DRAM cell having MOS capacitor and method for manufacturing the same
First Claim
1. A method for manufacturing a DRAM cell, the method comprising:
- forming a trench in an active region of a semiconductor substrate;
implanting impurities into the active region;
forming an insulator thin film and a gate insulating film simultaneously on the substrate and the trench;
forming a storage node electrode of a MOS capacitor having a T-shaped structure and a gate electrode of a cell transistor simultaneously by depositing a conductive film on the insulator thin film and the trench to bury the trench and then patterning the conductive film;
forming a source/drain of the cell transistor by implanting impurities into the resulting material;
forming a contact electrode connected to the source/drain of the cell transistor or to the storage node electrode of the MOS capacitor by forming an interlayer insulating film on the whole surface of the resulting material, forming a contact hole on the interlayer insulating film and then burying the conductive film into the contact hole; and
forming a wire connected with the drain and the storage node electrode and a bit line connected with the source through the contact electrode by depositing a conductive film on top of the interlayer insulating film and patterning the same.
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Accused Products
Abstract
A DRAM cell having a MOS capacitor and a method for manufacturing the same are disclosed. The DRAM cell includes: an active region of a semiconductor substrate; a MOS capacitor consisting of a plate node electrode which is a part of the active region, a storage node electrode having a T-shaped structure through a trench of the active region and an insulator thin film formed between the plate node electrode and the storage node electrode; a cell transistor having a gate insulating film and a gate electrode which are formed on the top surface of the active region and a source/drain formed within the active region; an interlayer insulating film deposited on a structure with the MOS capacitor and the cell transistor; a contact electrode connected with the source/drain of the cell transistor or with the storage node electrode of the MOS capacitor through a contact hole of the interlayer insulating film; a wire connected with the drain and the storage node electrode through the contact electrode; and a bit line connected with the source through the contact electrode.
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Citations
7 Claims
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1. A method for manufacturing a DRAM cell, the method comprising:
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forming a trench in an active region of a semiconductor substrate; implanting impurities into the active region; forming an insulator thin film and a gate insulating film simultaneously on the substrate and the trench; forming a storage node electrode of a MOS capacitor having a T-shaped structure and a gate electrode of a cell transistor simultaneously by depositing a conductive film on the insulator thin film and the trench to bury the trench and then patterning the conductive film; forming a source/drain of the cell transistor by implanting impurities into the resulting material; forming a contact electrode connected to the source/drain of the cell transistor or to the storage node electrode of the MOS capacitor by forming an interlayer insulating film on the whole surface of the resulting material, forming a contact hole on the interlayer insulating film and then burying the conductive film into the contact hole; and forming a wire connected with the drain and the storage node electrode and a bit line connected with the source through the contact electrode by depositing a conductive film on top of the interlayer insulating film and patterning the same. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification