Split-flow-type flow sensor device

• US 7,059,184 B2
• Filed: 02/16/2005
• Issued: 06/13/2006
• Est. Priority Date: 02/19/2004
• Status: Expired due to Fees

• Current Assignee: Keyence Corporation (Keyence)
• Original Assignee: Keyence Corporation (Keyence)
• Inventors: Takayanagi, Susumu, Hama, Kiyoshi, Kanouda, Souhei
• Primary Examiner(s): Lefkowitz, Edward
• Assistant Examiner(s): Mack, Corey D.
• Application Number:
  US11/059,471
• Publication Number:
  US 20050183500A1
• Time in Patent Office: 482 Days
• Field of Search: 732/025, 732/02, 732/041.1, 732/042.1, 731/182
• US Class Current: 73/202.5
• CPC Class Codes: G01F 1/6842 with means for influencing the fluid flow
• CPC Class Codes: G01F 5/00 Measuring a proportion of the volume flow

Abstract

A split-flow-type flow sensor apparatus includes a main flow passage and a bypass flow passage, wherein a thermal flow sensor is placed on the wall face of the bypass flow passage. A first rectification member is placed upstream from a diversion part to the bypass flow passage in the main flow passage, and a second rectification member is placed upstream from the thermal flow sensor in the bypass flow passage. A bypass flow passage module is inserted into an opening formed on a side of a main flow passage module. The side opening of the main flow passage module is sealed and an entrance and an exit of the bypass flow passage are positioned in the main flow passage.

Claims

1. A split-flow-type flow sensor apparatus comprising:

a main flow passage;

a bypass flow passage with a thermal flow sensor said bypass flow passage having an entrance directly disposed in a portion of said main flow passage, a first straight pipe part extending along said main flow passage from the entrance, a bent part placed downstream from said first straight pipe part, a second straight pipe part placed downstream from the bent part and being provided with said thermal flow sensor placed on a wall face of said second straight pipe part, and an exit to said main flow passage placed downstream from said second straight pipe part;

a first rectification member placed upstream from the entrance of said bypass flow passage in said main flow passage;

a second rectification member placed upstream from said thermal flow sensor in said second straight pipe part of said bypass flow passage; and

a fixing member for resiliently fixing said second rectification member to said second straight pipe part.

2. The split-flow-type flow sensor apparatus as claimed in claim 1, wherein said second rectification member includes a plurality of mesh plates which are disposed adjacent to each other in a flow direction of said second straight pipe part, and

said fixing member includes a pressing member for pressing said second rectification member in the flow direction of said second straight pipe part.

3. The split-flow-type flow sensor apparatus as claimed in claim 1, wherein said fixing member includes a deformation part disposed in a lower portion of said second rectification member which can be moved in an up-and-down direction relative to said second rectification member.

4. The split-flow-type flow sensor apparatus as claimed in claim 1, wherein said second rectification member includes a plurality of mesh plates which are disposed adjacent to each other, and

each of said plurality of mesh plates includes an upper thin mesh part where meshes are formed in upper portions of said mesh plates and a plate part formed in a lower portion of said mesh plates and said plate part being capable of being deformed in an up-and-down direction of said second rectification member.

5. The split-flow-type flow sensor apparatus as claimed in claim 1, wherein said fixing member includes a pressing member for pressing said second rectification member in a flow direction of said second straight pipe part.

6. The split-flow-type flow sensor apparatus as claimed in claim 1, wherein said second straight pipe part is formed in a bypass flow member which has an opening at one face of said second straight pipe part and a plate which closes the opening of said bypass flow member and is provided with said thermal flow sensor, and

said second rectification member is pressured and fixed between said bypass flow member and said plate by said fixing member.

7. The split-flow-type flow sensor apparatus as claimed in claim 6, wherein said plate has a chip of said thermal flow sensor mounted thereon, said bypass flow member is molded of a resin material so that the resin material is integrally provided to form said bypass flow passage from the entrance and the exit, and said second straight pipe part is formed in said bypass flow member and said plate has a rectangular shape in cross section.

8. The split-flow-type flow sensor apparatus as claimed in claim 1, wherein the exit is placed in said main flow passage and is directed downstream in said main flow passage, and said bypass flow passage has a third straight pipe part extending along said main flow passage toward the exit.

9. The split-flow-type flow sensor apparatus as claimed in claim 1, further comprising:

a main flow passage module formed with said main flow passage containing said first rectification member; and

a bypass flow passage module formed with said bypass flow passage containing said second rectification member, wherein said bypass flow passage module is inserted into an opening formed on a side of said main flow passage module, and the opening is sealed and the entrance and the exit of said bypass flow passage are positioned in said main flow passage.

10. The split-flow-type flow sensor apparatus as claimed in claim 9, wherein the entrance of said bypass flow passage is positioned substantially at a center of a cross section of said main flow passage.

11. The split-flow-type-flow sensor apparatus as claimed in claim 9, wherein a tip of said bypass flow passage module forming the entrance of said bypass flow passage projects in an upstream direction of said main flow passage.

12. The split-flow-type flow sensor apparatus as claimed in claim 1, wherein said second rectification member has a plurality of mesh plates which are arranged in a longitudinal direction of said second rectification member, each of said plurality of mesh plates includes a mesh part where meshes are formed and a plate part where no meshes are formed, and the mesh part is formed thinner than the plate part so that a gap is provided between the mesh parts of said plurality of mesh plates.

13. A split-flow-type flow sensor apparatus comprising:

a main flow passage;

a bypass flow passage with a thermal flow sensor, said bypass flow passage having an entrance directly disposed in a portion of said main flow passage, a first straight pipe part extending along said main flow passage from the entrance, a bent part placed downstream from said first straight pipe part, a second straight pipe part placed downstream from the bent part and being provided with said thermal flow sensor placed on a wall face of said second straight pipe part, and an exit to said main flow passage placed downstream from said second straight pipe part, said second straight pipe part being formed in a bypass flow member which has an opening at one face of said straight pipe part, and the wall face being a portion of a plate which closes the opening of said bypass flow member and is provided with said thermal flow sensor;

a first rectification member placed upstream from the entrance of said bypass flow passage in said main flow passage; and

a second rectification member placed upstream from said thermal flow sensor in said second straight pipe part of said bypass flow passage, said second rectification member being held by said plate and said bypass flow member.

14. The split-flow-type flow sensor apparatus as claimed in claim 13, further comprising a fixing member for resiliently fixing said second rectification member to said second straight pipe part, wherein said fixing member includes a deformation part disposed in a lower portion of said second rectification member which can be moved in an up-and-down direction relative to said second rectification member.

15. The split-flow-type flow sensor apparatus as claimed in claim 13, wherein said second rectification member includes a plurality of mesh plates which are disposed adjacent to each other, and

each of said mesh plates includes an upper thin mesh part where meshes are formed in upper portions of said mesh plates and a plate part formed in the lower portion of said mesh plates and said plate part being capable of being deformed in an up-and-down direction of said second rectification member.

16. The split-flow-type flow sensor apparatus as claimed in claim 13, wherein said fixing member includes a pressing member for pressing said second rectification member in a flow direction of said second straight pipe part.

17. The split-flow-type flow sensor apparatus as claimed in claim 13, wherein said second rectification member includes a plurality of mesh plates which are disposed adjacent to each other in a flow direction of said second straight pipe part, and said fixing member includes a pressing member for pressing said second rectification member in the flow direction of said second straight pipe part.

18. The split-flow-type flow sensor apparatus as claimed in claim 13, wherein said plate has a chip of said thermal flow sensor mounted thereon, said bypass flow member is molded of a resin material so that the resin material is integrally provided to form said bypass flow passage from the entrance and the exit, and said second straight pipe part is formed in said bypass flow member and said plate has a rectangular shape in cross section.

19. The split-flow-type flow sensor apparatus as claimed in claim 13, further comprising:

a main flow passage module formed with said main flow passage containing said first rectification member; and

a bypass flow passage module formed with said bypass flow passage containing said second rectification member, wherein said bypass flow passage module is inserted into an opening formed on a side of said main flow passage module, and the opening is sealed and the entrance and the exit of said bypass flow passage are positioned in said main flow passage.

20. The split-flow-type flow sensor apparatus as claimed in claim 13, wherein said second rectification member has a plurality of mesh plates which are arranged in a longitudinal direction of said second rectification member, each of said plurality of mesh plates includes a mesh part where meshes are formed and a plate part where no meshes are formed, and the mesh part is formed thinner than the plate part so that a gap is provided between the mesh parts of said plurality of mesh plates.