Separating wafers coated with plastic films

• US 7,071,025 B2
• Filed: 12/31/2001
• Issued: 07/04/2006
• Est. Priority Date: 12/29/2000
• Status: Active Grant

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Lopes, Vincent C., Brenner, Michael F.
• Primary Examiner(s): Weiss, Howard
• Assistant Examiner(s): Trinh, (Vikki) Hoa B.
• Application Number:
  US10/038,813
• Publication Number:
  US 20020122894A1
• Time in Patent Office: 1,646 Days
• Field of Search: 438/758, 438/114, 438/465, 438/460, 438/106, 438/107, 438/109, 438/761, 438/118, 438/780
• US Class Current: 438/106
• CPC Class Codes: B81C 1/00896 Temporary protection during separation into individual elements

Abstract

The method of protecting micromechanical structures during a wafer fabrication process. A protective layer 402 is deposited to protect the fragile microstructures during a wafer separation process and a post separation cleanup process. Suitable protective layers 402 typically are plastic and tend to deform or delaminate when the wafer is sawn. The deformation of the protective overcoat during the saw process destroys the structures it is intended to protect. To prevent deformation of the protective layer 402, a brittle layer 404 is deposited on the protective layer 402 to hold the protective layer in place during the saw process. Cured photoresist is a suitable protective layer. The photoresist can be applied to the protective layer using standard processes and cured, typically by baking the photoresist. Once the wafer is separated, the brittle layer may be removed. After the debris created during the saw process is removed, the protective overcoat may be removed. The brittle layer 404 and the protective overcoat 402 may be removed at the same time. The preceding abstract is submitted with the understanding that it only will be used to assist in determining, from a cursory inspection, the nature and gist of the technical disclosure as described in 37 C.F.R. § 1.72(b). In no case should this abstract be used for interpreting the scope of any patent claims.

Claims

1. A method of fabricating a micromechanical structure, the method comprising:

fabricating at least two micromechanical structures on a substrate;

overcoating said micromechanical structures with a protective layer;

overcoating said protective layer with a brittle layer; and

sawing said brittle layer and said protective layer.

2. The method of claim 1, said fabricating comprising fabricating at least two micromechanical devices on a semiconductor substrate.

3. The method of claim 1, said fabricating comprising fabricating at least two micromirror devices on said substrate.

4. The method of claim 1, said fabricating comprising fabricating at least two micromirror devices on a semiconductor substrate.

5. The method of claim 1, said fabricating comprising fabricating at least two micromirror arrays on said substrate.

6. The method of claim 1, said fabricating comprising fabricating at least two micromirror arrays on a semiconductor substrate.

7. The method of claim 1, said overcoating with a protective layer comprising overcoating with a plastic layer.

8. The method of claim 1, said overcoating with a protective layer comprising overcoating with a polymer resin.

9. The method of claim 1, said overcoating with a protective layer comprising overcoating with a PARYLENE layer.

10. The method of claim 1, said overcoating with a protective layer comprising overcoating with a acrylate monomer layer.

11. The method of claim 1, said overcoating with a protective layer comprising overcoating with a acrylate oligomer layer.

12. The method of claim 1, said overcoating with a protective layer comprising applying a protective overcoat by vapor deposition.

13. The method of claim 1, said overcoating with a protective layer comprising applying a protective overcoat by immersing said substrate in a liquid protective overcoat material.

14. The method of claim 1, said overcoating with a protective layer comprising applying a protective overcoat by spinning-on a protective overcoat layer.

15. The method of claim 1, comprising;

thermally curing said protective layer.

16. The method of claim 1, comprising:

curing said protective layer using ultraviolet light.

17. The method of claim 1, said overcoating with a brittle layer comprising overcoating with a photoresist layer.

18. The method of claim 1, said overcoating with a brittle layer comprising overcoating with a photoresist layer, further comprising:

baking said photoresist layer.

19. The method of claim 1, said overcoating with a brittle layer comprising overcoating with a photoresist layer, further comprising:

deep UV hardening said photoresist layer.

20. The method of claim 1, said overcoating with a brittle layer comprising overcoating with a brittle layer to prevent said protective layer from delaminating from said substrate.

21. The method of claim 1, said sawing comprising sawing through said protective and overcoat layers.

22. The method of claim 1, said sawing comprising sawing through said protective and overcoat layers and said substrate to separate said micromechanical devices.

23. The method of claim 1, said sawing comprising sawing through said protective and overcoat layers and partially through said substrate layer.