Alignment systems for imprint lithography

• US 7,070,405 B2
• Filed: 08/01/2002
• Issued: 07/04/2006
• Est. Priority Date: 08/01/2002
• Status: Expired due to Term

• Current Assignee: Mii Newco, Inc.
• Original Assignee: Molecular Imprints, Inc. (Canon Inc.)
• Inventors: Watts, Michael P. C., Voisin, Ronald D., Choi, Byung Jin, Schumaker, Norman E., Sreenivasan, Sidlgata V
• Primary Examiner(s): Smith, Duane
• Assistant Examiner(s): Luk, Emmanuel S.
• Application Number:
  US10/210,894
• Publication Number:
  US 20040022888A1
• Time in Patent Office: 1,433 Days
• Field of Search: 425/174.4, 355/48, 355/72, 355/91, 355/887, 396/428, 430/22, 430/322, 430/324, 430/30, 264/401, 427/458, 700/240
• US Class Current: 425/174.4
• CPC Class Codes: B29C 2035/0827 using UV radiation
• CPC Class Codes: B29C 2059/023 Microembossing
• CPC Class Codes: B29C 35/0888 using transparant moulds
• CPC Class Codes: B29C 59/02 by mechanical means, e.g. pressing B29C59/007 takes precedence; embossing expanded porous articles B29C44/5627
• CPC Class Codes: B29C 59/026 of layered or coated substantially flat surfaces
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

Abstract

Described are systems for patterning a substrate by imprint lithography. Imprint lithography systems include an imprint head configured to hold a template in a spaced relation to a substrate. The imprint lithography system is configured to dispense an activating light curable liquid onto a substrate or template. The system includes a light source that applies activating light to cure the activating light curable liquid. Multiple optical imaging devices are used to align the template with the substrate.

Claims

1. A system for forming a pattern on a substrate comprising:

a body;

a patterned template, wherein the patterned template is substantially transparent to an activating light;

a motion stage coupled to the body, wherein the motion stage is configured to support a substrate, and wherein the motion stage is configured to move the substrate along a plane substantially parallel to the patterned template;

an imprint head coupled to the body, wherein the imprint head is configured to hold the patterned template proximate to the substrate during use, wherein the imprint head comprises a fine orientation system, wherein the fine orientation system is configured to allow motion of the patterned template with respect to the substrate to achieve a substantially parallel orientation of the patterned template with respect to the substrate;

a liquid dispenser coupled to the body, wherein the liquid dispenser is configured to dispense an activating light curable liquid onto at least a portion of the substrate during use;

a force detector coupled to the imprint head, wherein the force detector is configured to determine a resistive force applied to the patterned template by the liquid when the patterned template contacts the liquid;

an activating light source optically coupled to the patterned template, wherein the activating light source is configured to direct the activating light through the patterned template during use;

a first optical imaging device coupled to the imprint head;

a second optical imaging device coupled to the motion stage, wherein the second optical imaging device is coupled to the motion stage such that the second optical imaging device and the substrate move together during use;

a system alignment target optically coupled to the first optical imaging device; and

a displacement detector coupled to the body, wherein the displacement detector is configured to determine a relative displacement of the substrate with respect to the patterned template.

2. The system of claim 1, wherein the first and second imaging devices comprise a CCD detector.

3. The system of claim 1, wherein the displacement detector comprises a two-axis interferometer.

4. The system of claim 1, wherein the displacement detector comprises a five-axis interferometer.

5. The system of claim 1, wherein the fine orientation system is configured to allow motion of the patterned template to the substantially parallel orientation with respect to the substrate when the template contacts the liquid disposed on the substrate.

6. The system of claim 1, wherein the fine orientation system comprises one or more passive compliant members.

7. The system of claim 1, wherein the fine orientation system comprises:

a first flexure member, wherein the first flexure member is configured to pivot about a first orientation axis during use;

a second flexure member coupled to the first flexure member, wherein the second flexure member is configured to pivot about a second orientation axis during use; and

a support coupled to the second flexure member, wherein the support is configured to hold the patterned template during use;

wherein the second flexure member is coupled to the first flexure member such that the patterned template, when disposed in the support, moves about a pivot point intersected by the first and second orientation axes during use.

8. The system of claim 7, wherein the first flexure member comprises first and second arms, wherein the first arm comprises a first set of flexure joints which are configured to provide pivotal motion of the first flexure member about the first orientation axis, and wherein the second arm comprises a second set of flexure joints which are configured to provide pivotal motion of the first flexure member about the first orientation axis, and wherein the second flexure member comprises third and fourth arms, wherein the third arm comprises a third set of flexure joints which are configured to provide pivotal motion of the second flexure member about the second orientation axis, and wherein the fourth arm comprises a fourth set of flexure joints which are configured to provide pivotal motion of the second flexure member about the second orientation axis.

9. The system of claim 7, wherein the first flexure member comprises a first opening, the second flexure member comprises a second opening, and the support comprises a third opening, wherein each of the first, second and third openings are configured to allow the activating light to be directed onto the patterned template during use, wherein the first, second and third openings are substantially aligned when the first flexure member is coupled to the second flexure member.

10. The system of claim 1, further comprising a precalibration stage coupled to the fine orientation system, wherein the precalibration stage is configured to move the fine orientation system toward and away from the substrate during use.

11. The system of claim 1, further comprising a support structure coupled to the imprint head and to the motion stage, wherein the support structure comprises a material having a linear thermal expansion coefficient of less than about 20 ppm/°

C. at about 25°

C.

12. The system of claim 1, further comprising a support structure coupled to the imprint head and to the motion stage, wherein the support structure comprises a material having a linear thermal expansion coefficient of less than about 10 ppm/°

C. at about 25°

C.

13. The system of claim 1, further comprising a support structure coupled to the imprint head and to the motion stage, wherein the support structure comprises a material having a linear thermal expansion coefficient of less than about 1 ppm/°

C. at about 25°

C.

14. The system of claim 1, wherein the motion stage comprises an air-bearing stage.

15. The system of claim 1, further comprising a linear encoder system coupled to the motion stage, wherein the linear encoder system is configured to determine a displacement of the motion stage with respect to a reference point on the body.

16. The system of claim 15, wherein the linear encoder system comprises a glass scale linear encoder system.

17. The system of claim 1, further comprising a linear encoder system coupled to the motion stage, wherein the linear encoder system is configured to determine a displacement of the motion stage toward the patterned template with respect to a reference point on the body.

18. The system of claim 1, further comprising an enclosure around at least the imprint head and the motion stage, and a temperature control system, wherein the temperature control system is configure to inhibit temperature variations of greater than about 1°

C. within the enclosure during use.

19. The system of claim 1, further comprising an enclosure around at least the imprint head and the motion stage, and a temperature control system, wherein the temperature control system is configure to inhibit temperature variations of greater than about 0.10°

C. within the enclosure during use.

20. The system of claim 1, wherein at least a portion of a surface of the patterned template comprises a surface treatment layer.

21. The system of claim 1, wherein the patterned template further comprises a surface treatment layer on at least a portion of a surface of the patterned template, and wherein the surface treatment layer comprises a reaction product of an alkylsilane, a fluoroalkylsilane, or a fluoroalkyltrichlorosilane with water.

22. The system of claim 1, wherein the patterned template further comprises a surface treatment layer on at least a portion of a surface of the patterned template, and wherein the surface treatment layer comprises a reaction product of tridecafluoro-1,1,2,2-tetrahydrooctyl trichlorosilane with water.

23. The system of claim 1, wherein the patterned template further comprises a surface treatment layer on at least a portion of a surface of the patterned template, and wherein the surface treatment layer reduces the surface free energy of the lower surface measured at 25°

C. to less than about 40 dynes/cm.

24. The system of claim 1, wherein at least a portion of the template comprises silicon, silicon dioxide, silicon germanium carbon, gallium nitride, silicon germanium, sapphire, gallium arsenide, epitaxial silicon, poly-silicon, gate oxide, quartz, indium tin oxide, an oxide of silicon or a combination thereof.

25. The system of claim 1, wherein the liquid dispenser is coupled to the imprint head.

26. The system of claim 1, further comprising an air gauge coupled to the imprint head, wherein the air gauge is configured to determine a distance between the substrate and the patterned template.

27. The system of claim 1, further comprising an air gauge coupled to the motion stage, wherein the air gauge is configured to determine a distance between the substrate and the patterned template.

28. The system of claim 1, wherein the imprint head is configured to move the patterned template toward the substrate during use.

29. The system of claim 1, wherein the motion stage is configured to move the substrate toward the patterned template during use.

30. The system of claim 1, wherein the motion stage is positioned below the imprint head.

31. The system of claim 1, wherein the motion stage is positioned above the imprint head.

32. The system of claim 1, wherein the activating light source is positioned with respect to the body such that the activating light source is thermally insulated from the body.

43. The system as recited in claim 1 wherein said second optical imaging device is coupled to said motion stage to move with respect to said template while maintaining a fixed spatial relationship with said substrate.

33. A system for forming a pattern on a substrate comprising:

a body;

a template

a motion stage, coupled to the body, a having the substrate positioned thereupon, the motion stage translating the substrate along a plane substantially parallel to the template

an imprint head, coupled to the body, holding the template;

a first optical imaging device coupled to the imprint head;

a second optical imaging device coupled to the motion stage, wherein the second optical imaging device is coupled to the motion stage such that the second optical imaging device and the substrate move together during use;

a system alignment target optically coupled to the first optical imaging device; and

a displacement detector coupled to the body, wherein the displacement detector is configured to determine a relative displacement of the substrate with respect to the template.

44. The system as recited in claim 33 wherein said second optical imaging device is coupled to said motion stage to move with respect to said template while maintaining a fixed spatial relationship with said substrate.

34. A system for forming a pattern on a substrate comprising:

a body;

a template;

an imprint head, holding the template;

a motion stage, coupled to the body, supporting the imprint head, the motion stage being configured to move the imprint head along a plane substantially parallel to the substrate;

a substrate support, coupled to the body, holding the substrate;

a first optical imaging device coupled to the imprint head, wherein the first optical imaging device is coupled to the motion stage such that the first optical imaging device and template move together during use;

a second optical imaging device coupled to the motion stage;

a system alignment target optically coupled to the second optical imaging device; and

a displacement detector coupled to the body, wherein the displacement detector is configured to determine a relative displacement of the substrate with respect to the template.

45. The system as recited in claim 34 wherein said first optical imaging device is coupled to said imprint head to move with respect to said substrate while maintaining a fixed spatial relationship with said template.

35. A system for forming a pattern on a substrate comprising:

a body;

a template;

an imprint head holding the template;

a motion stage, coupled to the body, supporting the imprint head, the motion stage being configured to move the imprint head along a plane substantially parallel to the substrate;

a substrate support, coupled to the body, holding the substrate, the substrate support comprising a fine orientation system, wherein the fine orientation system is configured to allow motion of the substrate with respect to the template to achieve a substantially parallel orientation of the substrate with respect to the template;

a first optical imaging device coupled to the imprint head, wherein the first optical imaging device is coupled to the motion stage such that the first optical imaging device and the template move together during use;

a second optical imaging device coupled to the motion stage;

a system alignment target optically coupled to the second optical imaging device; and

a displacement detector coupled to the body, wherein the displacement detector is configured to determine a relative displacement of the substrate with respect to the template.

36. A system for forming a pattern on a substrate comprising:

a body;

a template,

a motion stage, coupled to the body, a supporting the substrate, the motion stage being configured to move the substrate along a plane substantially parallel to the template;

an imprint head, coupled to the body, holding the template proximate to the substrate;

a first optical imaging device coupled to the imprint head;

a second optical imaging device coupled to the motion stage, wherein the second optical imaging device is coupled to the motion stage such that the second optical imaging device and the substrate move together during use;

a system alignment target optically coupled to the first optical imaging device;

a third optical imaging device optically coupled to the template, wherein the third optical imaging device is configured to obtain image data of the substrate through at least two different portions of the template; and

a displacement detector coupled to the body, wherein the displacement detector is configured to determine a relative displacement of the substrate with respect to the template.

37. The system of claim 36, wherein the optical imaging device is positioned within the imprint head.

38. The system of claim 37, wherein the optical imaging device is coupled to an imaging device movement system, wherein the imaging device movement system is configured to move the optical imaging device within the imprint head.

39. The system of claim 36, wherein the optical imaging device is configured to obtain the image data of the substrate through any portion of the template.

40. A system for forming a pattern on a substrate comprising:

a body;

a template;

a motion stage, coupled to the body, supporting the substrate, the motion stage being configured to move the substrate along a plane substantially parallel to the template, and wherein the motion stage comprises a fine orientation system, wherein the fine orientation system is configured to allow motion of the substrate with respect to the template to achieve a substantially parallel orientation of the substrate with respect to the template;

an imprint head, coupled to the body, holding the template;

a first optical imaging device coupled to the imprint head;

a second optical imaging device coupled to the motion stage, wherein the second optical imaging device is coupled to the motion stage such that the second optical imaging device and the substrate move together during use;

a system alignment target optically coupled to the first optical imaging device;

a third optical imaging device optically coupled to the template, wherein the third optical imaging device is configured to obtain image data of the substrate through at least two different portions of the template; and

a displacement detector coupled to the body, wherein the displacement detector is configured to determine a relative displacement of the substrate with respect to the template.

41. A system for forming a pattern on a substrate comprising:

a body;

a template;

an imprint head holding the template;

a motion stage, coupled to the body, supporting the imprint head, the motion stage being configured to move the imprint head along a plane substantially parallel to the substrate, wherein the imprint head comprises a fine orientation system, wherein the fine orientation system is configured to allow motion of the template with respect to the substrate to achieve a substantially parallel orientation of the template with respect to the substrate;

a substrate support, coupled to the body, holding the substrate;

a first optical imaging device coupled to the imprint head, wherein the first optical imaging device is coupled to the motion stage such that the first optical imaging device and the template move together during use;

a second optical imaging device coupled to the motion stage;

a system alignment target optically coupled to the first optical imaging device;

third optical imaging device optically coupled to the template, wherein the third optical imaging device is configured to obtain image data of the substrate through at least two different portions of the template; and

a displacement detector coupled to the body, wherein the displacement detector is configured to determine a relative displacement of the substrate with respect to the template.

42. A system for forming a pattern on a substrate comprising:

a body;

a template comprising a patterning area, wherein the patterning area comprises a plurality of recesses extending from a first surface of the template toward an opposing second surface of the template, and wherein a first alignment mark is defined by the recesses in the patterning area of the template, and wherein a second alignment mark is isolated from the patterning area by a border that substantially surrounds the second alignment mark, and wherein a depth of the border is greater than a depth of the recesses;

a motion stage, coupled to the body, a supporting the substrate, the motion stage being configured to move the substrate along a plane substantially parallel to the template;

an imprint head, coupled to the body, holding the template;

a first optical imaging device coupled to the imprint head;

a second optical imaging device coupled to the motion stage, wherein the second optical imaging device is coupled to the motion stage such that the second optical imaging device and the substrate move together during use;

a system alignment target optically coupled to the first optical imaging device; and

a displacement detector coupled to the body, wherein the displacement detector is configured to determine a relative displacement of the substrate with respect to the template.