Management system, management apparatus, management method, and device manufacturing method

• US 7,069,104 B2
• Filed: 04/28/2003
• Issued: 06/27/2006
• Est. Priority Date: 04/30/2002
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Oishi, Satoru, Ina, Hideki, Sentoku, Koichi, Suzuki, Takehiko, Matsumoto, Takahiro
• Primary Examiner(s): Picard, Leo
• Assistant Examiner(s): Lee, Douglas S.
• Application Number:
  US10/423,888
• Publication Number:
  US 20030204348A1
• Time in Patent Office: 1,156 Days
• Field of Search: 700/28, 700/29, 700/51, 700/108, 700/121, 703/2, 705/7, 705/8, 356/401, 716/19, 716/21, 250/548, 438/7, 438/763
• US Class Current: 700/121
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 2219/32182 If state of tool, product deviates from standard, adjust system, feedback
• CPC Class Codes: G05B 2219/32191 Real time statistical process monitoring
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A management system including an acquisition device for acquiring actual processing results obtained by operating an industrial device with a set parameter value and another parameter value, and an estimated processing result, an inspection device for inspecting the processing result obtained with the set parameter value, and acquiring and accumulating an inspection result value, a change device for changing the set parameter value on the basis of the processing results acquired by the acquisition device and the inspection result value obtained by the inspection device, an evaluation device for evaluating a variation state of the processing results on the basis of an inspection result value accumulated by the inspection device, and a decision device for deciding, on the basis of an evaluation result by the evaluation device, a frequency at which the acquisition device is executed.

Claims

1. A management system comprising:

acquisition means for acquiring actual processing results obtained by operating an industrial device with a set parameter value and another parameter value, and an estimated processing result;

inspection means for inspecting the processing result obtained with the set parameter value, and acquiring and accumulating an inspection result value;

change means for changing the set parameter value on the basis of the processing results acquired by said acquisition means and the inspection result value obtained by said inspection means;

evaluation means for evaluating a variation state of the processing results on the basis of an inspection result value accumulated by said inspection means; and

decision means for deciding, on the basis of an evaluation result by said evaluation means, a frequency at which said acquisition means is executed.

2. The system according to claim 1, wherein

said evaluation means obtains a variation cycle of a shift amount between an inspection value and a processing result serving as an inspection result by said inspection means, and

said decision means decides the frequency of on the basis of the variation cycle.

3. The system according to claim 1, wherein

said evaluation means obtains variations in shift amount between an inspection value and a processing result serving as an inspection result by said inspection means, and

said decision means decides the frequency on the basis of a degree of the variations.

4. The system according to claim 3, wherein said decision means prepares a plurality of thresholds at multiple levels for the variations in shift amount, and decides the frequency on the basis of which region contains the variations obtained by said evaluation means.

5. The system according to claim 1, wherein said decision means decides, on the basis of the evaluation result by said evaluation means, a frequency at which said evaluation means is executed, and when an evaluation result by said evaluation means for processing results in a predetermined amount is determined to become stable, decides a frequency at that time as the frequency at which said acquisition means is executed.

6. The system according to claim 5, wherein said evaluation means is executed for all processing results until the frequency at which said evaluation means is executed is not decided.

7. The system according to claim 1, wherein said evaluation means statistically processes the inspection result in time series, and evaluates the variation state.

8. The system according to claim 5, further comprising:

determination means for determining, on the basis of the variation state, whether the set parameter value must be optimized; and

optimization execution means for executing optimization of the parameter value by said acquisition means and said optimization means when the set parameter value is determined to be optimized.

9. The system according to claim 8, wherein when said optimization execution means changes the parameter value, said inspection means inspects all processing results in a predetermined amount after the change.

10. The system according to claim 8, wherein when the variation state of the processing result abruptly changes, said determination means determines that the set parameter value must be optimized.

11. The system according to claim 1, wherein said evaluation means evaluates the variation state of the results acquired by said acquisition means, the estimated processing result, and the inspection result accumulated by said inspection means.

12. The system according to claim 1, wherein execution of said acquisition means is managed based on an inspection result of said inspection means.