Method of orientating a template with respect to a substrate in response to a force exerted on the template

• US 7,060,402 B2
• Filed: 02/27/2004
• Issued: 06/13/2006
• Est. Priority Date: 10/29/1999
• Status: Expired due to Term

• Current Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Original Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Inventors: Sreenivasan, Sidlgata V., Johnson, Stephen C., Choi, Byung Jin
• Primary Examiner(s): Young, Christopher G.
• Application Number:
  US10/788,685
• Publication Number:
  US 20040168588A1
• Time in Patent Office: 837 Days
• Field of Search: 430/22, 430/30, 355/18, 355/72, 396/428
• US Class Current: 430/22
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: G03F 9/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00

Abstract

The present invention includes a method of orientating a template with respect to a substrate spaced from the template, the method including, rotating the template about a first and a second axis to orientate the template with respect to the substrate and maintain the orientation in response to a force being exerted upon the template.

Claims

1. A method of orientating a template with respect to a substrate spaced-apart from said template, said method comprising:

rotating said template about a first and a second axis to orientate said template with respect to said substrate and maintain said orientation in response to a force being exerted upon said template.

2. The method as recited in claim 1 wherein rotating said template further includes flexing said template about said first and said second axis.

3. The method as recited in claim 1 wherein rotating said template further includes rotating said template about said first axis independently from rotating said template about said second axis.

4. The method as recited in claim 1 wherein rotating said template further includes positioning said first axis orthogonally to said second axis.

5. The method as recited in claim 1 further including intersecting said first axis with said second axis to define a pivot point, with rotating said template further including rotating said template about said pivot point.

6. The method as recited in claim 1 further including intersecting said first axis with said second axis to define a pivot point, with rotating said template further including rotating said template about said pivot point, with said pivot point located on an interface of said template and said substrate.

7. The method as recited in claim 6 further including providing said first and said second axis with eight distinct joints, with said eight distinct joints spaced-apart from said pivot point.

8. The method as recited in claim 1 further including positioning said first and said second axis on an interface of said template and said substrate.

9. A method of orientating a template with respect to a substrate spaced-apart from said template, said method comprising:

rotating said template about a first and a second axis to orientate said template with respect to said substrate and maintain said orientation in response to contact with a material compressed between said template and said substrate.

10. The method as recited in claim 9 wherein rotating said template further includes flexing said template about said first and said second axis.

11. The method as recited in claim 9 wherein rotating said template further includes rotating said template about said first axis independently from rotating said template about said second axis.

12. The method as recited in claim 9 wherein rotating said template further includes positioning said first axis orthogonally to said second axis.

13. The method as recited in claim 9 further including intersecting said first axis with said second axis to define a pivot point, with rotating said template further including rotating said template about said pivot point.

14. The method as recited in claim 9 further including intersecting said first axis with said second axis to define a pivot point, with rotating said template further including rotating said template about said pivot point, with said pivot point located on an interface of said template and said substrate.

15. The method as recited in claim 13 further including providing said first and said second axis with eight distinct joints, with said eight distinct joints spaced-apart from said pivot point.

16. The method as recited in claim 9 further including positioning said first and said second axis on an interface of said template and said substrate.

17. A method of orientating a template with respect to a substrate spaced from said template, said method comprising:

rotating said template about a first and a second axis, said first axis being independent from said second axis, to orientate said template with respect to said substrate and maintain said orientation in response to a force being exerted upon said template.

18. The method as recited in claim 17 wherein rotating said template further includes flexing said template about said first and said second axis.

19. The method as recited in claim 17 wherein rotating said template further includes positioning said first axis orthogonally to said second axis.

20. The method as recited in claim 17 further including intersecting said first axis with said second axis to define a pivot point, with rotating said template further including rotating said template about said pivot point.

21. The method as recited in claim 17 further including intersecting said first axis with said second axis to define a pivot point, with rotating said template further including rotating said template about said pivot point, with said pivot point located on an interface of said template and said substrate.

22. The method as recited in claim 20 further including providing said first and said second axis with eight distinct joints, with said eight distinct joints spaced-apart from said pivot point.

23. The method as recited in claim 17 further including positioning said first and said second axis on an interface of said template and said substrate.