Micro-electromechanical device having a laminated thermal bend actuator
First Claim
1. A micro-electromechanical device which comprisesa substrate containing drive circuitry;
- and an elongate actuator that is fast with the substrate at a fixed end, the elongate actuator having a laminated structure of at least one inner layer and a pair of opposed, outer layers, the outer layers having substantially the same thermal expansion and elasticity characteristics, with one of the outer layers defining an electrical heating circuit that is in electrical contact with the drive circuitry to be heated and to expand on receipt of an electrical signal from the drive circuitry and to cool and contract on termination of the signal, thereby to generate reciprocal movement of the actuator.
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Accused Products
Abstract
A micro-electromechanical device includes a substrate containing drive circuitry. An elongate actuator is fast with the substrate at a fixed end. The elongate actuator has a laminated structure of at least one inner layer and a pair of opposed, outer layers. The outer layers have substantially the same thermal expansion and elasticity characteristics. One of the outer layers defines an electrical heating circuit that is in electrical contact with the drive circuitry to be heated and to expand on receipt of an electrical signal from the drive circuitry and to cool and contract on termination of the signal, thereby to generate reciprocal movement of the actuator.
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Citations
4 Claims
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1. A micro-electromechanical device which comprises
a substrate containing drive circuitry; - and
an elongate actuator that is fast with the substrate at a fixed end, the elongate actuator having a laminated structure of at least one inner layer and a pair of opposed, outer layers, the outer layers having substantially the same thermal expansion and elasticity characteristics, with one of the outer layers defining an electrical heating circuit that is in electrical contact with the drive circuitry to be heated and to expand on receipt of an electrical signal from the drive circuitry and to cool and contract on termination of the signal, thereby to generate reciprocal movement of the actuator. - View Dependent Claims (2, 3)
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4. A micro-electromechanical device which comprises
a substrate containing drive circuitry; - and
a plurality of elongate actuators, each actuator being fast with the substrate at a fixed end, each elongate actuator having a laminated structure of at least three layers in the form of a pair of opposed, outer layers and at least one inner layer, the outer layers having substantially the same thermal expansion and elasticity characteristics, with one of the outer layers defining an electrical heating circuit that is in electrical contact with the drive circuitry to be heated and to expand on receipt of an electrical signal from the drive circuitry and to cool and contract on termination of the signal, thereby to generate reciprocal movement of the actuator.
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Specification