Pattern inspection apparatus
First Claim
1. A pattern inspection apparatus comprising:
- a stage on which a plate to be inspected including a pattern formed on the plate is laid;
a light source which irradiates the plate to be inspected with light;
a photoelectric device which photoelectrically converts the optical image of the pattern;
a detected pattern data generator which generates detected pattern data regarding the pattern based on a signal obtained by the photoelectric device;
a reference pattern data generator which generates reference pattern data from designed data regarding the pattern, or stores the detected pattern data obtained by the photoelectric device;
a comparator which compares the detected pattern data with the reference pattern data;
a light intensity sensor which detects a light intensity of the light source;
a barometric pressure sensor which detects a barometric pressure in the pattern inspection apparatus;
a status detector which senses that at least one of the light intensity and the barometric pressure deviates from a predetermined range;
a data memory which stores the detected pattern data and the reference pattern data corresponding to the detected pattern data at a point of time when the status detector detects that the at least one of the light intensity and the barometric pressure deviate from the predetermined ranges in synchronization with position data on the plate to be inspected and a detected value of the at least one of the light intensity and the barometric pressure deviating from the predetermined range;
an output device which outputs the detected pattern data, the reference pattern data, and the detected value of the at least one of the light intensity and the barometric pressure stored in the data memory;
a signal intensity profile analysis part which analyzes a signal intensity profile of the detected pattern data at an abnormal status time;
a re-inspection control part which re-inspects at least a part on the plate to be inspected based on an analysis result of the signal intensity profile analysis part; and
an abnormal status notification part which notifies the analysis result,wherein the signal intensity profile analysis part compares signal gradients of horizontal and vertical direction components of a pattern edge part of the detected pattern data with a first predetermined standard value, and an intensity and fluctuation of a signal of a pattern bright part with a second predetermined standard value.
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Accused Products
Abstract
A pattern inspection apparatus includes a light source irradiating a plate having a pattern, a photoelectric device photoelectrically converting the image of the pattern, a generator generating detected pattern data based on a photoelectrically converted signal, a generator generating reference pattern data from designed data, a comparator comparing the detected pattern data with the reference pattern data, a sensor detecting a light intensity of the light source, a barometric pressure sensor detecting a barometric pressure in the apparatus, a detector detecting at least one of the light intensity and barometric pressure deviating from predetermined ranges, a memory storing the detected and reference pattern data at a point of time when the abnormal status is generated in synchronization with position data and detected values of the light intensity and barometric pressure and an output device which outputs these.
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Citations
6 Claims
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1. A pattern inspection apparatus comprising:
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a stage on which a plate to be inspected including a pattern formed on the plate is laid; a light source which irradiates the plate to be inspected with light; a photoelectric device which photoelectrically converts the optical image of the pattern; a detected pattern data generator which generates detected pattern data regarding the pattern based on a signal obtained by the photoelectric device; a reference pattern data generator which generates reference pattern data from designed data regarding the pattern, or stores the detected pattern data obtained by the photoelectric device; a comparator which compares the detected pattern data with the reference pattern data; a light intensity sensor which detects a light intensity of the light source; a barometric pressure sensor which detects a barometric pressure in the pattern inspection apparatus; a status detector which senses that at least one of the light intensity and the barometric pressure deviates from a predetermined range; a data memory which stores the detected pattern data and the reference pattern data corresponding to the detected pattern data at a point of time when the status detector detects that the at least one of the light intensity and the barometric pressure deviate from the predetermined ranges in synchronization with position data on the plate to be inspected and a detected value of the at least one of the light intensity and the barometric pressure deviating from the predetermined range; an output device which outputs the detected pattern data, the reference pattern data, and the detected value of the at least one of the light intensity and the barometric pressure stored in the data memory; a signal intensity profile analysis part which analyzes a signal intensity profile of the detected pattern data at an abnormal status time; a re-inspection control part which re-inspects at least a part on the plate to be inspected based on an analysis result of the signal intensity profile analysis part; and an abnormal status notification part which notifies the analysis result, wherein the signal intensity profile analysis part compares signal gradients of horizontal and vertical direction components of a pattern edge part of the detected pattern data with a first predetermined standard value, and an intensity and fluctuation of a signal of a pattern bright part with a second predetermined standard value. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification