Tip-tilt-piston actuator
First Claim
1. A freely rotatable micromechanical plate apparatus, comprising:
- at least three rotatable plates, each of said rotatable plates being suspended from a substrate via a respective first spring;
a moveable plate;
at least three moveable plate attachment points, each of said moveable plate attachment points being coupled to a respective one of said rotatable plates via respective ones of second springs so that rotation of each of said rotatable plates about a respective axis transfers motion to the moveable plate attachment points; and
at least three posts, each of said posts coupling the movement of each of a respective one of said moveable plate attachment points to said moveable plate.
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Accused Products
Abstract
A freely rotatable micromechanical plate is achieved by employing at least three rotatable plates that are each suspended from a substrate via respective springs, and are coupled via other respective springs to at least three moveable plate attachment points, so that rotation of the rotatable plates about an axis transfers motion to the moveable plate attachment points. Respective posts couple the movement of each respective moveable plate attachment point to a moveable plate. In operation, the rotatable plates may be individually rotated, and the resulting motion of each rotatable plate is passed to its respective moveable plate attachment point. The combined motion of the moveable plate attachment points is passed to the moveable plate via the posts. Using proper control, the plate may be made to tip, tilt and piston. Advantageously, the piston motion may achieve a high vertical movement frequency response.
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Citations
15 Claims
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1. A freely rotatable micromechanical plate apparatus, comprising:
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at least three rotatable plates, each of said rotatable plates being suspended from a substrate via a respective first spring; a moveable plate; at least three moveable plate attachment points, each of said moveable plate attachment points being coupled to a respective one of said rotatable plates via respective ones of second springs so that rotation of each of said rotatable plates about a respective axis transfers motion to the moveable plate attachment points; and at least three posts, each of said posts coupling the movement of each of a respective one of said moveable plate attachment points to said moveable plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method for making a freely rotatable micromechanical plate apparatus, comprising:
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suspending from a substrate via a respective one of a first set of springs each of at least three rotatable plates; coupling each of at least three moveable plate attachment points to a respective one of said rotatable plates via respective ones of a second set springs so that rotation of each of said rotatable plates about a respective axis transfers motion to the moveable plate attachment points; and coupling a moveable plate to each of said moveable plate attachment points via a respective one of least three posts, each of said posts coupling the movement of each of a respective one of said moveable plate attachment points to said moveable plate.
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Specification