Unitary slot valve actuator with dual valves

• US 7,059,583 B2
• Filed: 02/10/2005
• Issued: 06/13/2006
• Est. Priority Date: 03/30/2000
• Status: Expired due to Term

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Tomasch, Gregory A.
• Primary Examiner(s): KEASEL, ERIC S
• Application Number:
  US11/056,818
• Publication Number:
  US 20050139799A1
• Time in Patent Office: 488 Days
• Field of Search: 251/167, 251/195, 251/298, 251/211, 414/217, 137/613, 137/614.11, 137/614.13
• US Class Current: 251/211
• CPC Class Codes: F16K 3/18 by movement of the closure members
• CPC Class Codes: F16K 43/008 the main valve having a back-seat position, e.g. to service the spindle sealing
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

A unitary slot valve actuator is in a vacuum body between adjacent vacuum chambers, such as process and transport modules. Separate valves are provided on the unitary actuator for each of two valve slots, each slot being closed or opened according to the position of the unitary actuator. The separate valves allow a vacuum condition to be maintained in the transport module while an adjacent process module is open to the atmosphere for servicing. The unitary actuator allows access to an open valve for servicing the open valve by way of a centering mechanism that holds the valves in an open, but not vertically-spaced, position relative to the slots. The open valves are easily reached by a service worker. A separate motor moves the unitary actuator and the valves down from the open position and away from the slots to expose seal surfaces around the slots for cleaning.

Claims

1. A dual slot valve for use in a semiconductor process cluster tool architecture arrangement, the dual slot valve comprising:

a housing having a first side and a second side, the housing having a first slot at the first side and a second slot at the second side for passing a substrate between a first module and a second module, the first module being attached to the first side of the housing and the second module being attached to the second side of the housing;

a first door being movably mounted within the housing to enable closure of the first slot;

a second door being movably mounted within the housing to enable closure of the second slot;

one door actuator, the one door actuator being connected to each of the first and second doors; and

a mount configured to move the one door actuator with the first and second doors centered with respect to an axis, the mount moving the centered doors into a position between the first and second slots, the mount being further configured to cause the one door actuator to tip to a tipped orientation with respect to the axis so that in the tipped orientation either of the first and second doors closes a respective one of the first and second slots while the other of the first and second doors opens the respective other of the slots.

2. A dual slot valve as recited in claim 1, wherein when the first and second doors are centered with respect to the axis, each of the first door and the second door is in an open position that is spaced from and between each of the first slot and the second slot, the valve further comprising:

a centering mechanism for holding the mount so that the one door actuator is centered with respect to the axis and the first door and the second door are held in the open position.

3. A dual slot valve as recited in claim 1, the dual slot valve further comprising:

a drive to cause the mount to move the one door actuator and position the first and second doors between the first and second slots.

4. A dual slot valve as recited in claim 3, the dual slot valve further comprising:

a centering mechanism for causing the mount to position the one door actuator with the first and second doors centered between the first and second slots as the one door actuator positions the first and second doors between the first and second slots.

5. A dual slot valve as recited in claim 1, the dual slot valve further comprising:

a tipping mechanism configured to act on the mount for tipping the one door actuator after the first and second doors have been positioned centered and between the first and second slots, the tipping mechanism positioning the mount to cause the one door actuator to tip to the tipped orientation.

6. A dual slot valve for use in a semiconductor process cluster tool architecture arrangement, the dual slot valve comprising:

a housing having a first side and a second side, the housing having a first slot at the first side and a second slot at the second side for passing a substrate between a first module and a second module, the first module being attached to the first side of the housing and the second module being attached to the second side of the housing;

a first door mounted within the housing for movement in a direction of a first axis to enable closure of the first slot;

a second door mounted within the housing for movement in the direction of the first axis to enable closure of the second slot;

a common door actuator consisting of a single member, the single member mounting each of the first and second doors for the movement in the direction of the first axis, the common door actuator having a longitudinal axis;

a mount for moving the common door actuator with the longitudinal axis in an orientation perpendicular to the first axis so that the longitudinal axis and the doors are in a position centered between the first and second slots; and

a tipping drive effective when the doors reach the position centered between the first and second slots to move the mount and cause the common door actuator to tip so that the common door actuator moves either of the first and second doors to close a respective one of the slots while the other of the first and second doors opens the respective other one of the slots.

7. A dual-slot valve as recited in claim 6, the tipping drive further comprising a mechanism configured to act on the mount for tipping the common door actuator, the tipping changing the orientation of the longitudinal axis with respect to the first axis from perpendicular to an acute angle, when the tipping is in a first direction along the first axis the common door actuator moves the first door to close the first slot while the second door opens the second slot, when the tipping is in a second direction along the first axis the common door actuator moves the second door to close the second slot while the first door opens the first slot.

8. A dual-slot valve as recited in claim 6, further comprising:

a drive for causing the mount to move the common door actuator with the longitudinal axis in the orientation perpendicular to the first axis.

9. A dual-slot valve as recited in claim 8, further comprising:

an assembly for holding the mount to position the common door actuator with the first and second doors in the position centered between the first and second slots as the common door actuator is moved with the longitudinal axis in the orientation perpendicular to the first axis.

10. A dual slot valve for use in a semiconductor process cluster tool architecture arrangement, the dual slot valve comprising:

a housing having a first side and a second side, the housing having a first slot at the first side and a second slot at the second side for passing a substrate between a first module and a second module, the first module being attached to the first side of the housing and the second module being attached to the second side of the housing;

a first door movably mounted within the housing to enable closure of the first slot;

a second door movably mounted within the housing to enable closure of the second slot;

one common door actuator consisting of a single member, the single member being connected to each of the first and second doors;

a mount configured to support the one common door actuator for movement to move the first and second doors in the housing to position the first and second doors between the first and second slots, the mount being further configured to tip the one common door actuator with respect to a center axis;

a drive configured to cause the mount to move the one common door actuator so that the one common door actuator moves the first and second doors in the housing into respective positions between the first and second slots;

a centering mechanism configured to act on the mount to position the one common door actuator so as to center the first and second doors on the center axis between the first and second slots, the centering mechanism being effective as the one common door actuator moves the first and second doors in the housing into the position between the first and second slots; and

a tipping mechanism for tipping the mount so that the mount tips the one common door actuator with respect to the center axis, the tipping mechanism being configured to cause the tipping once the first and second doors have been positioned centered and between the first and second slots, the tipping mechanism being further configured to cause the one common door actuator to move one of the first and second doors toward one of the first and second slots to close the respective one slot and to move the other of the first and second doors to move away from the other of the first and second slots to open the respective other slot.

11. A dual slot valve as recited in claim 10, wherein the drive is configured to cause the mount to move the one common door actuator so that the first and second doors move in the housing away from between the first and second slots to permit passing of the substrate between the first and second modules.

12. A dual slot valve as recited in claim 10, wherein the centering mechanism is configured so that when the first and second doors are centered and between the first and second slots, the positions of the first door and of the second door are open positions that are spaced from and centered between each of the first slot and the second slot.

13. A dual slot valve as recited in claim 12, wherein:

the centering mechanism is configured with spaced centering members; and

the mount is configured with a section received between the spaced centering members, the centering members holding the section in a centered orientation so that the mount positions the one common door actuator with the first and second doors centered on the center axis between the first and second slots.

14. A dual slot valve as recited in claim 13, wherein:

the spaced centering members of the centering mechanism are no longer effective for the centering when the tipping mechanism causes the one common door actuator to move one of the first and second doors toward one of the first and second slots to close the respective one slot and to move the other of the first and second doors to move away from the other of the first and second slots to open the respective other slot.

15. A dual slot valve as recited in claim 10, wherein:

the mount is configured to rotate on a pivot mechanism; and

the tipping mechanism is configured to cause the mount to rotate on the pivot mechanism.

16. A dual slot valve as recited in claim 15, wherein:

the mount is configured to receive a tipping force from the tipping mechanism at a location spaced from the pivot mechanism and the mount rotates on the pivot mechanism in response to the tipping force.