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Substrate carrier and method for making a substrate carrier

  • US 7,064,808 B1
  • Filed: 04/22/2004
  • Issued: 06/20/2006
  • Est. Priority Date: 04/22/2003
  • Status: Active Grant
First Claim
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1. A carrier constructed to carry a lithographic substrate or a lithographic patterning device, said carrier comprising:

  • a first member provided with an open hollow structure that is open to at least one side of said first member, said first member constructed to support a lithographic substrate or a lithographic patterning device; and

    a second member connected to said first member, such that a closed hollow internal structure is formed between said first and second members.

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