System for generating two-dimensional masks from a three-dimensional model using topological analysis
First Claim
Patent Images
1. A method of generating two-dimensional masks from a three-dimensional model comprising:
- providing a three-dimensional model representing a micro-electro-mechanical structure for manufacture and a description of process mask requirements;
reducing the three-dimensional model to a topological description of unique cross sections;
selecting candidate masks from the unique cross sections and a cross section topology; and
reconciling the candidate masks based on the description of process mask requirements to produce two-dimensional process masks.
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Abstract
A method of generating two-dimensional masks from a three-dimensional model comprises providing a three-dimensional model representing a micro-electro-mechanical structure for manufacture and a description of process mask requirements, reducing the three-dimensional model to a topological description of unique cross sections, and selecting candidate masks from the unique cross sections and the cross section topology. The method further can comprise reconciling the candidate masks based on the process mask requirements description to produce two-dimensional process masks.
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Citations
32 Claims
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1. A method of generating two-dimensional masks from a three-dimensional model comprising:
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providing a three-dimensional model representing a micro-electro-mechanical structure for manufacture and a description of process mask requirements; reducing the three-dimensional model to a topological description of unique cross sections; selecting candidate masks from the unique cross sections and a cross section topology; and reconciling the candidate masks based on the description of process mask requirements to produce two-dimensional process masks. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of generating two-dimensional masks from a three-dimensional model comprising:
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disassembling the three-dimensional model into one or more independent bodies; processing individual of the one or more independent bodies comprising; generating a topology tree composed of one or more nodes; categorizing the one or more nodes of the topology tree; and locating deposition boundaries to define one or more deposition domains; processing individual of the one or more deposition domains comprising; locating candidate masks; and saving the candidate masks in a candidate mask set; and summing, the candidate masks in the candidate mask set. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of generating two-dimensional masks from a three-dimensional model comprising:
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analyzing cross sectional topology of a three-dimensional body; generating a topology tree describing connectivity and relationships between cross sections, the topology tree including one or more nodes and branches connecting the one or more nodes; processing individual of the one or more nodes comprising; calculating a cross sectional area of the individual of the one or more nodes; and categorizing the individual of the one or more nodes relative to topological neighboring nodes; processing individual of the one or more branches comprising; locating deposition boundaries to define one or more deposition domains; and processing individual deposition domain regions between the deposition boundaries comprising; defining a mask set and deposition thickness. - View Dependent Claims (19, 20, 21)
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22. An article of manufacture comprising:
a controller usable medium having a computable readable program code embodied therein for generating two-dimensional masks from a three-dimensional model, the computable readable program code fuser comprising; a code capable of causing the controller to access information relating to a three-dimensional model representing a micro-electro-mechanical structure for manufacture and a description of process mask requirements; a code capable of causing the controller to reduce the three-dimensional model to a topological description of unique cross sections; a code capable of causing the controller to select candidate masks from the unique cross sections and a cross section topology; and a code capable of causing the controller to reconcile the candidate masks based on the description of process mask requirements to produce two-dimensional process masks. - View Dependent Claims (23, 24, 25, 26)
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27. An article of manufacture comprising:
a controller usable medium having a computable readable program code embodied therein for generating two-dimensional masks from a three-dimensional model that represents a micro-electro-mechanical structure for manufacture, the computable readable program code further comprising; a code capable of causing the controller to disassemble the three-dimensional model into one or more independent bodies; a code capable of causing the controller to process individual of the one or more independent bodies comprising; a code capable of causing the controller to generate a topology tree composed of one or more nodes; a code capable of causing the controller to categorize the one or more nodes of the topology tree; and a code capable of causing the controller to locate deposition boundaries to define one or more deposition domains; a code capable of causing the controller to process individual of the one or more deposition domains comprising; a code capable of causing the controller to locate candidate masks; and a code capable of causing the controller to save masks in a candidate mask set; and a code capable of causing the controller to sum the candidate masks in the candidate mask set. - View Dependent Claims (28, 29)
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30. An article of manufacture comprising;
a controller usable medium having a computable readable program code embodied therein for generating two-dimensional masks from a three-dimensional model that represents a micro-electro-mechanical structure for manufacture, the computable readable program code further comprising; a code capable of causing the controller to analyze cross sectional topology of a three-dimensional body; a code capable of causing the controller to generate a topology tree describing connectivity and relationships between cross sections, the topology tree including one or more nodes and branches connecting the one or more nodes; a code capable of causing the controller to process individual of the one or more nodes comprising; a code capable of causing the controller to calculate a cross sectional area of the individual of the one or more nodes; and a code capable of causing the controller to categorize the individual of the one or more nodes relative to topological neighboring nodes; a code capable of causing the controller to process individual of the one or more branches comprising; a code capable of causing the controller to locate deposition boundaries to define one or more deposition domains; and a code capable of causing the controller to process individual deposition domain regions between the deposition boundaries comprising; a code capable of causing the controller to define a mask set and deposition thickness. - View Dependent Claims (31)
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32. An apparatus for generating two-dimensional masks from a three-dimensional model comprising:
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means for providing a three-dimensional model representing a micro-electro-mechanical structure for manufacture and a description of process mask requirements; means for reducing the three-dimensional model to a topological description of unique cross sections; means for selecting candidate masks from the unique cross sections and a cross section topology; and means for reconciling the candidate masks based on the description of process mask requirements to produce two-dimensional process masks.
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Specification