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Structure and programming of laser fuse

  • US 7,064,409 B2
  • Filed: 11/04/2003
  • Issued: 06/20/2006
  • Est. Priority Date: 11/04/2003
  • Status: Active Grant
First Claim
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1. An electronic structure, comprising:

  • a first dielectric layer having at least first and second vias filled with a first self-passivated electrically conducting material;

    a fuse link on top of the first dielectric layer, the fuse link electrically connecting the first and second vias and comprising a second material having a characteristic of changing its electrical resistance after being exposed to a laser beam; and

    first and second mesas directly above the fuse link and directly above the first and second vias, respectively, the first and second mesas each comprising a third self-passivated electrically conducting material, wherein the fuse link is disposed between the first mesa and the first dielectric layer, and wherein the fuse link is disposed between the second mesa and the first dielectric layer.

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