Substrate carrier and method for making a substrate carrier

• US 7,064,808 B1
• Filed: 04/22/2004
• Issued: 06/20/2006
• Est. Priority Date: 04/22/2003
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Gilissen, Noud Jan, Ottens, Joost Jeroen, Van Der Schoot, Harmen Klaas, Vosters, Petrus Matthijs Henricus
• Primary Examiner(s): Perkey, W. B.
• Assistant Examiner(s): NELSON, VIVIAN HSU
• Application Number:
  US10/829,462
• Time in Patent Office: 789 Days
• Field of Search: 355 72- 77, 355/30, 355/53, 430/58.1, 430/66, 430/60, 118/715, 118/730, 118/725
• US Class Current: 355/72
• CPC Class Codes: G03F 7/707 Chucks, e.g. chucking or un-chucking operations or structural details
• CPC Class Codes: G03F 7/70716 Stages

Abstract

A carrier for carrying a lithographic substrate or a lithographic patterning means. The carrier comprises a first member provided with an open hollow structure that is open to at least one side of the member. The carrier further comprises a second member connected to the first member, such that a closed hollow internal structure is formed between the carrier members.

Claims

1. A carrier constructed to carry a lithographic substrate or a lithographic patterning device, said carrier comprising:

a first member provided with an open hollow structure that is open to at least one side of said first member, said first member constructed to support a lithographic substrate or a lithographic patterning device; and

a second member connected to said first member, such that a closed hollow internal structure is formed between said first and second members.

2. A carrier according to claim 1, wherein said second member has an open, hollow structure which together with said open hollow structure of said first member forms said closed internal structure of said carrier.

3. A carrier according to claim 2, wherein said open, hollow structure of said first and second members includes a plurality of spaced apart ribs.

4. A carrier according to claim 1, further comprising:

a third member positioned between said first and second members, said third member having an open, hollow structure, that is open to two opposite sides thereof.

5. A carrier according to claim 4, wherein said third member includes a plurality of spaced apart interior walls in said open, hollow structure.

6. A carrier according to claim 3, wherein said open, hollow structure of said first and second members includes an additional plate positioned against said ribs.

7. A carrier according to claim 1, wherein said first and second members of said carrier are made of different materials, of which at least one is chosen from a group consisting of glass, carbon and ceramics.

8. A lithographic apparatus comprising:

a radiation system constructed to provide a beam of radiation;

a support structure constructed to support a patterning device, said patterning device serving to impart a cross-section of said beam with a pattern to form a patterned beam; and

a projection system that projects said patterned beam onto a target portion of a substrate, wherein said apparatus further includes a table constructed to hold said substrate or said patterning device, said table including a carrier constructed to carry a lithographic substrate or a lithographic patterning device, said carrier including

a first member provided with an open hollow structure that is open to at least one side of said first member, said first member constructed to support a lithographic substrate or a lithographic patterning device; and

a second member connected to said first member, such that a closed hollow internal structure is formed between said first and second members.

9. A lithographic apparatus according to claim 8, wherein said second member has an open, hollow structure which together with said open hollow structure of said first member forms said closed internal structure of said carrier.

10. A lithographic apparatus according to claim 9, wherein said open, hollow structure of said first and second members includes a plurality of spaced apart ribs.

11. A lithographic apparatus according to claim 10, wherein said open, hollow structure of said first and second members includes an additional plate positioned against said ribs.

12. A lithographic apparatus according to claim 8, wherein said carrier further includes a third member positioned between said first and second members, said third member having an open, hollow structure, that is open to two opposite sides thereof.

13. A lithographic apparatus according to claim 12, wherein said third member includes a plurality of spaced apart interior walls in said open, hollow structure.

14. A lithographic apparatus according to claim 8, wherein said first and second members of said carrier are made of different materials, of which at least one is chosen from a group consisting of glass, carbon and ceramics.

15. A method for making a carrier for carrying a lithographic substrate or a lithographic patterning device, the method comprising:

providing at least two members, one of the at least two members being constructed to support a lithographic substrate or a lithographic patterning device; and

connecting the at least two members to each other to form a carrier, where the at least two members are formed in such a way that the carrier comprises a substantially closed, hollow internal structure.

16. A method according to claim 15, further comprising:

forming the at least two members by a milling technique.

17. A method according to claim 15, further comprising:

providing at least one of the at least two members with means for holding the substrate or the patterning device.

18. A method according to claim 15, wherein:

forming the carrier includes providing a mirror on at least one side of the carrier, the mirror being arranged to be used in combination with a position determining unit.

19. A method according to claim 15, further comprising:

forming a hollow structure in a third member in such a way that the third member comprises a first and a second open side,

attaching the first member to the first open side of the third member and attaching the second member to the second open side of the third member in such a way that the carrier comprises a substantially closed, hollow internal structure.

20. A method according to claim 19, comprising

forming a hollow structure in the first and the second member in such a way that the first and second member have one open side,

attaching the open side of the first member to the first open side of the third member and attaching the open side of the second member to the second open side of the third member in such a way that the carrier comprises a substantially closed, hollow internal structure.

21. A method according to claim 15 further comprising:

providing an additional plate; and

positioning the addition plate in between the first and third member or the second and third member.

22. A method according to claim 15, further comprising:

forming the hollow structure in the third member using an extrusion technique or a water jet cutting technique.

23. A method according to claim 15, further comprising:

forming openings in the carrier.

24. A method according to claim 15, wherein the at least two members forming the carrier are joined by anodic bonding.