Distributed, load sharing power supply system for IC tester

• US 7,053,648 B2
• Filed: 12/28/2004
• Issued: 05/30/2006
• Est. Priority Date: 06/09/2003
• Status: Active Grant

• Current Assignee: Xcerra Corporation (COHU Incorporated)
• Original Assignee: Credence Systems Corporation (COHU Incorporated)
• Inventors: DeVey, William
• Primary Examiner(s): TANG, MINH NHUT
• Application Number:
  US11/024,528
• Publication Number:
  US 20050174137A1
• Time in Patent Office: 518 Days
• Field of Search: None
• US Class Current: 324/756.06
• CPC Class Codes: G01R 31/31924 Voltage or current aspects, e.g. driver, receiver

Abstract

An integrated circuit (IC) tester includes a set of power modules mounted in a test head, each contacting a device interface board (DIB). The DIB provides power paths for delivering an output current generate by each power module to a power input terminals of one or more IC devices under test (DUTs). Power modules that supply current to the same set of DUTs communicate with one another though conductive paths provided by the DIB to ensure that all power modules begin supplying load current to that set of DUTs at the same time and to ensure that all power modules supply substantially the same amount of load current to those DUTs.

Claims

1. An improved apparatus for testing an integrated circuit device under test (DUT) having a power input terminal for receiving current for powering the DUT, input terminals for receiving test signals, and output terminals for forwarding output signals that the DUT generates in response to the test signals, the apparatus comprising:

a plurality of tester channels for generating the test signals and for processing the DUT'"'"'s output signals to determine how the DUT'"'"'s output signals behave,

a plurality of power modules, wherein each power module has a power output terminal and includes a power supply having a power supply output terminal connected to the power module'"'"'s power output terminal, and the power supply is operative to develop a supply voltage at the power supply output terminal and to deliver an output current to the power supply output terminal, and

a device interface structure for delivering the test signals from the tester channels to the DUT'"'"'s input terminals, for delivering the DUT'"'"'s output signals to the tester channels, and for delivering output current from the power output terminal of each power module to the DUT'"'"'s power input terminal,

and wherein the improvement resides in that;

the device interface structure includes a control signal conductor for delivering a control signal to at least some of the power modules, and

each power module that receives the control signal is responsive to the control signal to adjust at least one of the supply voltage developed at the power module'"'"'s power output terminal and the output current delivered to the power module'"'"'s power output terminal.

2. The apparatus in accordance with claim 1 wherein the control signal is a sense signal of voltage proportional to a load voltage appearing at the DUT'"'"'s power input terminal and the control signal conductor delivers the sense signal to each of the power modules, and the power supply of each power module responds to the sense signal by increasing the voltage developed at the power supply output terminal when the sense signal voltage is lower than a reference voltage and decreasing the voltage developed at the power supply output terminal when the sense signal voltage is higher than the reference voltage.

3. The apparatus in accordance with claim 1

wherein the control signal is a sense signal of voltage proportional to a load voltage appearing at the DUT'"'"'s power input terminal and the control signal conductor delivers the sense signal to each of the power modules,

wherein the apparatus further comprises a controller for communicating with the power modules via digital signals,

wherein each power module includes a reference voltage source that is controlled by the controller via the digital signals and is operative to generate said reference voltage, and

wherein the power supply of each power module responds to the sense signal by increasing the voltage developed at the power supply output terminal when the sense signal voltage is lower than the reference voltage and decreasing the voltage developed at the power supply output terminal when the sense signal voltage is higher than the reference voltage.

4. The apparatus in accordance with claim 3 wherein the reference voltage source of each power module is responsive to the digital signals to adjust the reference voltage.

5. The apparatus in accordance with claim 1 wherein the control signal is a load share signal of a voltage controlled by a power module that is currently supplying a higher output current at the power module'"'"'s power output terminal than any other power module, and wherein the power supply in each other power module responds to the load share signal by increasing its output current when it is producing less output current than said higher output current.

6. The apparatus in accordance with claim 5 wherein each power module includes a current sensor circuit for producing a current control signal indicating the magnitude of the output current supplied by the power supply of that power module and a load share control circuit responsive to the current control signal and the load share signal to adjust the supply voltage developed by the power supply.

7. The apparatus in accordance with claim 1

wherein each power module includes an adjustable impedance element connected between the power supply output terminal and the power module'"'"'s power output terminal,

wherein each power module has an input enable terminal for receiving an input enable signal that enables the power supply of that power module when the input enable signal is asserted and disables the power supply of that power module when the input enable signal is de-asserted,

wherein the power supply of each power module develops the supply voltage at the power supply output terminal when enabled and does not develop the supply voltage at the power supply output terminal when disabled, and

wherein each power module further comprises an enable control circuit for setting the adjustable impedance element of that power module to a low impedance after the input enable signal is asserted and for setting the adjustable impedance element of that power module to a high impedance when the input enable signal is de-asserted.

8. The apparatus in accordance with claim 7 wherein the adjustable impedance element of each power module is a transistor.

9. The apparatus in accordance with claim 7

wherein the enable control circuit of each power module has a group enable terminal,

wherein the control signal conductor is connected to the group enable terminals of the enable control circuits of the power modules respectively for delivering a group enable signal to the enable control circuits,

wherein the enable control circuit of each power module sets the group enable signal to a first state when the power module'"'"'s input enable signal is de-asserted, and allows the group enable signal to go to a second state with a fixed delay after the power module'"'"'s input enable signal is asserted, and

wherein the enable control circuit of each power module changes the adjustable impedance element of that power module from a high impedance to a low impedance when the group enable signal changes from the first state to the second state.

10. The apparatus in accordance with claim 9

wherein the adjustable impedance element of each power module is a transistor,

wherein state changes in the group enable signal drive a control terminal of the transistor, such that the transistor is off when the group enable signal is of the first state and is on when the group enable signal is of the second state, and

wherein the apparatus further comprises at least one capacitor connected to the control signal conductor for substantially slowing a change in state in the group enable signal from the first state to the second state so that the transistor gradually turns on.

11. The apparatus in accordance with claim 9

wherein the device interface structure includes a load share signal conductor for conveying a load share signal among the power modules and a sense signal conductor for conveying a sense signal to the power modules.

12. The apparatus in accordance with claim 7 further comprising a controller for communicating with the power modules via digital signals, wherein the digital signals include the input enable signal supplied to each power module.

13. The apparatus in accordance with claim 7

wherein the control signal is a sense signal of voltage proportional to a load voltage appearing at the DUT'"'"'s power input terminal and the control signal conductor delivers the sense signal to each of the power modules,

wherein each power module includes a sense control circuit that is responsive to the enable control circuit and the sense signal for generating a voltage feedback signal,

wherein the power supply of each power module responds to the voltage feedback signal by increasing the voltage developed at the power supply output terminal when the voltage feedback signal voltage is lower than a reference voltage and decreasing the voltage developed at the power supply output terminal when the voltage feedback signal voltage is higher than the reference voltage,

and wherein the sense control circuit generates the voltage feedback signal by attenuating the sense signal in response to the enable control circuit,

whereby when the power module receives the input enable signal, the voltage developed at the power supply output terminal increases concurrently with a decrease in the impedance of the adjustable impedance element.

14. The apparatus in accordance with claim 13 further comprising:

a power distribution board installed in the chassis and including a power connector, and

a main power supply for supplying operating power at an output of the main power supply,

wherein the power module cards are installed on the power distribution board, and

wherein the output of the main power supply is connected to the power connector of the power distribution board for supplying operating power to the power connector, and the power distribution board delivers the operating power from the power connector to the power module cards.

15. The apparatus in accordance with claim 14 wherein the main power supply supplies DC power and the power supply in each power module comprises a DC/DC converter.

16. The apparatus in accordance with claim 1 further comprising:

a chassis, and

a plurality of power module cards installed in the chassis and each holding at least one of the power modules.

17. The apparatus in accordance with claim 16

wherein the device interface structure comprises a circuit board having a surface upon which reside a plurality of conductive pads,

wherein the device interface structure includes a DUT power supply terminal for connection to the DUT'"'"'s power input terminal and a power conductor that connects the conductive pads to the DUT power supply terminal, and

wherein the power module cards comprise connectors that connect the power output terminals of the power modules to the conductive pads of the device interface structure.

18. The apparatus in accordance with claim 17 wherein the device interface structure includes a socket for holding the DUT.

19. The apparatus in accordance with claim 16

wherein the device interface structure comprises a circuit board having a surface upon which reside a plurality of conductive pads,

wherein the conductive pads of the device interface structure are connected to the control signal conductor, and

wherein the power module cards comprise connectors that contact the conductive pads for delivering the control signal.

20. The apparatus in accordance with claim 19 wherein the control signal is a sense signal of voltage proportional to a load voltage appearing at the DUT'"'"'s power input terminal, or a load share signal of a voltage controlled by a power module that is currently supplying a higher output current at the power module'"'"'s power output terminal than any other power module.

21. The apparatus in accordance with claim 1 further comprising:

a controller for communicating with the power modules via digital signals.

22. The apparatus in accordance with claim 21 further comprising:

a motherboard, and

a plurality of power module cards, each installed on the motherboard and holding at least one of the power modules, and

wherein the controller is mounted on the motherboard and the motherboard and the power module cards convey the digital signals between the controller and the power modules.

23. The apparatus in accordance with claim 21 wherein each power module transmits data to the controller via the digital signals indicating at least one of the output current of the power supply of that power module and a load voltage appearing at the DUT'"'"'s power input terminal.

24. The apparatus in accordance with claim 21

wherein the supply voltage is adjustable,

wherein the control signal is a sense signal of voltage proportional to a load voltage appearing at the DUT'"'"'s power input terminal to each power module,

wherein each power module generates a reference voltage controlled by the controller via the digital signals, and

wherein the power supply of each power module increases the power supply'"'"'s adjustable supply voltage when the sense signal voltage is lower than the reference voltage and decreases the adjustable supply voltage when the sense signal voltage is higher than the reference voltage.

25. The apparatus in accordance with claim 21

wherein the device interface structure delivers a sense signal of voltage proportional to a load voltage appearing at the DUT'"'"'s power input terminal to each power module,

wherein each power module generates a reference voltage controlled by the controller via the digital signals, and wherein the controller uses the digital signals to adjust the reference voltage generated by each power module.