Inertial measurement unit using rotatable MEMS sensors

• US 7,066,004 B1
• Filed: 09/02/2004
• Issued: 06/27/2006
• Est. Priority Date: 09/02/2004
• Status: Active Grant

• Current Assignee: National Technology & Engineering Solutions Of Sandia LLC (Honeywell International Inc.)
• Original Assignee: Sandia Corporation (Martin Marietta Corporation)
• Inventors: Allen, James J., Kohler, Stewart M.
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US10/932,957
• Time in Patent Office: 663 Days
• Field of Search: 735/10, 735/11, 735/040.4, 736/22, 736/23, 734/93, 73/13.8, 73/13.7, 73/17.8, 73/17.7, 702/95, 702/88
• US Class Current: 73/1.38
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01P 1/00 Details of instruments
• CPC Class Codes: G01P 21/00 Testing or calibrating of apparatus or devices covered by the preceding groups

Abstract

A MEM inertial sensor (e.g. accelerometer, gyroscope) having integral rotational means for providing static and dynamic bias compensation is disclosed. A bias compensated MEM inertial sensor is described comprising a MEM inertial sense element disposed on a rotatable MEM stage. A MEM actuator for drives the rotation of the stage between at least two predetermined rotational positions. Measuring and comparing the output of the MEM inertial sensor in the at least two rotational positions allows, for both static and dynamic bias compensation in inertial calculations based on the sensor'"'"'s output. An inertial measurement unit (IMU) comprising a plurality of independently rotatable MEM inertial sensors and methods for making bias compensated inertial measurements are disclosed.

Claims

1. An inertial sensor comprising:

a rotatable MEM stage;

a MEM inertial sense element, comprising a sense axis, disposed on the rotatable MEM stage;

means for rotating the MEM stage, about an axis substantially perpendicular to the sense axis of the MEM inertial sense element; and

,

means for electrically accessing the MEM inertial sense element, at at least two angular positions of the rotatable MEM stage.

2. The inertial sensor of claim 1, wherein the MEM inertial sense element comprises a sense element selected from the group consisting of:

an accelerometer, an angular rate sensor, and both.

3. The inertial sensor of claim 1, wherein the rotatable MEM stage is rotatable through an angle of up to 360 degrees.

4. The inertial sensor of claim 3, wherein the rotatable MEM stage is rotatable through an angle substantially equal to 180 degrees.

5. The inertial sensor of claim 1, wherein the means for electrically accessing the MEM inertial sense element comprises a plurality of compliant electrical conductors.

6. The inertial sensor of claim 5, wherein each compliant electrical conductor comprises silicon.

7. The inertial sensor of claim 1, wherein the means for electrically accessing the MEM inertial sense element comprises a plurality of MEM contactors.

8. The inertial sensor of claim 1 wherein the means for rotating the rotatable MEM stage comprises at least one MEM actuator selected from the group consisting of:

electrostatic actuators, electromagnetic actuators, piezoelectric actuators, shape memory alloy actuators, phase change based actuators and thermal actuators.

9. The inertial sensor of claim 1 wherein the MEM inertial sense element comprises a surface micromachined sense element.

10. The inertial sensor of claim 9 wherein the rotatable MEM stage comprises a LIGA micromachined rotatable stage.

11. The inertial sensor of claim 9 wherein the rotatable MEM stage comprises a surface micromachined rotatable stage.

12. An inertial measurement unit comprising;

a base having at least one surface;

at least two rotatable MEM stages disposed on the at least one surface, each of the at least two MEM stages being independently rotatable about a rotational axis lying substantially along a normal axis to the surface upon which the rotatable MEM stage is disposed;

at least two MEM inertial sense elements, each having a sense axis, the at least two MEM inertial sense elements being disposed on the at least two MEM rotatable stages, wherein the sense axes of the at least two MEM inertial sense elements, are substantially perpendicular to the rotational axis of the rotatable MEM stage, upon which the MEM inertial sense element is disposed;

means for independently rotating each of the at least two rotatable MEM stages; and

,

means for electrically accessing the at least two MEM inertial sense elements at, at least two angular positions of each of the at least two rotatable MEM stages.

13. The inertial measurement unit of claim 12 wherein the base having at least one surface, comprises a base having four non-coplanar surfaces arranged in a pyramidal geometry.

14. The inertial measurement unit of claim 13 wherein the at least two MEM inertial sense elements further comprises four MEM inertial sense elements, singly disposed on four independently rotatable MEM stages, each independently rotatable MEM stage being singly disposed on one of the four non coplanar surfaces arranged in a pyramidal geometry.

15. The inertial measurement unit of claim 12 wherein the at least two MEM inertial sense elements comprise at least two MEM inertial sense elements, one or more selected from the group consisting of:

an accelerometer, an angular rate sensor, or both.

16. The inertial measurement unit of claim 12 wherein the sense axes of the at least two MEM inertial sense elements are non-collinear.

17. The inertial measurement unit of claim 12 wherein the at least two rotatable MEM stages are rotatable through an angle of up to 360 degrees.

18. The inertial measurement unit of claim 17 wherein the at least two rotatable MEM stages are rotatable through an angle of substantially equal to 180 degrees.

19. The inertial measurement unit of claim 12 wherein the means for electrically accessing the at least two MEM inertial sense elements comprises a plurality of compliant electrical conductors.

20. The inertial measurement unit of claim 19 wherein the plurality of compliant electrical conductors comprise silicon.

21. The inertial measurement unit of claim 12 wherein the means for electrically accessing the at least two MEM inertial sense elements comprises a plurality of MEM contactors.

22. The inertial measurement unit of claim 12 wherein the means for independently rotating each of the at least two rotatable MEM stages comprises at least one MEM actuator selected from the group consisting of:

an electrostatic actuator, an electromagnetic actuator, a piezoelectric actuator, a shape memory alloy actuator, a phase change based actuator and a thermal actuator.

23. The inertial measurement unit of claim 12 wherein the at least two rotatable MEM stages comprises at least two rotatable MEM stages selected from the group consisting of:

a LIGA MEM stage, a surface micromachined MEM stage, and both.