Methods for fabricating spatial light modulators with hidden comb actuators

• US 7,071,109 B2
• Filed: 04/06/2005
• Issued: 07/04/2006
• Est. Priority Date: 03/22/2003
• Status: Expired due to Fees

• Current Assignee: II-VI Incorporated
• Original Assignee: Active Optical Networks, Inc.
• Inventors: Shah, Paren, Novotny, Vlad J.
• Primary Examiner(s): Norton, Nadine G.
• Assistant Examiner(s): Tran, Binh X.
• Application Number:
  US11/100,953
• Publication Number:
  US 20050185250A1
• Time in Patent Office: 454 Days
• Field of Search: 438/692, 438/700, 438/703, 438/719, 359/291
• US Class Current: 438/692
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

Described are methods for fabricating Micro-Electro-Mechanical Systems (MEMS) actuators with hidden combs and hinges. The ability to hide the combs renders the actuators useful in digital micro-mirror devices. Comb actuators provide increased torque, which facilitates the use of stiffer, less fragile hinge structures. Also important, comb actuators do not require mechanical stops to define stable states, and thus avoid problems associated with physical contact. The actuators are infinitely variable through a range of angles.

Claims

1. A method of forming a comb actuator, the method comprising:

a. depositing a first conductive layer;

b. patterning the first conductive layer to define a first comb;

c. depositing a first sacrificial layer over the first comb;

d. planarizing the first sacrificial layer to expose the first comb;

e. depositing a second conductive layer over the exposed first comb;

f. forming a mask on the second conductive layer, the mask defining a second comb; and

g. etching the second conductive layer through the mask to form the second comb.

2. The method of claim 1, further comprising patterning the first conductive layer to define an alignment pattern and opening a window in the second conductive layer to uncover the alignment pattern before forming the mask.

3. The method of claim 1, further comprising depositing a third conductive layer between the first and second conductive layers and patterning the third conductive layer to form a hinge extending between the first and second combs.

4. The method of claim 1, further comprising forming a mirror over the second comb.

5. The method of claim 1, wherein at least one of the first and second conductive layers includes germanium.

6. The method of claim 1, wherein the first sacrificial layer is of a material selected from the group consisting of silicon dioxide, germanium, and photoresist.

7. The method of claim 1, further comprising depositing a second sacrificial layer over the second comb and planarizing the second sacrificial layer to expose the second comb.

8. The method of claim 7, further comprising forming an actuated member over the second comb and removing what remains of the first and second sacrificial layers.

9. A method of fabricating a spatial light modulator over an integrated-circuit substrate supporting a plurality of conductive traces, the method comprising:

a. forming a patterned insulating layer over the substrate, the patterned insulating layer patterned to define contact areas over the conductive traces;

b. forming a first patterned conductive layer over the insulating layer and over a first of the contact areas, wherein the first patterned conductive layer is in electrical contact with a first of the conductive traces via the first contact area, and wherein the first patterned conductive layer includes a first set of comb teeth;

c. forming a second patterned conductive layer over the insulating layer and over a second of the contact areas, wherein the second patterned conductive layer is in electrical contact with a second of the conductive traces via the second contact area, and wherein the second patterned conductive layer includes a second set of comb teeth, wherein the first and second sets of comb teeth are interdigitated from a perspective normal to the substrate; and

d. forming a light-modulating layer over the first and second patterned conductive layers, the light-modulating layer including a light-modulating surface.

10. The method of claim 9, wherein the conductive traces comprise tungsten.

11. The method of claim 9, wherein at least one of the first and second patterned conductive layers comprises a metal.

12. The method of claim 9, wherein at least one of the first and second patterned conductive layers comprises silicon and germanium.

13. The method of claim 9, wherein at least one of the first and second patterned conductive layers comprises germanium.

14. The method of claim 13, wherein the conductive traces comprise at least one of aluminum and copper.

15. The method of claim 9, wherein the light-modulating layer obscures the first and second sets of comb teeth from the perspective normal to the substrate.

16. The method of claim 15, wherein the light-modulating layer entirely obscures the first and second sets of comb teeth from the perspective normal to the substrate.