Method of fabricating devices incorporating microelectromechanical systems using at least one UV curable tape
First Claim
1. A method of fabricating MEMS devices, the method including the steps of:
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providing a substrate and a MEMS layer, the MEMS layer arranged on one side of the substrate;
applying a further layer arranged to protect the MEMS layer to said one side of the substrate;
separating the substrate into discrete parts by performing at least one operation including a back etching operation from a side of the substrate opposed to the side having the MEMS layer, each discrete part carrying at least one MEMS part of the MEMS layer;
subsequent to the step of separating the substrate into discrete parts, applying a holding means to said opposed side of the substrate;
defining individual chips by performing at least one operation, including an etching operation on the further layer, each of said chips being composed of one of said discrete parts of the substrate, at least one part of the MEMS layer and a part of the further layer; and
causing the individual chips to be released from the holding means for removal from the holding means.
2 Assignments
0 Petitions
Accused Products
Abstract
A method of fabricating devices incorporating microelectromechanical systems (MEMS) using a UV curable tape includes providing a substrate (14) with a MEMS layer (18) arranged on one side (12) of the substrate (14). A further layer (10) is applied to the side (12) of the substrate (14). At least one operation is performed on the substrate (14) from a side (22) of the substrate (14) opposed to the side (12) having the MEMS layer (18). A holding tape (38) is applied to the side (22) of the substrate. At least one operation is then performed on the further layer (10) to define individual chips (20). Each chip (20) is composed of a part of the substrate (24), at least one part of the MEMS layer (18) and a part of the further layer (10). Individual chips (20) are then able to be released from the tape (38) by exposing the tape (38) to UV light.
12 Citations
7 Claims
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1. A method of fabricating MEMS devices, the method including the steps of:
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providing a substrate and a MEMS layer, the MEMS layer arranged on one side of the substrate; applying a further layer arranged to protect the MEMS layer to said one side of the substrate; separating the substrate into discrete parts by performing at least one operation including a back etching operation from a side of the substrate opposed to the side having the MEMS layer, each discrete part carrying at least one MEMS part of the MEMS layer; subsequent to the step of separating the substrate into discrete parts, applying a holding means to said opposed side of the substrate; defining individual chips by performing at least one operation, including an etching operation on the further layer, each of said chips being composed of one of said discrete parts of the substrate, at least one part of the MEMS layer and a part of the further layer; and causing the individual chips to be released from the holding means for removal from the holding means. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification