Integrated inductor
First Claim
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1. An inductor comprising:
- a substrate comprising a semiconductor material;
a first dielectric layer over the substrate;
a first magnetic layer over the first dielectric layer;
a second dielectric layer over the first magnetic layer;
a conductor over the second dielectric layer, wherein the conductor has an innermost turn and an outermost turn; and
a second magnetic layer over the conductor, the second magnetic layer is connected to the first magnetic layer through a region within the innermost turn and a region surrounding the outermost turn of the conductor.
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Abstract
An inductor comprises a substrate comprising a semiconductor material, a first dielectric layer over the substrate, a magnetic layer over the first dielectric layer, a second dielectric layer over the magnetic layer, and a conductor over the second dielectric layer.
53 Citations
13 Claims
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1. An inductor comprising:
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a substrate comprising a semiconductor material; a first dielectric layer over the substrate; a first magnetic layer over the first dielectric layer; a second dielectric layer over the first magnetic layer; a conductor over the second dielectric layer, wherein the conductor has an innermost turn and an outermost turn; and a second magnetic layer over the conductor, the second magnetic layer is connected to the first magnetic layer through a region within the innermost turn and a region surrounding the outermost turn of the conductor. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An inductor comprising:
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a substrate comprising a semiconductor material; a first dielectric layer over the substrate; a conductor having a first shape over the first dielectric layer; a second dielectric layer over the conductor; and a magnetic layer including at least one slot on top of the second dielectric layer, wherein the magnetic layer comprises cobalt, and wherein the at least one slot has a second shape independent on the first shape of the conductor. - View Dependent Claims (9, 10, 11, 12, 13)
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Specification