Pressure sensors having spacer mounted transducers
First Claim
Patent Images
1. A pressure sensor structure comprising:
- a substrate;
a compliant member mounted on said substrate in a manner such that said compliant member has first and second opposing exposed surfaces; and
at least one strain transducer mounted on a surface of said compliant member, wherein said at least one strain transducer is separated from said surface of said compliant member by a spacer; and
wherein said structure has a sensitivity sufficient to measure pressure changes of about ±
1 mmHg.
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Accused Products
Abstract
Implantable pressure sensors and methods for making and using the same. A feature of at least some of the subject pressure sensors is that they are low-drift sensors. Additional features of representative pressure sensors include the presence of at least one strain transducer that is fabricated from a stable gauge material. The subject pressure sensors find use in a variety of applications.
72 Citations
35 Claims
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1. A pressure sensor structure comprising:
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a substrate; a compliant member mounted on said substrate in a manner such that said compliant member has first and second opposing exposed surfaces; and at least one strain transducer mounted on a surface of said compliant member, wherein said at least one strain transducer is separated from said surface of said compliant member by a spacer; and wherein said structure has a sensitivity sufficient to measure pressure changes of about ±
1 mmHg. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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Specification