MEMS device having formations for covering actuators of the device
First Claim
1. A micro-electromechanical device that comprisesa substrate;
- an elongate actuator that has a fixed end that is connected to the substrate and a movable end, the actuator being configured so that the movable end is displaced relative to the substrate on receipt of an actuation signal;
a motion-transmitting structure that is fast with the movable end of the actuator, the motion transmitting structure being connected to a working member so that movement of the actuator is translated to the working member; and
a covering formation that is positioned on the substrate so that the substrate, the covering formation and the motion-transmitting structure define an air chamber, the actuator being positioned within the air chamber.
2 Assignments
0 Petitions
Accused Products
Abstract
A micro-electromechanical device that comprises a substrate; an elongate actuator that has a fixed end that is connected to the substrate and a movable end, the actuator being configured so that the movable end is displaced relative to the substrate on receipt of an actuation signal; a motion-transmitting structure that is fast with the movable end of the actuator, the motion transmitting structure being connected to a working member so that movement of the actuator is translated to the working member; and a covering formation that is positioned on the substrate so that the substrate, the covering formation and the motion-transmitting structure define an air chamber, the actuator being positioned within the air chamber.
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Citations
7 Claims
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1. A micro-electromechanical device that comprises
a substrate; -
an elongate actuator that has a fixed end that is connected to the substrate and a movable end, the actuator being configured so that the movable end is displaced relative to the substrate on receipt of an actuation signal;
a motion-transmitting structure that is fast with the movable end of the actuator, the motion transmitting structure being connected to a working member so that movement of the actuator is translated to the working member; and
a covering formation that is positioned on the substrate so that the substrate, the covering formation and the motion-transmitting structure define an air chamber, the actuator being positioned within the air chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification