventors: Roessler, Kenneth, Chen, Dong
• Primary Examiner(s): Wells, Nikita
• Assistant Examiner(s): Leybourne, James J.
• Application Number:
  US10/274,669
• Time in Patent Office: 1,320 Days
• Field of Search: 250/306, 250/307, 731/05
• US Class Current: 250/306
• CPC Class Codes: G01Q 10/06 Circuits or algorithms therefor
• CPC Class Codes: G01Q 30/04 Display or data processing devices

Abstract

A scan data collection operation includes performing a scanning operation using a scan path that includes a directional component that is additional to a data collection directional component. The collected scan data is mapped to another set of locations, thus allowing for detection of surface features using fewer scans.

Claims

1. A method for collecting scan data from an SPM (scanning probe microscopy) system comprising:

moving a probe across a surface in a first pattern of movement, wherein the first pattern is characterized by a set of one or more paths;

further moving the probe across the surface in a second pattern of movement by superimposing the second pattern onto the first pattern, wherein the second pattern is characterized at least by lateral deflections relative to the set of one or more paths; and

collecting scan data, each scan datum comprising first information representative of a physical measurement of the surface and second information indicative of a first location, the first location being the location on the surface where the first information was collected.

2. The method of claim 1 wherein the scan data is collected along a first scan path, the first scan path covering a scan area of the surface, the first location of each scan datum being a location along a first line within the scan area, wherein each second location is a location along a second line different from the first line.

3. The method of claim 2 wherein the scanning operation further includes scanning the probe along a second scan path, wherein the scan data is further collected along the second scan path.

4. The method of claim 3 wherein the second scan path overlaps the first scan path.

5. The method of claim 3 wherein the first scan path is spaced apart from the second scan path.

6. The method of claim 3 wherein the first scan path is differently shaped than the second scan path.

7. The method of claim 2 wherein the second line lies wholly within the scan area.

8. The method of claim 2 wherein the second line lies partially within the scan area and partially outside the scan area.

9. The method of claim 2 wherein the second line lies along a boundary of the scan area.

10. The method of claim 1 wherein the second pattern is a zig-zag shaped pattern.

11. The method of claim 1 wherein the first pattern of movement is a raster scan pattern, and the second pattern of movement is superimposed on the raster scan pattern.

12. The method of claim 1 further comprising, for some of the scan data, altering the respective second information of the scan datum to indicate a second location wherein that scan datum appears to have been collected at the second location.

13. A method for collecting scan data from a scanning probe microscopy (SPM) system comprising:

performing a plurality of raster scans laterally relative to a surface to be scanned including alternating between displacing a probe relative to the surface along a scan direction and displacing the probe relative to the surface along an index direction in order to set up for a subsequent displacing of the probe along the scan direction; and

while displacing the probe along the scan direction, moving the probe in an oscillatory fashion laterally relative to the surface to be scanned.

14. The method of claim 13 as used in any one of atomic force microscopy (AFM), scanning tunneling microscopy (STM), near-field scanning optical microscopy (NSOM), nanospectral photometry (NSP), nanopolarimetry (NP), or magnetic field microscopy (MFM).

15. A method for collecting scan data from a scan area of a surface by moving a probe laterally relative to the surface comprising:

producing lateral oscillatory motion in the probe;

while the probe is oscillating laterally, performing a first scan operation by displacing the laterally oscillating probe from a first end of the scan area to a second end of the scan area;

indexing the probe for a second scan operation, where the foregoing is repeated; and

while the probe is oscillating laterally, performing the second scan operation by displacing the laterally oscillating probe from the first end of the scan area to the second end of the scan area.

16. The method of claim 15 wherein said performing a first scan operation includes displacing the laterally oscillating probe along a curvilinear path.

17. The method of claim 15 wherein said performing the second scan operation includes displacing the laterally oscillating probe along a path that is not parallel to the path of the first scan operation.

18. The method of claims 15 wherein the lateral oscillatory motion is a zig-zag motion.

19. A method for collecting scan data in a scanning probe microscopy (SPM) system comprising:

performing a first scan operation of a scan area on a surface to be scanned, the first scan operation including displacing a probe along a first line of travel from a first end of the scan area to a second end of the scan area;

during the first scan operation, moving the probe so as to collect scan data at points on the surface other than points on the surface that lie along the first line of travel;

indexing the probe for a second scan operation, the second scan operation including displacing the probe along a second line of travel; and

during the second scan operation, moving the probe so as to collect scan data at points on the surface other than points on the surface that lie along the second line of travel.

20. A method of operating an SPM to collect scan data from an area of a surface to be scanned comprising:

positioning a probe to a start point in the area of the surface to be scanned; and

scanning the area in raster fashion by moving the probe relative to the surface to be scanned along a line of travel, including;

displacing the probe laterally across the surface about the line of travel;

collecting data during the scan operation from a region of the area to be scanned that is defined by a first boundary and by a secondary; and

indexing the probe to a next point in the area of the surface to be scanned in preparation for a subsequent scan operation.

21. A method of operating an SPM to collect scan data from an area of a surface to be scanned comprising:

positioning a probe to a start point in the area of the surface to be scanned; and

performing a raster-fashion scan of the area, comprising alternating between a scan operation and an indexing operation,

wherein the scan operation includes displacing the probe across a width of the area to be scanned while at the same time collecting data from a region of the area to be scanned, the region being bounded by a first boundary and by a secondary.