Apparatus and method for calibrating a semiconductor test system
First Claim
1. A system, comprising:
- an apparatus, comprising;
a first connection, at which a corresponding calibration signal can be input;
a second connection at which the calibration signal can be emitted, to which a semiconductor component test apparatus is connectable;
a third connection at which the calibration signal can be emitted, to which a probecard is connectable for contacting semiconductor components to be tested by the semiconductor component test apparatus, whereinthe first connection being at least one of connected and connectable via a corresponding line to a first switch, which is at least one of connected and connectable to the second connection, and to a second switch, which is at least one of connected and connectable to the third connection; and
a calibration apparatus connected to the first connection for selectively calibrating at least one of the semiconductor component test apparatus and the probecard depending on a state of the first and the second switch.
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Accused Products
Abstract
A process and device for calibrating a semiconductor component test system includes a first connection, at which a corresponding signal, in particular a calibration signal can be input, and a second and third connection, at which the signal, in particular a calibration signal, can be emitted. The first connection is and/or can be connected via a corresponding line to a first switching apparatus, which is and/or can be connected to the second connection. A second switching apparatus is and/or can be connected to the third connection. Advantageously, the signal is then transferred to the second connection, and barred from the third connection by the first switching apparatus being closed and the second switching apparatus being opened.
16 Citations
10 Claims
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1. A system, comprising:
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an apparatus, comprising; a first connection, at which a corresponding calibration signal can be input; a second connection at which the calibration signal can be emitted, to which a semiconductor component test apparatus is connectable; a third connection at which the calibration signal can be emitted, to which a probecard is connectable for contacting semiconductor components to be tested by the semiconductor component test apparatus, wherein the first connection being at least one of connected and connectable via a corresponding line to a first switch, which is at least one of connected and connectable to the second connection, and to a second switch, which is at least one of connected and connectable to the third connection; and a calibration apparatus connected to the first connection for selectively calibrating at least one of the semiconductor component test apparatus and the probecard depending on a state of the first and the second switch. - View Dependent Claims (2, 3, 4)
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5. A system comprising:
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a first connection, at which a corresponding calibration signal can be input; a second connection at which the calibration signal can be emitted; a third connection at which the calibration signal can be emitted, wherein the first connection which is at least one of connected and connectable via a corresponding line to a first switching apparatus, which is at least one of connected and connectable to the second connection, and to a second switching apparatus, which is at least one of connected and connectable to the third connection; a calibration apparatus connected to the first connection for calibrating a semiconductor component test apparatus; and at least one of a semiconductor component test card and a probecard connected to the third connection for contacting the semiconductor components to be tested by the semiconductor component test apparatus. - View Dependent Claims (6)
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7. A method for calibrating a semiconductor component test system by using an apparatus, comprising:
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inputting a calibration signal at a first connection of the apparatus; emitting the calibration signal at a second connection of the apparatus, to which the semiconductor component test apparatus is connectable; emitting the calibration signal at a third connection, to which a probecard is connectable for contacting semiconductor components to be tested by the semiconductor component test apparatus, wherein the first connection being at least one of connected and connectable via a corresponding line to a first switch, which is at least one of connected and connectable to the second connection, and to a second switch, which is at least one of connected and connectable to the third connection; and selectively calibrating, using a calibration apparatus connected to the first connection, at least one of the semiconductor component test apparatus and the probecard depending on a state of the first and the second switch. - View Dependent Claims (8, 9, 10)
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Specification