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Method and system for combined photothermal modulated reflectance and photothermal IR radiometric system

  • US 7,060,980 B2
  • Filed: 06/02/2005
  • Issued: 06/13/2006
  • Est. Priority Date: 02/13/2002
  • Status: Expired due to Fees
First Claim
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1. An apparatus for evaluating characteristics of a sample comprising:

  • an intensity modulated pump laser beam;

    optics for focusing the pump laser beam onto the surface of the sample to periodically excite the sample;

    a probe laser beam directed to reflect off the periodically excited sample;

    a photodetector for monitoring the modulated changes in the reflected probe beam resulting from the periodic excitation of the sample and generating first output signals;

    an infrared detector for monitoring modulated changes in the infrared radiation emitted from the sample resulting from the periodic excitation of the sample and generating second output signals; and

    a processor for receiving the first and second output signals and for using a combination of said first and second output signals to evaluate the sample.

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