×

Thermal bubble type micro inertial sensor

  • US 7,069,785 B2
  • Filed: 11/24/2003
  • Issued: 07/04/2006
  • Est. Priority Date: 11/29/2002
  • Status: Active Grant
First Claim
Patent Images

1. A thermal bubble type micro inertial sensor, comprising:

  • a substrate;

    a heater arranged on the substrate;

    at least two temperature sensing members symmetrical arranged at opposite sides of the heater and on the substrate, respectively, to sense a temperature difference beside the heater;

    a cap arranged above the substrate to cover and encapsulate the heater and the at least two temperature sensing members; and

    a liquid filled into a chamber formed between the cap and the substrate, wherein when the heater is heated till a temperature of the heater reaches a vaporization point of the liquid, a thermal bubble surrounded by the liquid is gradually formed around the heater due to phase transition from liquid to gas, and a size of the bubble is kept substantially constant as the temperature difference is being sensed.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×