Image adjustor including damping assembly

• US 7,061,577 B2
• Filed: 03/26/2002
• Issued: 06/13/2006
• Est. Priority Date: 03/26/2002
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Yuan, Bausan, Lee, Martin, Asami, Takeshi
• Primary Examiner(s): Mathews, Alan
• Application Number:
  US10/107,269
• Publication Number:
  US 20040046947A1
• Time in Patent Office: 1,540 Days
• Field of Search: 355/52, 355/53, 355/72, 355/75
• US Class Current: 355/53
• CPC Class Codes: G03B 27/42 for automatic sequential copying of the same original G03B27/34, G03B27/53 take precedence
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation

Abstract

An adjuster assembly (12) that adjusts the location where an image (18) from an object (20) is transferred onto a device (16) includes an adjuster (54) and a stage mover assembly (244). The stage mover assembly (244) adjusts the position of the adjuster (54). This moves the position where the image (18) is transferred onto the device (16). The adjuster assembly (12) can include a damper assembly (250) that is coupled to the stage mover assembly (244) and reduces the effect of vibration from the stage mover assembly (244) causing vibration on the rest of the apparatus.

Claims

1. An adjuster assembly that adjusts the location where an image is transferred onto a device, the adjuster assembly comprising:

an adjuster optical element;

a stage mover assembly that adjusts the position of the adjuster optical element relative to the device so that the adjuster optical element adjusts along two axes where the image is transferred onto the device, wherein the adjuster optical element does not alter the shape or characteristics of the image; and

an adjuster guide that allows for motion of the adjuster optical element about an X axis and about a Y axis and inhibits motion along the X axis and along the Y axis.

2. The adjuster assembly of claim 1 wherein the stage mover assembly moves the adjuster optical element between a first position and a second position relative to the device.

3. The adjuster assembly of claim 2 wherein, in the first position, the adjuster optical element does not substantially adjust where the image is transferred onto the device and in the second position, the adjuster optical element adjusts along two axes where the image is transferred onto the device.

4. The adjuster assembly of claim 1 wherein the stage mover assembly moves the adjuster optical element about the X axis relative to the device and the adjuster optical element adjusts where the image is transferred onto the device along the Y axis.

5. The adjuster assembly of claim 4 wherein the stage mover assembly moves the adjuster optical element about the Y axis relative to the device and the adjuster optical element adjusts where the image is transferred onto the device along the X axis.

6. The adjuster assembly of claim 1 wherein the stage mover assembly tilts the adjuster optical element relative to the device.

7. An apparatus for transferring a projected image from an object onto a device, the apparatus comprising the adjuster assembly of claim 1 positioned between the object and the device and a projection optical assembly positioned between the object and the device, the projection optical assembly focusing the projected image.

8. The apparatus of claim 7 wherein the projection optical assembly includes a projection optical axis and the stage mover assembly moves the adjuster optical element relative to the projection optical axis.

9. The apparatus of claim 8 wherein the adjuster optical element includes an adjuster optical axis and wherein the stage mover assembly tilts the adjuster optical axis between approximately zero and 50 microradians relative to the projection optical axis.

10. The apparatus of claim 8 wherein the adjuster optical element includes an adjuster optical axis and wherein the stage mover assembly tilts the adjuster optical axis between approximately zero and 5 milliradians relative to the projection optical axis.

11. The apparatus of claim 7 wherein the adjuster optical element is positioned within the projection optical assembly.

12. The apparatus of claim 11 wherein the stage mover assembly is positioned within the projection optical assembly.

13. The apparatus of claim 11 wherein the stage mover assembly is positioned outside the projection optical assembly.

14. The apparatus of claim 7 wherein the projection optical assembly includes a projection optical element and the stage mover assembly moves the adjuster optical element relative to the projection optical element.

15. The apparatus of claim 7 wherein the projection optical assembly includes a pair of projection optical elements, the adjuster optical element is positioned between the pair of projection optical elements and the stage mover assembly moves the adjuster optical element relative to the projection optical elements.

16. The apparatus of claim 7 further comprising an illumination system that directs a beam of light energy at the device, a reticle stage assembly that moves the object relative to the device, and a wafer stage assembly that moves the device relative to the object.

17. An apparatus for transferring a projected image from an object onto a device, the apparatus comprising:

a projection optical assembly positioned between the object and the device, the projection optical assembly focusing the projected image;

an adjuster assembly positioned at least partly within the projection optical assembly, the adjuster assembly comprising an adjuster optical element and a stage mover assembly that tilts the adjuster optical element relative to the device and the projection optical assembly so that the adjuster optical element adjusts where the image is transferred onto the device without otherwise altering the image; and

an adjuster guide that allows for motion of the adjuster optical element about an X axis and about a Y axis and inhibits motion along the X axis and along the Y axis.

18. The apparatus of claim 17 wherein the stage mover assembly moves the adjuster optical element between a first position and a second position relative to the device, wherein, in the first position, the adjuster optical element does not substantially adjust where the image is transferred onto the device and in the second position, the adjuster optical element adjusts where the image is transferred onto the device.

19. The apparatus of claim 17 wherein the stage mover assembly moves the adjuster optical element about the X axis relative to the device and the adjuster optical element adjusts where the image is transferred onto the device along the Y axis and wherein the stage mover assembly moves the adjuster optical element about the Y axis relative to the device and the adjuster optical element adjusts where the image is transferred onto the device along the X axis.

20. The apparatus of claim 17 further comprising a damper assembly that is coupled to the stage mover assembly.

21. The apparatus of claim 20 wherein the damper assembly dampens vibration about an X axis and about a Y axis.

22. The apparatus of claim 20 wherein the damper assembly includes a reaction counter mass and a mass mover assembly.

23. The apparatus of claim 22 further comprising a mass guide that allows for motion of the reaction counter mass about the X axis and about the Y axis and inhibits motion along the X axis and along the Y axis.

24. The apparatus of claim 22 wherein when the stage mover assembly moves the adjuster optical element about an X axis in a first X rotational direction, the mass mover assembly moves the reaction counter mass about the X axis in a second X rotational direction that is substantially opposite the first X rotational direction, and wherein when the stage mover assembly moves the adjuster optical element about a Y axis in a first Y rotational direction, the mass mover assembly moves the reaction counter mass about the Y axis in a second Y rotational direction that is substantially opposite the first Y rotational direction.

25. The apparatus of claim 22 wherein the reaction counter mass is positioned within the projection optical assembly.

26. The apparatus of claim 25 wherein the mass mover assembly is positioned within the projection optical assembly.

27. The apparatus of claim 25 wherein the mass mover assembly is positioned outside the projection optical assembly.

28. The apparatus of claim 22 wherein the damper assembly includes a reaction frame that is coupled to the stage mover assembly.

29. The apparatus of claim 28 wherein the reaction frame is secured to the projection optical assembly with a mount damper, the mount damper inhibiting vibration from the reaction frame causing vibration to the projection optical assembly.

30. The apparatus of claim 28 wherein the reaction frame is secured with a base reaction frame to a mounting base.

31. The apparatus of claim 17 wherein the projection optical assembly includes a projection optical axis, the adjuster optical element includes an adjuster optical axis and the stage mover assembly tilts the adjuster optical axis between approximately zero and 5 milliradians relative to the projection optical axis.

32. The apparatus of claim 17 wherein the adjuster optical element is positioned within the projection optical assembly.

33. The apparatus of claim 32 wherein the stage mover assembly is positioned within the projection optical assembly.

34. The apparatus of claim 32 wherein the stage mover assembly is positioned outside the projection optical assembly.

35. The apparatus of claim 17 wherein the projection optical assembly includes a projection optical element and the stage mover assembly moves the adjuster optical element relative to the projection optical element.

36. The apparatus of claim 17 wherein the projection optical assembly includes a pair of projection optical elements, the adjuster optical element is positioned between the pair of projection optical elements and the stage mover assembly moves the adjuster optical element relative to the projection optical elements.

37. The apparatus of claim 17 further comprising an illumination system that directs a beam of light energy at the object, a reticle stage assembly that moves the object relative to the device, and a wafer stage assembly that moves the device relative to the object.

38. An adjuster assembly that adjusts the location where an image is transferred onto a device, the adjuster assembly comprising:

an adjuster optical element;

a stage mover assembly that adjusts the position of the adjuster optical element relative to the device so that the adjuster optical element adjusts along two axes where the image is transferred onto the device; and

a damper assembly that is coupled to the stage mover assembly.

39. The adjuster assembly of claim 38 wherein the damper assembly dampens vibration about an X axis.

40. The adjuster assembly of claim 38 wherein the damper assembly dampens vibration about a Y axis.

41. The adjuster assembly of claim 38 wherein the damper assembly includes a reaction counter mass and a mass mover assembly.

42. The adjuster assembly of claim 41 further comprising a mass guide that allows for motion of the counter mass about the X axis and about the Y axis and inhibits motion of the counter mass along the X axis and along the Y axis.

43. The adjuster assembly of claim 41 wherein, when the stage mover assembly moves the adjuster optical element about an X axis in a first X rotational direction, the mass mover assembly moves the reaction counter mass about the X axis in a second X rotational direction that is substantially opposite the first X rotational direction.

44. The adjuster assembly of claim 43 wherein, when the stage mover assembly moves the adjuster optical element about a Y axis in a first Y rotational direction, the mass mover assembly moves the reaction counter mass about the Y axis in a second Y rotational direction that is substantially opposite the first Y rotational direction.

45. The adjuster assembly of claim 38 wherein the stage mover assembly moves the adjuster optical element between a first position and a second position relative to the device, and wherein, in the first position, the adjuster optical element does not substantially adjust where the image is transferred onto the device and in the second position, the adjuster optical element adjusts along two axes where the image is transferred onto the device.

46. The adjuster assembly of claim 38 wherein the adjuster optical element does not alter the image.

47. The adjuster assembly of claim 38 wherein the stage mover assembly moves the adjuster optical element about an X axis relative to the device and the adjuster optical element adjusts where the image is transferred onto the device along a Y axis, and wherein the stage mover assembly moves the adjuster optical element about the Y axis relative to the device and the adjuster optical element adjusts where the image is transferred onto the device along the X axis.

48. The adjuster assembly of claim 47 further comprising an adjuster guide that allows for motion of the adjuster about the X axis and about the Y axis and inhibits motion along the X axis and along the Y axis.

49. The adjuster assembly of claim 38 wherein the stage mover assembly tilts the adjuster optical element relative to the device.

50. An apparatus for transferring a projected image from an object onto a device, the apparatus comprising:

an adjuster assembly positioned between the object and the device, the adjuster assembly comprising (i) an adjuster optical element, (ii) a stage mover assembly that adjusts the position of the adjuster optical element relative to the device so that the adjuster optical element adjusts along two axes where the image is transferred onto the device, and (iii) a damper assembly that is coupled to the stage mover assembly; and

a projection optical assembly positioned between the object and the device, the projection optical assembly focusing the projected image.

51. The apparatus of claim 50 wherein the damper assembly includes a reaction counter mass and a mass mover assembly.

52. The apparatus of claim 51 wherein the reaction counter mass is positioned within the projection optical assembly.

53. The apparatus of claim 51 wherein the mass mover assembly is positioned within the projection optical assembly.

54. The apparatus of claim 51 wherein the mass mover assembly is positioned outside the projection optical assembly.

55. The apparatus of claim 54 wherein the stage mover assembly further comprises at least one actuator, the driving force of the actuator and a support force generated by the mass mover assembly lie on substantially the same axis.

56. The apparatus of claim 55, wherein the support force generated by the mass mover assembly is substantially perpendicular to the two axes.

57. The apparatus of claim 50 wherein the damper assembly includes a reaction frame that is coupled to the stage mover assembly.

58. The apparatus of claim 57 wherein the reaction frame is secured to the projection optical assembly with a mount damper, the mount damper inhibiting vibration from the reaction frame from causing vibration to the projection optical assembly.

59. The apparatus of claim 50 wherein the reaction frame is secured with a base reaction frame to a mounting base.

60. The apparatus of claim 50 wherein the adjuster optical element does not alter the image.

61. The apparatus of claim 50 wherein the projection optical assembly includes a projection optical axis and the stage mover assembly moves the adjuster optical element relative to the projection optical axis.

62. The apparatus of claim 61 wherein the adjuster optical element includes an adjuster optical axis and wherein the stage mover assembly tilts the adjuster optical axis between approximately zero and 50 microradians relative to the projection optical axis.

63. The apparatus of claim 61 wherein the adjuster optical element includes an adjuster optical axis and wherein the stage mover assembly tilts the adjuster optical axis between approximately zero and 5 milliradians relative to the projection optical axis.

64. The apparatus of claim 50 wherein the adjuster optical element is positioned within the projection optical assembly.

65. The apparatus of claim 64 wherein the stage mover assembly is positioned within the projection optical assembly.

66. The apparatus of claim 64 wherein the stage mover assembly is positioned outside the projection optical assembly.

67. The apparatus of claim 50 wherein the projection optical assembly includes a projection optical element and the stage mover assembly moves the adjuster optical element relative to the projection optical element.

68. The apparatus of claim 50 wherein the projection optical assembly includes a pair of projection optical elements, the adjuster optical element is positioned between the pair of projection optical elements and the stage mover assembly moves the adjuster optical element relative to the projection optical elements.

69. The apparatus of claim 50 further comprising an illumination system that directs a beam of light energy at the device, a reticle stage assembly that moves the object relative to the device, and a wafer stage assembly that moves the device relative to the object.

70. A stage assembly that moves an element relative to a mounting base, the stage assembly comprising:

a stage that retains the element;

a stage mover assembly that is coupled to the stage, the stage mover assembly moving the element about the X axis and generating reaction forces; and

a damper assembly that is coupled to the stage mover assembly, the damper assembly comprising a reaction counter mass and a mass mover assembly, wherein the mass mover assembly moves the reaction counter mass to counteract the reaction forces from the stage mover assembly, and wherein the damper assembly inhibits vibration from the stage mover assembly about the X axis from being transferred to the mounting base.

71. The stage assembly of claim 70 wherein the stage mover assembly moves the element about the Y axis and the damper assembly inhibits vibration from the stage mover assembly about the Y axis from being transferred to the mounting base.

72. The stage assembly of claim 71 further comprising a mass guide that allows for motion of the reaction counter mass about the X axis and about the Y axis and inhibits motion along the X axis and along the Y axis.

73. The stage assembly of claim 70 wherein when the stage mover assembly moves the element about an X axis in a first X rotational direction, the mass mover assembly moves the reaction counter mass about the X axis in a second X rotational direction that is substantially opposite the first X rotational direction.

74. The stage assembly of claim 73 wherein when the stage mover assembly moves the element about a Y axis in a first Y rotational direction, the mass mover assembly moves the reaction counter mass about the Y axis in a second Y rotational direction that is substantially opposite the first Y rotational direction.

75. The stage assembly of claim 70 wherein:

the mounting base supports at least one optical system that has an optical path;

the element includes an optical element that is disposed on the optical path; and

the damper assembly inhibits vibration from the stage mover assembly from being transferred to the optical system.

76. An optical assembly mounted on the mounting base, the optical assembly comprising an optical housing and the stage assembly of claim 70 wherein the stage assembly is supported by the optical housing and the damper assembly inhibits vibration from the stage mover assembly from being transferred to the optical housing.

77. The optical assembly of claim 76 further comprising an optical path, wherein the element includes an optical element that is disposed on the optical path.

78. An adjuster assembly that adjusts the location where an image is transferred onto a device, the adjuster assembly comprising:

an adjuster optical element; and

a stage assembly comprising (i) a stage that retains the adjuster optical element, (ii) a stage mover assembly that is coupled to the stage, the stage mover assembly moving the adjuster optical element and generating reaction forces, wherein the stage mover assembly adjusts the position of the adjuster optical element relative to the device so that the adjuster optical element adjusts where the image is transferred onto the device, and (iii) a damper assembly that is coupled to the stage mover assembly, the damper assembly comprising a reaction counter mass and a mass mover assembly, wherein the mass mover assembly moves the reaction counter mass to counteract the reaction forces from the stage mover assembly.

79. The adjuster assembly of claim 78 wherein the stage mover assembly moves the adjuster optical element between a first position and a second position relative to the device.

80. The adjuster assembly of claim 79 wherein, in the first position, the adjuster optical element does not substantially adjust where the image is transferred onto the device and in the second position, the adjuster optical element adjusts where the image is transferred onto the device.

81. The adjuster assembly of claim 78 wherein the movement of the adjuster optical element does not substantially alter the image.

82. The adjuster assembly of claim 78 wherein the stage mover assembly moves the adjuster optical element about an X axis relative to the device and the adjuster optical element adjusts where the image is transferred onto the device along a Y axis.

83. The adjuster assembly of claim 82 wherein the stage mover assembly moves the adjuster optical element about the Y axis relative to the device and the adjuster optical element adjusts where the image is transferred onto the device along the X axis.

84. The adjuster assembly of claim 78 further comprising an adjuster guide that allows for motion of the adjuster optical element about the X axis and about the Y axis and inhibits motion along the X axis and along the Y axis.

85. The stage assembly of claim 78 further comprising a mass guide that allows for motion of the reaction counter mass about the X axis and about the Y axis and inhibits motion along the X axis and along the Y axis.

86. The adjuster assembly of claim 78 wherein the stage mover assembly tilts the adjuster optical element relative to the device.

87. An apparatus for transferring a projected image from an object onto a device, the apparatus comprising the adjuster assembly of claim 78 positioned between the object and the device and a projection optical assembly positioned between the object and the device, the projection optical assembly focusing the projected image.

88. The apparatus of claim 87 wherein the projection optical assembly includes a projection optical axis and the stage mover assembly moves the adjuster optical element relative to the projection optical axis.

89. The apparatus of claim 88 wherein the adjuster optical element includes an adjuster optical axis and wherein the stage mover assembly tilts the adjuster optical axis between approximately zero and 50 microradians relative to the projection optical axis.

90. The adjuster assembly of claim 88 wherein the adjuster optical element includes an adjuster optical axis and wherein the stage mover assembly tilts the adjuster optical axis between approximately zero and 5 milliradians relative to the projection optical axis.

91. The apparatus of claim 87 wherein the adjuster optical element is positioned within the projection optical assembly.

92. The apparatus of claim 91 wherein the stage mover assembly is positioned within the projection optical assembly.

93. The apparatus of claim 91 wherein the stage mover assembly is positioned outside the projection optical assembly.

94. The apparatus of claim 87 wherein the projection optical assembly includes a projection optical element and the stage mover assembly moves the adjuster optical element relative to the projection optical element.

95. The apparatus of claim 87 wherein the projection optical assembly includes a pair of projection optical elements, the adjuster optical element is positioned between the pair of projection optical elements and the stage mover assembly moves the adjuster optical element relative to the projection optical elements.

96. The apparatus of claim 87 wherein the reaction counter mass is positioned within the projection optical assembly.

97. The apparatus of claim 87 wherein the mass mover assembly is positioned within the projection optical assembly.

98. The apparatus of claim 87 wherein the mass mover assembly is positioned outside the projection optical assembly.

99. The apparatus of claim 87 wherein the damper assembly includes a reaction frame that is coupled to the stage mover assembly.

100. The apparatus of claim 99 wherein the reaction frame is secured to the projection optical assembly with a mount damper, the mount damper inhibiting vibration from the reaction frame causing vibration to the projection optical assembly.

101. The apparatus of claim 99 wherein the reaction frame is secured with a base reaction frame to the mounting base.

102. The apparatus of claim 87 further comprising an illumination system that directs a beam of light energy at the object, a reticle stage assembly that moves the object relative to the device, and a wafer stage assembly that moves the device relative to the object.

103. A method for adjusting the location where an image is transferred onto a device, the method comprising the steps of:

providing an adjuster optical element;

moving the adjuster optical element with a stage mover assembly relative to the device so that the adjuster optical element adjusts where the image is transferred onto the device; and

damping vibration from the stage mover assembly with a damper assembly that is coupled to the stage mover assembly.

104. The method of claim 103 wherein the step of damping vibration includes the steps of damping vibration about an X axis and damping vibration about a Y axis.

105. The method of claim 103 wherein the step of damping includes the step of providing a damper assembly having a reaction counter mass and a mass mover assembly, wherein when the stage mover assembly moves the adjuster optical element about an X axis in a first X rotational direction, the mass mover assembly moves the reaction counter mass about the X axis in a second X rotational direction that is substantially opposite the first X rotational direction, and wherein when the stage mover assembly moves the adjuster optical element about a Y axis in a first Y rotational direction, the mass mover assembly moves the reaction counter mass about the Y axis in a second Y rotational direction that is substantially opposite the first Y rotational direction.

106. The method of claim 103 wherein the step of moving the adjuster optical element includes the steps of moving the adjuster optical element between a first position and a second position relative to the device, wherein, in the first position, the adjuster optical element does not substantially adjust where the image is transferred onto the device and in the second position, the adjuster optical element adjusts where the image is transferred onto the device.

107. The method of claim 103 wherein the step of moving the adjuster optical element includes the steps of moving the adjuster optical element about an X axis relative to the device to adjust where the image is transferred onto the device along a Y axis and moving the adjuster optical element about the Y axis relative to the device to adjust where the image is transferred onto the device along the X axis.

108. A method for making an apparatus that transfers a projected image from an object onto a device, the method comprising the steps of adjusting the location where an image is transferred onto a device by the method of claim 103 and focusing the projected image with a projection optical assembly positioned between the object and the device.

109. The method of claim 108 wherein the step of moving the adjuster optical element includes the step of tilting the adjuster optical element relative to a projection optical axis of the projection optical assembly.

110. The method of claim 108 further comprising the step of positioning the adjuster optical element within the projection optical assembly.

111. The method of claim 110 further comprising the step of positioning the stage mover assembly within the projection optical assembly.

112. The method of claim 110 further comprising the step of positioning the stage mover assembly outside the projection optical assembly.

113. The method of claim 110 further comprising the step of positioning the adjuster optical element between a pair of projection optical elements of the projection optical assembly.

114. The method of claim 108 further comprising the steps of directing a beam of light energy at the object, moving the object relative to the device with a reticle mover assembly, and moving the device relative to the object with a wafer stage assembly.

115. A method for making a stage assembly that moves an element relative to a mounting base, the method comprising the steps of:

providing a stage frame that retains the element;

moving the stage frame about an X axis and about a Y axis with a stage mover assembly, the stage mover assembly generating reaction forces;

coupling a damping assembly to the stage mover assembly, the damping assembly including a reaction counter mass and a mass mover assembly; and

reducing the reaction forces about the X axis and about the Y axis that are transferred to the mounting base by moving the reaction counter mass with the mass mover assembly.

116. The method of claim 115 wherein the step of moving the stage frame includes the step of moving the stage frame about an X axis in a first X rotational direction, and the step of reducing the reaction forces includes the step of moving the reaction counter mass about the X axis in a second X rotational direction that is substantially opposite the first X rotational direction.

117. The method of claim 116 wherein the step of moving the stage frame includes the step of moving the stage frame about a Y axis in a first Y rotational direction, and the step of reducing the reaction forces includes the step of moving the reaction counter mass about the Y axis in a second Y rotational direction that is substantially opposite the first Y rotational direction.

118. A method for adjusting the location where an image is transferred onto a device, the method comprising the steps of:

providing an adjuster optical element;

providing a stage assembly made by (i) providing an stage frame that retains the adjuster optical element, (ii) moving the stage frame with a stage mover assembly, the stage mover assembly generating reaction forces, (iii) coupling a damping assembly to the stage mover assembly, the damping assembly including a reaction counter mass and a mass mover assembly, and (iv) reducing the reaction forces that are transferred to the mounting base by moving the reaction counter mass with the mass mover assembly; and

moving the adjuster optical element with the stage assembly relative to the device so that the adjuster optical element adjusts where the image is transferred onto the device.

119. The method of claim 118 wherein the step of moving includes the steps of moving the adjuster optical element between a first position and a second position relative to the device, wherein, in the first position, the adjuster optical element does not substantially adjust where the image is transferred onto the device and in the second position, the adjuster optical element adjusts where the image is transferred onto the device.

120. The method of claim 118 wherein the step of moving the adjuster optical element includes the steps of moving the adjuster optical element about an X axis in a first X rotational direction relative to the device to adjust where the image is transferred onto the device along a Y axis and moving the adjuster optical element about the Y axis in a first Y rotational direction relative to the device to adjust where the image is transferred onto the device along the X axis.

121. The method of claim 120 wherein the step of reducing the reaction forces includes the steps of moving the reaction counter mass about the X axis in a second X rotational direction that is substantially opposite the first X rotational direction and moving the reaction counter mass about the Y axis in a second Y rotational direction that is substantially opposite the first Y rotational direction.

122. A method for making an apparatus that transfers a projected image from an object onto a device, the method comprising the steps of adjusting the location where an image is transferred onto the device by the method of claim 118 and focusing the projected image with a projection optical assembly positioned between the object and the device.

123. The method of claim 122 wherein the step of moving the adjuster optical element includes the step of tilting the adjuster optical element relative to a projection optical axis of the projection optical assembly.

124. The method of claim 122 further comprising the step of positioning the projection optical element within the projection optical assembly.

125. The method of claim 122 further comprising the step of positioning the stage mover assembly within the projection optical assembly.

126. The method of claim 122 further comprising the step of positioning the stage mover assembly outside the projection optical assembly.

127. The method of claim 122 further comprising the step of positioning the adjuster optical element between a pair of projection optical elements of the projection optical assembly.

128. The method of claim 122 further comprising the steps of directing a beam of light energy at the device, moving the device relative to the object with a reticle mover assembly, and moving the object relative to the device with a wafer stage assembly.

129. An apparatus for transferring a projected image from an object onto a device, the apparatus comprising:

a projection optical assembly positioned between the object and the device, the projection optical assembly focusing the projected image;

an adjuster assembly positioned at least partly within the projection optical assembly, the adjuster assembly comprising an adjuster optical element and a stage mover assembly that tilts the adjuster optical element relative to the device and the projection optical assembly so that the adjuster optical element adjusts where the image is transferred onto the device without otherwise altering the image; and

a damper assembly that is coupled to the stage mover assembly.

130. The apparatus of claim 129 wherein the damper assembly dampens vibration about an X axis and about a Y axis.

131. The apparatus of claim 129 wherein the damper assembly includes a reaction counter mass and a mass mover assembly.

132. The apparatus of claim 131 further comprising a mass guide that allows for motion of the reaction counter mass about the X axis and about the Y axis and inhibits motion along the X axis and along the Y axis.

133. The apparatus of claim 131 wherein when the stage mover assembly moves the adjuster optical element about an X axis in a first X rotational direction, the mass mover assembly moves the reaction counter mass about the X axis in a second X rotational direction that is substantially opposite the first X rotational direction, and wherein when the stage mover assembly moves the adjuster optical element about a Y axis in a first Y rotational direction, the mass mover assembly moves the reaction counter mass about the Y axis in a second Y rotational direction that is substantially opposite the first Y rotational direction.

134. The apparatus of claim 131 wherein the reaction counter mass is positioned within the projection optical assembly.

135. The apparatus of claim 134 wherein the mass mover assembly is positioned within the projection optical assembly.

136. The apparatus of claim 134 wherein the mass mover assembly is positioned outside the projection optical assembly.

137. The apparatus of claim 131 wherein the damper assembly includes a reaction frame that is coupled to the stage mover assembly.

138. The apparatus of claim 137 wherein the reaction frame is secured to the projection optical assembly with a mount damper, the mount damper inhibiting vibration from the reaction frame causing vibration to the projection optical assembly.

139. The apparatus of claim 137 wherein the reaction frame is secured with a base reaction frame to a mounting base.