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Passivation layer structure

  • US 7,054,469 B2
  • Filed: 01/30/2002
  • Issued: 05/30/2006
  • Est. Priority Date: 07/30/1999
  • Status: Expired due to Fees
First Claim
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1. A passivation layer structure for sensors that effect a capacitive measurement, the passivation layer structure, comprising:

  • a base layer;

    a passivation layer; and

    a conductor layer configured between said base layer and said passivation layer, said conductor layer being patterned into portions extending in two dimensions;

    said portions of said conductor layer being formed with cutouts inside said portions; and

    said passivation layer extending through said cutouts to connect with said base layer.

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