Linear motor, moving stage system, exposure apparatus, and device manufacturing method

• US 7,067,942 B2
• Filed: 02/13/2004
• Issued: 06/27/2006
• Est. Priority Date: 02/13/2003
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Korenaga, Nobushige, Asano, Toshiya
• Primary Examiner(s): Tamai, Karl
• Assistant Examiner(s): JONES, JUDSON
• Application Number:
  US10/777,196
• Publication Number:
  US 20040207271A1
• Time in Patent Office: 865 Days
• Field of Search: 310/12
• US Class Current: 310/12.25
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: H01J 2237/20221 Translation
• CPC Class Codes: H01J 2237/20278 Motorised movement
• CPC Class Codes: H01J 2237/3175 Lithography
• CPC Class Codes: H01J 37/20 Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support introducing the objects H01J37/18
• CPC Class Codes: H02K 1/276 Magnets embedded in the magnetic core, e.g. interior permanent magnets [IPM]
• CPC Class Codes: H02K 41/031 of the permanent magnet type

Abstract

A linear motor including a coil, a plurality of first magnet groups having polar directions disposed in periodically different directions, and a plurality of second magnet groups having polar directions disposed in periodically different directions. In a set including a predetermined magnet of the first magnet groups and a magnet of the second magnet groups, corresponding to the predetermined magnet, magnetization directions of the set of magnets have mutually different tilts with respect to the central axis of the coil. The coil includes a first coil effective to produce a Lorentz'"'"'s force between the first coil and the first magnet groups, and a second coil effective to produce a Lorentz'"'"'s force between the second coil and the second magnet groups.

Claims

1. A linear motor comprising:

a coil;

a plurality of first magnet groups having polar directions disposed in periodically different directions; and

a plurality of second magnet groups having polar directions disposed in periodically different directions;

wherein, in a set including a predetermined magnet of said first magnet groups and a magnet of said second magnet groups, corresponding to the predetermined magnet, magnetization directions of the set of magnets have mutually different tilts with respect to the central axis of said coil, and

wherein said coil includes a first coil effective to produce a Lorentz'"'"'s force between said first coil and said first magnet groups, and a second coil effective to produce a Lorentz'"'"'s force between said second coil and said second magnet groups.

2. A linear motor according to claim 1, further comprising a first yoke provided at a side of said first coil remote from said first magnet groups, and a second yoke provided at a side of said second coil remote from said second magnet groups.