Method of creating a dispersion of a liquid on a substrate

• US 7,060,324 B2
• Filed: 01/13/2004
• Issued: 06/13/2006
• Est. Priority Date: 10/12/2000
• Status: Expired due to Term

• Current Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Original Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Inventors: Sreenivasan, Sidlgata V., Willson, C. Grant, Choi, Byung J., Bailey, Todd, Colburn, Matthew, Ekerdt, John
• Primary Examiner(s): Parker, Fred J.
• Application Number:
  US10/755,918
• Publication Number:
  US 20040170771A1
• Time in Patent Office: 882 Days
• Field of Search: 427/282, 427/272, 427/264, 427/270, 430/5, 430/320
• US Class Current: 427/264
• CPC Class Codes: B29C 2035/0827 using UV radiation
• CPC Class Codes: B29C 2043/025 forming a microstructure, i.e. fine patterning
• CPC Class Codes: B29C 35/0888 using transparant moulds
• CPC Class Codes: B29C 37/005 Compensating volume or shape change during moulding, in general
• CPC Class Codes: B29C 37/0053 Moulding articles characterised by the shape of the surface, e.g. ribs, high polish mould construction therefor B29C33/42; surface shaping of articles B29C59/00; by incorporating filler in or near the surface B29C70/64
• CPC Class Codes: B29C 43/003 characterised by the choice of material
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: G03F 9/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00
• CPC Class Codes: G11B 5/855 Coating only part of a support with a magnetic layer
• CPC Class Codes: Y10S 977/887 Nanoimprint lithography, i.e. nanostamp

Abstract

The present invention includes a method of moving a liquid between a substrate extending in a first plane and a template extending in a second plane. More specifically, the method may include forming an oblique angle between the first plane and the second plane, reducing a distance between the substrate and the template such that the template is in contact with a portion of the liquid at a desired location, and creating a dispersion of the liquid away from the desired location.

Claims

1. A method of moving a liquid between a substrate extending in a first plane and a template extending in a second plane, said method comprising:

forming an oblique angle between said first plane and said second plane;

reducing a distance between said substrate and paid template so that said template is in contact with a portion of said liquid at a desired location; and

creating a dispersion of said liquid away from said desired location.

2. The method as recited in claim 1 wherein said dispersion of said liquid further includes creating said dispersion of said liquid in a plurality of directions away from said desired location.

3. The method as recited in claim 1 wherein said liquid is disposed upon a surface of said substrate, with said dispersion of said liquid further includes substantially covering said surface with said liquid.

4. The method as recited in claim 1 wherein said method further includes placing said substrate in said first plane and said template in said second plane to be substantially parallel.

5. The method as recited in claim 1 wherein said method further includes expelling air located within said liquid.

6. The method as recited in claim 1 wherein said liquid is a UV curable liquid.

7. The method as recited in claim 1 wherein said template has a feature size of less than 250 nm.

8. The method as recited in claim 1 wherein said method further includes placing said first plane of said substrate and said second plane of said template in a substantially parallel orientation.

9. A method of moving a liquid between a substrate extending in a first plane and a template extending in a second plane, said method comprising:

placing said first plane of said substrate and paid second plane of said substrate in a substantially non-parallel orientation;

reducing a distance between said substrate and said template;

contacting a portion of said liquid with said template at a desired location, with said first plane of said substrate and said second plane of said template in a substantially non-parallel orientation; and

creating a dispersion of said liquid away from said desired location.

10. The method as recited in claim 9 wherein said dispersion of said liquid further includes creating said dispersion of said liquid in a plurality of directions away from said desired location.

11. The method as recited in claim 9 wherein said liquid is disposed upon a surface of said substrate, with said dispersion of said liquid further includes substantially covering said surface with said liquid.

12. The method as recited in claim 9 wherein said method further includes expelling air located within said liquid.

13. The method as recited in claim 9 wherein said liquid is a UV curable liquid.

14. The method as recited in claim 9 wherein said template has a feature size of less than 250 nm.

15. A method of moving a liquid between a substrate and a template, with a first distance and a second distance defined therebetween, with a first region of said template being spaced-apart from a sub-portion of said substrate, in superimposition therewith, a first distance, and a second region of said template being spaced-apart from a sub-area of said substrate a second distance, said method comprising:

reducing a spacing between said template and said substrate so that a rate of change of said first distance is at a higher rate that a rate of change of said second distance;

contacting a portion of said liquid at a desired location so that said template is in contact with a portion of said liquid at a desired location; and

creating a dispersion of said liquid away from said desired location.

16. The method as recited in claim 15 wherein said dispersion of said liquid further includes creating said dispersion of said liquid in a plurality of directions away from said desired location.

17. The method as recited in claim 15 wherein said liquid is disposed upon a surface of said substrate, with said dispersion of said liquid further includes substantially covering said surface with said liquid.

18. The method as recited in claim 15 wherein said method further includes expelling air located within said liquid.

19. The method as recited in claim 15 wherein said first region is disposed proximate to one end of said template and said second region is disposed proximate to an additional end of said template, disposed opposite to said one end.

20. The method as recited in claim 15 wherein said template has a feature size of less than 250 nm.