Cooling of voice coil motors

• US 7,057,313 B2
• Filed: 10/06/2004
• Issued: 06/06/2006
• Est. Priority Date: 02/10/2000
• Status: Expired due to Term

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Kwan, Yim Bun P., Schapendonk, Paulus H. C. M., Gilissen, Noud J., Buis, Edwin J.
• Primary Examiner(s): Schuberg, Darren
• Assistant Examiner(s): JONES, JUDSON
• Application Number:
  US10/958,402
• Publication Number:
  US 20050056792A1
• Time in Patent Office: 608 Days
• Field of Search: 310 12- 14
• US Class Current: 310/12.29
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: G03F 7/70775 Position control, e.g. interferometers or encoders for determining the stage position
• CPC Class Codes: G03F 7/70858 Environment aspects, e.g. pressure of beam-path gas, temperature pollution aspects G03F7/70916
• CPC Class Codes: G03F 7/70875 Temperature, e.g. temperature control of masks or workpieces via control of stage temperature
• CPC Class Codes: G03F 7/70891 Temperature
• CPC Class Codes: H02K 3/24 with channels or ducts for cooling medium between the conductors
• CPC Class Codes: H02K 41/0356 moving along a straight path
• CPC Class Codes: H02K 9/227 Heat sinks

Abstract

A voice coil motor used, for example, in a positioning device associated with either a first object table or a second object table in which the coil is cooled with a cooling jacket in thermal contact with the coil, the cooling jacket comprising at least one channel for circulation of a cooling fluid, the or each channel being arranged such as to be substantially located in a portion of the cooling jacket adjacent to the coil, for use, for example, in a lithographic projection apparatus including a radiation system for supplying a projection beam of radiation, a first object table for holding a mask, a second object table for holding a substrate, a projection system for imaging irradiated portions of the mask onto target portions of the substrate. The cooling jacket may be formed of a ceramic material and may be of a monolithic construction.

Claims

1. A cooled voice coil motor apparatus comprising:

a coil comprising a conducting material;

a magnet, operatively cooperating with the coil when the coil is energized, such that a force is generated between the magnet and the coil;

a cooling jacket, in thermal contact with the coil and comprising a channel for circulation of a cooling fluid, the channel being arranged such as to be substantially located in a portion of the cooling jacket adjacent to the coil.

2. Apparatus according to claim 1, wherein the cooling jacket comprises a plurality of channels which are configured such that the channels are evenly distributed in said portion of the cooling jacket adjacent to the coil.

3. Apparatus according to claim 2, wherein the channels are substantially straight.

4. Apparatus acording to claim 2, wherein the channels are serpentine.

5. Apparatus according to claim 1, wherein the cooling jacket comprises a substantially planar body.

6. Apparatus according to claim 1, wherein the coil comprises a plurality of wire turnings, all of which are in substantially the same plane, and the cooling jacket is substantially parallel to the plane of the turnings and attached to at least one of the upper and lower surfaces of the coil.

7. Apparatus according to claim 1, wherein the channel is substantially parallel to the plane of the portion of the cooling jacket within which it is located.

8. Apparatus according to claim 1, wherein the voice coil motor comprises alternating sections of coil and cooling jacket.

9. Apparatus according to claim 1, wherein the cooling fluid is water.

10. Apparatus according to claim 1, wherein the cooling jacket is made from an electrically non-conducting material.

11. Apparatus according to claim 10, wherein the cooling jacket is made from a ceramic.

12. Apparatus according to claim 11, wherein the ceramic is selected from the group comprising Al₂O₃ and A1N.

13. Apparatus according to claim 11, wherein at least one part of the cooling jacket having at least a portion of the channel located therein is formed as a single monolithic component.

14. Apparatus according to claim 11, wherein at least one part of the cooling jacket, having at least a portion of the channel located therein is formed from two components which are bonded together to form said one part, at least one of the contacting surfaces of the component comprising at least one groove which forms the channel in the bonded state.

15. Apparatus according to claim 11, wherein at least one part of the cooling jacket, having at least a portion of the channel located therein, is formed from three components that are bonded together, an intermediate component of said three components being formed with sections of material removed, said sections forming the channels in the bonded state.

16. Apparatus according to claim 15, wherein the components are joined by glass bonding.

17. Apparatus according to claim 15, wherein each of the components is formed from an unsintered material before bonding together, the components being bonded by pressing them together followed by sintering, so as to form a single monolithic component in a finished state.

18. A lithographic projection apparatus comprising:

a radiation table which provides a projection beam of radiation;

projection beam patterning structure which patterns the projection beam according to a desired pattern;

a substrate table for holding a substrate;

a projection system which images the patterned beam onto a target portion of the substrate;

at least one voice coil motor operatively associated with at least one of the projection beam patterning structure and the substrate table to position the same, said at least one voice coil motor having a coil in thermal contact with a cooling jacket;

a plurality of channels being arranged such as to be substantially located in a portion of the cooling jacket adjacent to the coil; and

a cooling system connected to the cooling jacket for flowing a fluid at a predetermined temperature between the cooling jacket and the channels of the cooling system;

wherein the cooling jacket has a monolithic construction;

wherein the cooling jacket has a substantially planar body with a thermally conductive surface and a thermally non-conductive surface located opposite the thermally conductive surface;

wherein the thermally conductive portion of the cooling jacket is attached to a top and a bottom of the coil; and

wherein the cooling jacket is made from an electrically non-conductive material.