Feature formation in thick-film inks

• US 7,070,908 B2
• Filed: 04/14/2003
• Issued: 07/04/2006
• Est. Priority Date: 04/14/2003
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Wong, Marvin Glenn
• Primary Examiner(s): Duda, Kathleen
• Application Number:
  US10/413,854
• Publication Number:
  US 20040202844A1
• Time in Patent Office: 1,177 Days
• Field of Search: 430/198, 430311-331
• US Class Current: 430/311
• CPC Class Codes: G03F 7/40 Treatment after imagewise removal, e.g. baking
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: H01H 29/28 with level of surface of contact liquid displaced by fluid pressure
• CPC Class Codes: H05K 2203/0568 Resist used for applying paste, ink or powder
• CPC Class Codes: H05K 3/1258 by using a substrate provided with a shape pattern, e.g. grooves, banks, resist pattern
• CPC Class Codes: Y10T 428/24802 Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]

Abstract

In a method for forming one or more features in a thick-film ink deposited on a substrate, a photoimagable material is used to define a negative of the one or more features on the substrate. A thick-film ink is then deposited on at least part of the substrate, abutting at least some of the photoimagable material. The thick-film ink is cured, and the photoimagable material is removed. One embodiment of the method is used to produce a channel plate. Another embodiment of the method is used to produce a switch.

Claims

1. A method for forming a switch, comprising:

a) using a photoimagable material to define negatives of one or more channels on a substrate;

b) depositing a thick-film ink on at least part of the substrate, abutting at least some of the photoimagable material;

c) curing the thick-film ink;

d) removing the photoimagable material to create a channel plate; and

e) aligning the one or more channels in the channel plate with at least one feature on a substrate, and sealing at least a switching fluid between the channel plate and the substrate.

2. The method of claim 1, wherein using the photoimagable material to define a negative of the one or more channels, comprises:

a) depositing the photoimagable material on the substrate;

b) patterning the negative of the one or more channels in the photoimagable material; and

c) removing unwanted portions of the photoimagable material.

3. The method of claim 1, wherein the photoimagable material is deposited as a dry film.

4. The method of claim 1, wherein the photoimagable material is deposited as a liquid.

5. The method of claim 1, wherein the thick-film ink is deposited by means of spin-coating.

6. The method of claim 1, wherein the thick-film ink is deposited by means of curtain-coating.

7. The method of claim 1, wherein the thick-film ink is deposited by means of doctor blading.

8. The method of claim 1, wherein the thick-film ink is deposited by means of screen printing.

9. The method of claim 1, wherein the thick-film ink is deposited by means of stencil printing.

10. The method of claim 1, wherein curing the thick-film ink comprises drying the thick-film ink.

11. The method of claim 1, wherein curing the thick-film ink comprises firing the thick-film ink.

12. The method of claim 1, wherein the photoimagable material is removed prior to said curing.

13. The method of claim 1, wherein the photoimagable material is removed during said curing.

14. The method of claim 1, wherein the photoimagable material is removed after said curing.

15. The method of claim 1, further comprising, adjusting a thickness of the thick-film ink, subsequent to curing the thick-film ink, by removing a portion of the thick-film ink.

16. The method of claim 1, further comprising, repeating said defining, depositing, curing and removing actions to form another channel in another thick-film ink that is deposited on top of the existing thick-film ink.

17. The method of claim 1, further comprising, prior to removing the photoimagable material, repeating said defining, depositing and curing actions to form another channel in another thick-film ink that is deposited on top of the existing thick-film ink.

18. The method of claim 1, further comprising:

depositing a plurality of electrodes in the one or more channels on the substrate; and

depositing the switching fluid on the electrodes.

19. The method of claim, further comprising:

depositing a plurality of wettable pads in the one or more channels on the substrate; and

depositing the switching fluid on the wettable pads.