Measurement probe and using method for the same
First Claim
1. A measuring probe, comprising:
- a housing configured to be made of a magnetic material in a cylindrical shape;
a movable member configured to be provided inside the housing along an axis line of the housing, the movable member having a contact portion at one end configured to come into contact with a measuring target face and a reflecting plane formed at the other end configured to reflect a measuring light beam, and being made of a nonmagnetic material in a rod shape;
a magnetic substance configured to be mounted on the movable member;
a bearing made of a magnetic material which is in a cylinder shape with the movable member running through at a center portion, the bearing configured to be press-fitted into the housing and support the movable member movably in axis line direction in a non-contact state;
a magnetic force generating portion configured to be in a cylinder shape with the movable member running through at a center portion and be fitted into the housing, the magnetic force generating portion having a retreat magnetic force generating portion configured to work on the magnetic substance of the movable member and move the movable member toward retreat direction along the axis line direction, and a measurement magnetic force generating portion configured to work on the magnetic substance of the movable member and move the movable member toward measuring direction along the axis line direction; and
a cover member configured to be mountable on and demountable from the housing, prevent the magnetic force generating portion and the movable member from dropping off from the housing, and be made of a magnetic material.
1 Assignment
0 Petitions
Accused Products
Abstract
A measuring probe for obtaining positional information on a measuring target face has: a movable member having a contact portion which is formed in its top and comes into contact with the measuring target face and a reflecting plane formed on its base end for reflecting a measuring light beam; a magnetic substance mounted on the movable member; a fixed member disposed in a fixed state; a bearing provided on the fixed member for supporting the movable member movably in axis line direction; and a magnetic force generating portion provided on the fixed member for generating force acting upon the magnetic substance to move the movable member in the axis line direction. The movable member is formed from a nonmagnetic material, and the bearing and the fixed member are formed from a magnetic material.
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Citations
11 Claims
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1. A measuring probe, comprising:
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a housing configured to be made of a magnetic material in a cylindrical shape; a movable member configured to be provided inside the housing along an axis line of the housing, the movable member having a contact portion at one end configured to come into contact with a measuring target face and a reflecting plane formed at the other end configured to reflect a measuring light beam, and being made of a nonmagnetic material in a rod shape; a magnetic substance configured to be mounted on the movable member; a bearing made of a magnetic material which is in a cylinder shape with the movable member running through at a center portion, the bearing configured to be press-fitted into the housing and support the movable member movably in axis line direction in a non-contact state; a magnetic force generating portion configured to be in a cylinder shape with the movable member running through at a center portion and be fitted into the housing, the magnetic force generating portion having a retreat magnetic force generating portion configured to work on the magnetic substance of the movable member and move the movable member toward retreat direction along the axis line direction, and a measurement magnetic force generating portion configured to work on the magnetic substance of the movable member and move the movable member toward measuring direction along the axis line direction; and a cover member configured to be mountable on and demountable from the housing, prevent the magnetic force generating portion and the movable member from dropping off from the housing, and be made of a magnetic material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for using a measuring probe which supports a movable member movably in axis line direction of the movable member, the movable member having a contact portion which comes into contact with a measuring target face at one end and having a reflecting plane formed at the other end for reflecting a measuring light beam, the method comprising:
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bringing the contact portion of the movable member into contact with the measuring target face with a second current configured to bring the contact portion into contact with the measuring target face; and after bringing the contact portion into contact, starting measurement of the measuring target face in a state the contact portion is pressed to the measuring target face with a first current configured to be stronger than the second current and press the contact portion to the measuring target face with force allowing movement in conformity to the measuring target face. - View Dependent Claims (11)
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Specification