Reticle management system

• US 7,058,627 B2
• Filed: 04/25/2001
• Issued: 06/06/2006
• Est. Priority Date: 04/25/2000
• Status: Expired due to Term

• Current Assignee: Brooks Automation Ltd. (United Kingdom) (Azenta, Inc.)
• Original Assignee: Brooks Automation Incorporated (Azenta, Inc.)
• Inventors: Wiesler, Oren, Mariano, Thomas
• Primary Examiner(s): Corrielus, Jean M.
• Application Number:
  US09/842,370
• Publication Number:
  US 20010047222A1
• Time in Patent Office: 1,868 Days
• Field of Search: 707/1, 707/5, 707/104.1, 707/100, 700/90
• US Class Current: 1/1
• CPC Class Codes: G03F 7/70541 Tagging, i.e. hardware or software tagging of features or components, e.g. using tagging scripts or tagging identifier codes for identification of chips, shots or wafers
• CPC Class Codes: G03F 7/70741 Handling masks outside exposure position, e.g. reticle libraries
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418
• CPC Class Codes: Y10S 707/99935 Query augmenting and refining, e.g. inexact access
• CPC Class Codes: Y10S 707/99943 Generating database or data structure, e.g. via user interface

Abstract

A reticle management system is disclosed that provides data storage and retrieval of data associated with each reticle, reticle carrier, and certain system attributes and also for the efficient movement and storage of reticles and reticle carriers. The reticle management system includes a reticle management controller, a central reticle database, and one or more reticle stockers that include a stocker controller, a stocker database, and a stocker unit. The reticle management controller is coupled to the central reticle database and each of the stocker controllers. Each stocker controller collects data on the reticles, reticle carriers, or both, that are stored within the associated stocker unit and stores this data in the stocker database. The reticle management controller retrieves the data in each stocker database via the associated stocker controller and stores this data in central reticle database. In addition, data attributes for the system, and the reticle carriers within the system may also be stored in the central reticle database.

Claims

1. An apparatus including at least one processor and at least one memory, the processor being operative to execute at least one program out of the memory for managing data corresponding to a plurality of reticles in a semiconductor manufacturing system, comprising:

a central reticle database configured and arranged to store data associated with the plurality of reticles;

a reticle management controller communicably coupled to the central reticle database, the reticle management controller configured and arranged to store data in the central reticle database, and to retrieve data from the central reticle database; and

at least one stocker including a stocker database, a stocker controller communicably coupled to the stocker database and communicably coupled to the reticle management controller, and a plurality of storage locations configured and arranged to store the plurality of reticles, the stocker controller being configured and arranged to store data corresponding to the plurality of reticles stored within the plurality of storage locations within the stocker database,

wherein the data associated with the plurality of reticles stored in the central reticle database includes first and second data, each of the first and second data including a plurality of data portions, each portion of the first data being associated with a respective reticle stored in the at least one stocker, and each portion of the second data corresponding to at least one predetermined data constant associated with the plurality of reticles stored in the at least one stocker, wherein the reticle management controller is configured and arranged to retrieve at least a portion of the data corresponding to the plurality of reticles stored within the stocker database, and to store the retrieved data portion within the central reticle database,

wherein the reticle management controller is further configured and arranged to manipulate and to maintain the plurality of reticles based on one or more portions of the first data associated with the respective reticles stored in the at least one stocker, and one or more portions of the second data corresponding to the predetermined data constants associated with the plurality of reticles stored in the at least one stocker,

wherein the portions of the first data corresponding to each of the plurality of reticles stored in the central reticle database includes a plurality of reticle identifying data,

wherein the plurality of reticle identifying data includes an attribute identifying the reticle, and an attribute identifying the location of the reticle, and

wherein the plurality of reticle identifying data further includes;

an attribute identifying a reticle carrier housing the reticle;

an attribute identifying a date and time the reticle was entered into use; and

an attribute identifying a user identifier who created the reticle.

2. The apparatus of claim 1 wherein the portions of the first data corresponding to each of the plurality of reticles stored in the central reticle database includes a plurality of reticle history data.

3. An apparatus including at least one processor and at least one memory, the processor being operative to execute at least one program out of the memory for managing data corresponding to a plurality of reticles in a semiconductor manufacturing system, comprising:

a central reticle database configured and arranged to store data associated with the plurality of reticles;

a reticle management controller communicably coupled to the central reticle database, the reticle management controller configured and arranged to store data in the central reticle database, and to retrieve data from the central reticle database; and

at least one stocker including a stocker database, a stocker controller communicably coupled to the stocker database and communicably coupled to the reticle management controller, and a plurality of storage locations configured and arranged to store the plurality of reticles, the stocker controller being configured and arranged to store data corresponding to the plurality of reticles stored within the plurality of storage locations within the stocker database,

wherein the data associated with the plurality of reticles stored in the central reticle database includes first and second data, each of the first and second data including a plurality of data portions, each portion of the first data being associated with a respective reticle stored in the at least one stocker, and each portion of the second data corresponding to at least one predetermined data constant associated with the plurality of reticles stored in the at least one stocker, wherein the reticle management controller is configured and arranged to retrieve at least a portion of the data corresponding to the plurality of reticles stored within the stocker database, and to store the retrieved data portion within the central reticle database,

wherein the reticle management controller is further configured and arranged to manipulate and to maintain the plurality of reticles based on one or more portions of the first data associated with the respective reticles stored in the at least one stocker, and one or more portions of the second data corresponding to the predetermined data constants associated with the plurality of reticles stored in the at least one stocker, and

wherein the portions of the first data corresponding to each of the plurality of reticles stored in the central reticle database includes a plurality of reticle history data including;

an attribute identifying the number of times the reticle has been retrieved;

an attribute identifying the date the reticle was last retrieved;

an attribute identifying the number of times the reticle has been stored; and

an attribute identifying the date the reticle was last stored.

4. An apparatus including at least one processor and at least one memory, the processor being operative to execute at least one program out of the memory for managing data corresponding to a plurality of reticles in a semiconductor manufacturing system, comprising:

a central reticle database configured and arranged to store data associated with the plurality of reticles;

a reticle management controller communicably coupled to the central reticle database, the reticle management controller configured and arranged to store data in the central reticle database, and to retrieve data from the central reticle database; and

at least one stocker including a stocker database, a stocker controller communicably coupled to the stocker database and communicably coupled to the reticle management controller, and a plurality of storage locations configured and arranged to store the plurality of reticles, the stocker controller being configured and arranged to store data corresponding to the plurality of reticles stored within the plurality of storage locations within the stocker database,

wherein the data associated with the plurality of reticles stored in the central reticle database includes first and second data, each of the first and second data including a plurality of data portions, each portion of the first data being associated with a respective reticle stored in the at least one stocker, and each portion of the second data corresponding to at least one predetermined data constant associated with the plurality of reticles stored in the at least one stocker, wherein the reticle management controller is configured and arranged to retrieve at least a portion of the data corresponding to the plurality of reticles stored within the stocker database, and to store the retrieved data portion within the central reticle database,

wherein the reticle management controller is further configured and arranged to manipulate and to maintain the plurality of reticles based on one or more portions of the first data associated with the respective reticles stored in the at least one stocker, and one or more portions of the second data corresponding to the predetermined data constants associated with the plurality of reticles stored in the at least one stocker, and

wherein the portions of the first data corresponding to each of the plurality of reticles stored in the central reticle database includes a plurality of reticle history data including;

an attribute identifying a user identifier who last selected the reticle; and

an attribute identifying a user identifier who last stored the reticle.

5. The apparatus of claim 4 wherein the portions of the first data corresponding to each of the plurality of reticles stored in the central reticle database includes a plurality of reticle maintenance data.

6. An apparatus including at least one processor and at least one memory, the processor being operative to execute at least one program out of the memory for managing data corresponding to a plurality of reticles in a semiconductor manufacturing system, comprising:

a central reticle database configured and arranged to store data associated with the plurality of reticles;

a reticle management controller communicably coupled to the central reticle database, the reticle management controller configured and arranged to store data in the central reticle database, and to retrieve data from the central reticle database; and

at least one stocker including a stocker database, a stocker controller communicably coupled to the stocker database and communicably coupled to the reticle management controller, and a plurality of storage locations configured and arranged to store the plurality of reticles, the stocker controller being configured and arranged to store data corresponding to the plurality of reticles stored within the plurality of storage locations within the stocker database,

wherein the data associated with the plurality of reticles stored in the central reticle database includes first and second data, each of the first and second data including a plurality of data portions, each portion of the first data being associated with a respective reticle stored in the at least one stocker, and each portion of the second data corresponding to at least one predetermined data constant associated with the plurality of reticles stored in the at least one stocker, wherein the reticle management controller is configured and arranged to retrieve at least a portion of the data corresponding to the plurality of reticles stored within the stocker database, and to store the retrieved data portion within the central reticle database,

wherein the reticle management controller is further configured and arranged to manipulate and to maintain the plurality of reticles based on one or more portions of the first data associated with the respective reticles stored in the at least one stocker, and one or more portions of the second data corresponding to the predetermined data constants associated with the plurality of reticles stored in the at least one stocker,

wherein the portions of the first data corresponding to each of the plurality of reticles stored in the central reticle database includes a plurality of reticle maintenance data, and

wherein the portions of the first data corresponding to each of the plurality of reticles stored in the central reticle database includes the plurality of reticle maintenance data including;

an attribute identifying the number of times the reticle has been cleaned;

an attribute identifying the date on which the reticle was last cleaned;

an attribute identifying the number of times the reticle was inspected; and

an attribute identifying the date on which the reticle was last inspected.

7. The apparatus of claim 6 wherein the plurality of reticle maintenance data further includes:

an attribute identifying a user identifier who last cleaned the reticle;

an attribute identifying a location where the reticle was last cleaned;

an attribute identifying a user identifier who last inspected the reticle; and

an attribute identifying a location where the reticle was last inspected.

8. The apparatus of claim 6 further including:

a central system database configured and arranged to store portions of the second data corresponding to system requirements of the plurality of reticles,

wherein the reticle management controller is communicably coupled to the central system database, the reticle management controller being configured and arranged to store and to retrieve the system data from the central system database.

9. An apparatus including at least one processor and at least one memory, the processor being operative to execute at least one program out of the memory for managing data corresponding to a plurality of reticles in a semiconductor manufacturing system, comprising:

a central reticle database configured and arranged to store data associated with the plurality of reticles;

a reticle management controller communicably coupled to the central reticle database, the reticle management controller configured and arranged to store data in the central reticle database, and to retrieve data from the central reticle database; and

at least one stocker including a stocker database, a stocker controller communicably coupled to the stocker database and communicably coupled to the reticle management controller, and a plurality of storage locations configured and arranged to store the plurality of reticles, the stocker controller being configured and arranged to store data corresponding to the plurality of reticles stored within the plurality of storage locations within the stocker database,

wherein the data associated with the plurality of reticles stored in the central reticle database includes first and second data, each of the first and second data including a plurality of data portions, each portion of the first data being associated with a respective reticle stored in the at least one stocker, and each portion of the second data corresponding to at least one predetermined data constant associated with the plurality of reticles stored in the at least one stocker, wherein the reticle management controller is configured and arranged to retrieve at least a portion of the data corresponding to the plurality of reticles stored within the stocker database, and to store the retrieved data portion within the central reticle database,

wherein the reticle management controller is further configured and arranged to manipulate and to maintain the plurality of reticles based on one or more portions of the first data associated with the respective reticles stored in the at least one stocker, and one or more portions of the second data corresponding to the predetermined data constants associated with the plurality of reticles stored in the at least one stocker,

further including;

a central system database configured and arranged to store portions of the second data corresponding to system requirements of the plurality of reticles,

wherein the reticle management controller is communicably coupled to the central system database, the reticle management controller being configured and arranged to store and to retrieve the system data from the central system database, and

wherein the portions of the second data corresponding to the system requirements of the plurality of reticles includes;

an attribute identifying the maximum number of cleanings of a reticle;

an attribute identifying the maximum number of inspections of a reticle;

an attribute identifying the maximum number of uses of a reticle between inspections; and

an attribute identifying the maximum number of uses of a reticle between cleaning.

10. An apparatus including at least one processor and at least one memory, the processor being operative to execute at least one program out of the memory for managing data corresponding to a plurality of reticles in a semiconductor manufacturing system, comprising:

a central reticle database configured and arranged to store data associated with the plurality of reticles;

a reticle management controller communicably coupled to the central reticle database, the reticle management controller configured and arranged to store data in the central reticle database, and to retrieve data from the central reticle database; and

at least one stocker including a stocker database, a stocker controller communicably coupled to the stocker database and communicably coupled to the reticle management controller, and a plurality of storage locations configured and arranged to store the plurality of reticles, the stocker controller being configured and arranged to store data corresponding to the plurality of reticles stored within the plurality of storage locations within the stocker database,

wherein the data associated with the plurality of reticles stored in the central reticle database includes first and second data, each of the first and second data including a plurality of data portions, each portion of the first data being associated with a respective reticle stored in the at least one stocker, and each portion of the second data corresponding to at least one predetermined data constant associated with the plurality of reticles stored in the at least one stocker, wherein the reticle management controller is configured and arranged to retrieve at least a portion of the data corresponding to the plurality of reticles stored within the stocker database, and to store the retrieved data portion within the central reticle database,

wherein the reticle management controller is further configured and arranged to manipulate and to maintain the plurality of reticles based on one or more portions of the first data associated with the respective reticles stored in the at least one stocker, and one or more portions of the second data corresponding to the predetermined data constants associated with the plurality of reticles stored in the at least one stocker,

further including;

a central system database configured and arranged to store portions of the second data corresponding to system requirements of the plurality of reticles,

wherein the reticle management controller is communicably coupled to the central system database, the reticle management controller being configured and arranged to store and to retrieve the system data from the central system database, and

wherein the portions of the second data corresponding to the system requirements of the plurality of reticles includes;

an attribute identifying the maximum time between inspections of a bare reticle; and

an attribute identifying the maximum time between cleanings of a bare reticle.

11. An apparatus including at least one processor and at least one memory, the processor being operative to execute at least one program:

out of the memory for managing data corresponding to a plurality of reticles in a semiconductor manufacturing system, comprising;

a central reticle database configured and arranged to store data associated with the plurality of reticles;

a reticle management controller communicably coupled to the central reticle database, the reticle management controller configured and arranged to store data in the central reticle database, and to retrieve data from the central reticle database; and

at least one stocker including a stocker database, a stocker controller communicably coupled to the stocker database and communicably coupled to the reticle management controller, and a plurality of storage locations configured and arranged to store the plurality of reticles, the stocker controller being configured and arranged to store data corresponding to the plurality of reticles stored within the plurality of storage locations within the stocker database,

wherein the data associated with the plurality of reticles stored in the central reticle database includes first and second data, each of the first and second data including a plurality of data portions, each portion of the first data being associated with a respective reticle stored in the at least one stocker, and each portion of the second data corresponding to at least one predetermined data constant associated with the plurality of reticles stored in the at least one stocker, wherein the reticle management controller is configured and arranged to retrieve at least a portion of the data corresponding to the plurality of reticles stored within the stocker database, and to store the retrieved data portion within the central reticle database,

wherein the reticle management controller is further configured and arranged to manipulate and to maintain the plurality of reticles based on one or more portions of the first data associated with the respective reticles stored in the at least one stocker, and one or more portions of the second data corresponding to the predetermined data constants associated with the plurality of reticles stored in the at least one stocker,

further including;

a central system database configured and arranged to store portions of the second data corresponding to system requirements of the plurality of reticles,

wherein the reticle management controller is communicably coupled to the central system database, the reticle management controller being configured and arranged to store and to retrieve the system data from the central system database, and

wherein the portions of the second data corresponding to the system requirements of the plurality of reticles includes;

an attribute identifying the maximum time between inspections of a kitted reticle; and

an attribute identifying the maximum time between cleanings of a kitted reticle.

12. The apparatus of claim 11 further including a plurality of stockers, each of the plurality of stockers including a stocker controller communicably coupled to the reticle management controller, a stocker database, and a plurality of storage locations configured and arranged to store at least one of the plurality of reticles, the stocker controller configured and arranged to collect at least a portion of the first and second data, and to store the at least a portion of the first and second data within the stocker database,

wherein the reticle management controller is configured and arranged to receive at least apportion of the first and second data from each of the plurality of stocker controllers, and to provide at least a portion of the first and second data to each of the plurality of stocker controllers.

13. An apparatus including at least one processor and at least one memory, the processor being operative to execute at least one program out of the memory for managing data corresponding to a plurality of reticles in a semiconductor manufacturing system, comprising:

a central reticle database configured and arranged to store data associated with the plurality of reticles; and

a reticle management controller communicably coupled to the central reticle database, the reticle management controller configured and arranged to store data in the central reticle database, and to retrieve data from the central reticle database, wherein the data associated with the plurality of reticles includes first and second data, each of the first and second data including a plurality of data portions, each portion of the first data being associated with a respective reticle, and each portion of the second data corresponding to at least one predetermined data constant associated with the plurality of reticles,

wherein the portions of the first data associated with the respective ones of the plurality of reticles includes a plurality of reticle identifying data,

wherein the plurality of reticle identifying data includes;

an attribute identifying the reticle; and

an attribute identifying the location of the reticle, and

wherein the plurality of reticle identifying data further includes;

an attribute identifying a reticle carrier housing the reticle;

an attribute identifying a date and time the reticle was entered into use; and

an attribute identifying a user identifier who created the reticle.

14. The apparatus of claim 13 wherein the portions of the first data associated with the respective ones of the plurality of reticles includes a plurality of reticle history data.

15. An apparatus including at least one processor and at least one memory, the processor being operative to execute at least one program out of the memory for managing data corresponding to a plurality of reticles in a semiconductor manufacturing system, comprising:

a central reticle database configured and arranged to store data associated with the plurality of reticles; and

a reticle management controller communicably coupled to the central reticle database, the reticle management controller configured and arranged to store data in the central reticle database, and to retrieve data from the central reticle database,

wherein the data associated with the plurality of reticles includes first and second data, each of the first and second data including a plurality of data portions, each portion of the first data being associated with a respective reticle, and each portion of the second data corresponding to at least one predetermined data constant associated with the plurality of reticles, and

wherein the portions of the first data associated with the respective ones of the plurality of reticles includes a plurality of reticle history data including;

an attribute identifying the number of times the reticle has been retrieved;

an attribute identifying the date the reticle was last retrieved;

an attribute identifying the number of times the reticle has been stored; and

an attribute identifying the date the reticle was last stored.

16. An apparatus including at least one processor and at least one memory, the processor being operative to execute at least one program out of the memory for managing data corresponding to a plurality of reticles in a semiconductor manufacturing system, comprising:

a central reticle database configured and arranged to store data associated with the plurality of reticles; and

a reticle management controller communicably coupled to the central reticle database, the reticle management controller configured and arranged to store data in the central reticle database, and to retrieve data from the central reticle database,

wherein the data associated with the plurality of reticles includes first and second data, each of the first and second data including a plurality of data portions, each portion of the first data being associated with a respective reticle, and each portion of the second data corresponding to at least one predetermined data constant associated with the plurality of reticles, and

wherein the portions of the first data associated with the respective ones of the plurality of reticles includes a plurality of reticle history data including;

an attribute identifying a user identifier who last selected the reticle; and

an attribute identifying a user identifier who last stored the reticle.

17. The apparatus of claim 16 wherein the portions of the first data associated with the respective ones of the plurality of reticles includes a plurality of reticle maintenance data.

18. An apparatus including at least one processor and at least one memory, the processor being operative to execute at least one program out of the memory for managing data corresponding to a plurality of reticles in a semiconductor manufacturing system, comprising:

a central reticle database configured and arranged to store data associated with the plurality of reticles; and

a reticle management controller communicably coupled to the central reticle database, the reticle management controller configured and arranged to store data in the central reticle database, and to retrieve data from the central reticle database,

wherein the data associated with the plurality of reticles includes first and second data, each of the first and second data including a plurality of data portions, each portion of the first data being associated with a respective reticle, and each portion of the second data corresponding to at least one predetermined data constant associated with the plurality of reticles,

wherein the portions of the first data associated with the respective ones of the plurality of reticles includes a plurality of reticle maintenance data, and

wherein the plurality of reticle maintenance data includes;

an attribute identifying the number of times the reticle has been cleaned;

an attribute identifying the date on which the reticle was last cleaned;

an attribute identifying the number of times the reticle was inspected; and

an attribute identifying the date on which the reticle was last inspected.

19. The apparatus of claim 18 wherein the plurality of reticle maintenance data further includes:

an attribute identifying a user identifier who last cleaned the reticle;

an attribute identifying a location where the reticle was last cleaned;

an attribute identifying a user identifier who last inspected the reticle; and

an attribute identifying a location where the reticle was last inspected.

20. The apparatus of claim 18 further including:

a central system database configured and arranged to store portions of the second data corresponding to system requirements of the plurality of reticles,

wherein the reticle management controller is communicably coupled to the central system database, the reticle management controller being configured and arranged to store and to retrieve the system data from the central system database.

21. An apparatus including at least one processor and at least one memory, the processor being operative to execute at least one program out of the memory for managing data corresponding to a plurality of reticles in a semiconductor manufacturing system, comprising:

a central reticle database configured and arranged to store data associated with the plurality of reticles; and

a reticle management controller communicably coupled to the central reticle database, the reticle management controller configured and arranged to store data in the central reticle database, and to retrieve data from the central reticle database,

wherein the data associated with the plurality of reticles includes first and second data, each of the first and second data including a plurality of data portions, each portion of the first data being associated with a respective reticle, and each portion of the second data corresponding to at least one predetermined data constant associated with the plurality of reticles,

further including;

a central system database configured and arranged to store portions of the second data corresponding to system requirements of the plurality of reticles,

wherein the reticle management controller is communicably coupled to the central system database, the reticle management controller being configured and arranged to store and to retrieve the system data from the central system database, and

wherein the portions of the second data corresponding to the system requirements of the plurality of reticles includes;

an attribute identifying the maximum number of cleanings of a reticle;

an attribute identifying the maximum number of inspections of a reticle;

an attribute identifying the maximum number of uses of a reticle between inspections; and

an attribute identifying the maximum number of uses of a reticle between cleaning.

22. An apparatus including at least one processor and at least one memory, the processor being operative to execute at least one program out of the memory for managing data corresponding to a plurality of reticles in a semiconductor manufacturing system, comprising:

a central reticle database configured and arranged to store data associated with the plurality of reticles; and

a reticle management controller communicably coupled to the central reticle database, the reticle management controller configured and arranged to store data in the central reticle database, and to retrieve data from the central reticle database,

wherein the data associated with the plurality of reticles includes first and second data, each of the first and second data including a plurality of data portions, each portion of the first data being associated with a respective reticle, and each portion of the second data corresponding to at least one predetermined data constant associated with the plurality of reticles,

further including;

a central system database configured and arranged to store portions of the second data corresponding to system requirements of the plurality of reticles,

wherein the reticle management controller is communicably coupled to the central system database, the reticle management controller being configured and arranged to store and to retrieve the system data from the central system database, and

wherein the portions of the second data corresponding to the system requirements of the plurality of reticles includes;

an attribute identifying the maximum time between inspections of a bare reticle; and

an attribute identifying the maximum time between cleanings of a bare reticle.

23. An apparatus including at least one processor and at least one memory, the processor being operative to execute at least one program out of the memory for managing data corresponding to a plurality of reticles in a semiconductor manufacturing system, comprising:

a central reticle database configured and arranged to store data associated with the plurality of reticles; and

a reticle management controller communicably coupled to the central reticle database, the reticle management controller configured and arranged to store data in the central reticle database, and to retrieve data from the central reticle database,

wherein the data associated with the plurality of reticles includes first and second data, Each of the first and second data including a plurality of data portions, each portion of the first data being associated with a respective reticle, and each portion of the second data corresponding to at least one predetermined data constant associated with the plurality of reticles,

further including;

a central system database configured and arranged to store portions of the second data corresponding to system requirements of the plurality of reticles,

wherein the reticle management controller is communicably coupled to the central system database, the reticle management controller being configured and arranged to store and to retrieve the system data from the central system database, and

wherein the portions of the second data corresponding to the system requirements of the plurality of reticles includes;

an attribute identifying the maximum time between inspections of a kitted reticle; and

an attribute identifying the maximum time between cleanings of a kitted reticle.