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Ultra low contact area end effector

  • US 7,055,875 B2
  • Filed: 07/10/2004
  • Issued: 06/06/2006
  • Est. Priority Date: 07/11/2003
  • Status: Active Grant
First Claim
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1. An end effector for transporting semiconductor workpieces, comprising:

  • a low-profile body having a proximal end and a distal end, said distal end including a recessed pocket in fluid communication with a vacuum channel passing through a portion of said low-profile body, said recessed pocket having a pivot socket;

    a support pad having a central portion with a spherically-shaped bottom surface and a top surface including an elevated contact ridge, said central portion having a vacuum passage extending through, said support pad seated on said pivot socket forming a ball-and-socket joint between said pivot socket and said central portion of said support pad; and

    a retaining device removably affixed to a portion of said recessed pocket for limiting the motion of said support pad.

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