Micro-structures with individually addressable ribbon pairs
First Claim
1. A micro-device comprising:
- a. a plurality of ribbon pairs configured to move relative to each other, each ribbon pair being individually addressable separately from other ribbon pairs in the plurality of ribbon pairs, each ribbon pair comprising a movable active ribbon and a stationary bias ribbon suspended over a substrate;
b. a light source for directing beams of light to the plurality of ribbon pairs; and
c. a driver circuit in electrical communication with at least a single ribbon pair to selectively control the single ribbon pair from among the plurality of ribbon pairs.
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Accused Products
Abstract
An optical MEM devices which utilizes individually addressable ribbon pairs configured to modulate light is disclosed. The ribbon pairs preferably comprise silicon nitride with a reflective aluminum layers, wherein at least one ribbon from each ribbon pair is in electrical communication with a driver circuit for controllably addressing the ribbon pairs individually. The ribbons are preferably configured to modulate light having wavelengths in a range of 0.4 to 2.0 microns suitable for display and optical communication technologies. The system preferably comprises optical fibers for transmitting light to individually addressable ribbon pairs and for transmitting reflected light from individually addressable ribbon pairs.
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Citations
7 Claims
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1. A micro-device comprising:
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a. a plurality of ribbon pairs configured to move relative to each other, each ribbon pair being individually addressable separately from other ribbon pairs in the plurality of ribbon pairs, each ribbon pair comprising a movable active ribbon and a stationary bias ribbon suspended over a substrate; b. a light source for directing beams of light to the plurality of ribbon pairs; and c. a driver circuit in electrical communication with at least a single ribbon pair to selectively control the single ribbon pair from among the plurality of ribbon pairs. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification