×

MEMS device made of transition metal-dielectric oxide materials

  • US 7,057,251 B2
  • Filed: 07/17/2002
  • Issued: 06/06/2006
  • Est. Priority Date: 07/20/2001
  • Status: Expired due to Term
First Claim
Patent Images

1. A micromechanical device, comprising:

  • a substrate;

    a movable element formed in or on the substrate with the movable element having a reflective layer thereon or therein;

    a hinge allowing movement of the movable element relative to the substrate, further comprising;

    a flexible hinge portion tha comprises an alloy of an oxide compound and a late transition metal, wherein the oxide compound is in the form of a matrix surrounding discrete late transition metal islands; and

    wherein the reflective layer comprises Al, Ti, or Au.

View all claims
  • 4 Assignments
Timeline View
Assignment View
    ×
    ×