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Combined absolute differential transducer

  • US 7,057,247 B2
  • Filed: 12/12/2001
  • Issued: 06/06/2006
  • Est. Priority Date: 12/12/2001
  • Status: Active Grant
First Claim
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1. A combined absolute and differential pressure transducer, comprising:

  • first and second sensors each having a piezoresistive structure thereon and responsive to an applied force to produce an output according to the magnitude of said applied force, each of said sensors fabricated from a common wafer process to enable said sensors to be matched in regard to thermal properties, said first sensor having a cover member and operative to receive a first force to provide an absolute pressure output, said second sensor having a cover member having a port aperture therein to enable said second sensor to receive said first force as applied to said first sensor and a second force applied via said aperture to provide a differential output pressure, said first and second sensors having substantially equal diaphragm thicknesses and having substantially different active areas, so as to accurately measure both absolute and differential pressures simultaneously.

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