Integrated circuit with unified input device, microprocessor and display systems
First Claim
1. An integrated circuit with a micromechanical element comprising:
- a semiconductor substrate;
a micromechanical sensor element formed on the semiconductor substrate and comprising a microengineered movable element;
a logic circuit formed on the semiconductor substrate; and
a semiconductor visual display element formed on the semiconductor substrate;
wherein the sensor element is electrically connected to the logic circuit, and the logic circuit is electrically connected to the semiconductor visual display element.
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Accused Products
Abstract
An integrated circuit having at least one micromechanical element thereon is described comprising a support substrate, a sensor element electrically connected to a logic circuit, and the logic circuit electrically connected to a semiconductor visual display element. The integrated circuit may be manufactured by a process which comprises providing a support substrate, forming at least two elements selected from a first group consisting of a micromechanical sensor element, a logic circuit and a semiconductor visual display element on said support, and manufacturing at third element on said support substrate, said third element selected from a second group consisting of a micromechanical sensor element, logic circuit and a semiconductor display element, which was not selected from the first group. In one embodiment of the process of manufacture, all three of at least three elements are constructed on the support itself, preferably by a microlithographic process.
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Citations
21 Claims
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1. An integrated circuit with a micromechanical element comprising:
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a semiconductor substrate; a micromechanical sensor element formed on the semiconductor substrate and comprising a microengineered movable element; a logic circuit formed on the semiconductor substrate; and a semiconductor visual display element formed on the semiconductor substrate; wherein the sensor element is electrically connected to the logic circuit, and the logic circuit is electrically connected to the semiconductor visual display element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An integrated circuit with a micromechanical element comprising:
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a semiconductor substrate; a moveable micromechanical sensor element formed on the semiconductor substrate; a logic circuit formed on the semiconductor substrate; and a semiconductor light emitting visual display element formed on the semiconductor substrate; wherein the moveable micromechanical sensor element is electrically connected to the logic circuit, and the logic circuit is electrically connected to the semiconductor light emitting visual display element.
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12. An integrated circuit provided on a semiconductor substrate with a unified input element and display element, the integrated circuit comprising:
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a moveable microengineered input element formed on the substrate; a logic circuit configured on the substrate and electrically connected to the input element; and an output element, the logic circuit being electrically connected to the output element; wherein the output element is a semiconductor visual display element formed on the substrate. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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20. An integrated circuit provided on a semiconductor substrate with a unified input element and display element, the integrated circuit comprising:
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a moveable microengineered input element formed on the substrate that senses a condition; a logic circuit configured on the substrate and electrically connected to the input element; and a visual display element supported by the substrate and coupled to the logic circuit that provides a visual image; wherein the visual image is a visual representation of the sensed condition.
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21. An integrated circuit provided on a semiconductor substrate with a unified input element and display element, the integrated circuit comprising:
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a moveable microengineered input element formed on the substrate that senses a condition, wherein the input element is a strain gauge; a logic circuit configured on the substrate and electrically connected to the input element; and a visual display element having multiple light-emitting pn junctions supported by the substrate and coupled to the logic circuit, wherein the visual display element provides a visual image comprising a visual representation of the sensed condition.
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Specification