Reduction of oxides in a fluid-based switch

• US 7,071,432 B2
• Filed: 07/26/2005
• Issued: 07/04/2006
• Est. Priority Date: 04/14/2003
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Lindsey, John Ralph
• Primary Examiner(s): Friedhofer, Michael A.
• Application Number:
  US11/190,041
• Publication Number:
  US 20050263379A1
• Time in Patent Office: 343 Days
• Field of Search: 200/182, 200187-189, 200/193, 200/194, 200214-216, 200233-236, 310/328, 310/331, 310/348, 310/363, 335/4, 335/47, 335/78, 385/19
• US Class Current: 200/182
• CPC Class Codes: G02B 6/353 the optical element being a shutter, baffle, beam dump or opaque element absorbers on light guide termination G02B6/243
• CPC Class Codes: G02B 6/3538 based on displacement or deformation of a liquid controlling the intensity of light by displacement or deformation of a fluid in general G02B26/004; fluid-filled lens of variable focal length G02B3/14
• CPC Class Codes: G02B 6/3552 1x1 switch, e.g. on/off switch
• CPC Class Codes: G02B 6/3576 Temperature or heat actuation thermal forces controlling reflecting elements in general G02B26/0866; thermo-optic devices G02F1/0147
• CPC Class Codes: G02B 6/3578 Piezoelectric force piezoelectric forces controlling reflecting elements in general G02B26/0858; piezo-optic devices G02F1/0131
• CPC Class Codes: G02B 6/3594 Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams
• CPC Class Codes: H01H 1/66 Contacts sealed in an evacuated or gas-filled envelope, e.g. magnetic dry-reed contacts
• CPC Class Codes: H01H 11/02 for mercury switches
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: H01H 29/04 Contacts; Containers for liquid contacts
• CPC Class Codes: H01H 29/28 with level of surface of contact liquid displaced by fluid pressure

Abstract

In one embodiment, a switch includes first and second mated substrates defining therebetween a number of cavities. A plurality of wettable elements are exposed within one or more of the cavities. A switching fluid is held within one or more of the cavities. The switching fluid serves to connect and disconnect at least a pair of the plurality of wettable elements in response to forces that are applied to the switching fluid. A gas is also held within one or more of the cavities. The gas is provided to react with oxides on or in the cavities. An actuating fluid is held within one or more of the cavities and applies the forces to the switching fluid. Methods of making such a switch are also disclosed.

Claims

1. A method, comprising:

in an environment having a low partial pressure of oxygen, wherein the low partial pressure of oxygen is at or below a critical limit to reduce formation of oxides;

i) depositing a switching fluid on a first substrate; and

ii) mating the first substrate to a second substrate, the first substrate and the second substrate defining therebetween a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states.

2. The method of claim 1, wherein the environment further comprises a gas, other than oxygen, that reacts with oxygen, or oxides that are, or will be, on or in the cavity holding the switching fluid;

the oxides including at least one of;

i) oxides on or in the switching fluid;

ii) oxides of contamination on or in the switching fluid;

iii) oxides on inner surfaces of the cavity;

iv) oxides of contamination on the inner surfaces of the cavity; and

v) oxides on or in alloys of elements in the cavity.

3. The method of claim 1, wherein the environment further comprises a gas other than oxygen, the gas comprising at least one of:

hydrogen gas and carbon monoxide gas.

4. A method, comprising:

in an environment containing a gas, other than oxygen, to reduce formation of oxides;

i) depositing a switching fluid on a first substrate;

ii) mating the first substrate to a second substrate, the first substrate and the second substrate defining therebetween a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states.

5. The method of claim 4, wherein the gas reacts with oxygen, or with oxides that are, or will be, on or in the cavity holding the switching fluid;

the oxides including at least one of;

i) oxides on or in the switching fluid;

ii) oxides of contamination on or in the switching fluid;

iii) oxides on inner surfaces of the cavity;

iv) oxides of contamination on inner surfaces of the cavity; and

v) oxides on or in alloys of elements in the cavity.

6. The method of claim 4, wherein the gas comprises at least one of:

hydrogen gas and carbon monoxide gas.

7. The method of claim 4, wherein the gas comprises hydrogen gas, mixed with at least one of:

nitrogen gas and helium gas.

8. A method, comprising:

depositing a switching fluid on a first substrate;

mating the first substrate to a second substrate, the first substrate and the second substrate defining therebetween a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states; and

creating a gas in the cavity holding the switching fluid, the gas to react with oxygen or oxides within the cavity.

9. The method of claim 8, further comprising:

before mating the substrates, depositing a catalyst on one of the substrates;

depositing a carbon layer on the catalyst; and

after mating the substrates, exciting the catalyst to create the gas.

10. The method of claim 8, wherein the gas is created to react with oxygen in the switch, or oxides on or in the cavity holding the switching fluid;

the oxides including at least one of;

i) oxides on or in the switching fluid;

ii) oxides of contamination on or in the switching fluid;

iii) oxides on inner surfaces of the cavity;

iv) oxides of contamination on the inner surfaces of the cavity; and

v) oxides on or in alloys of elements in the cavity.

11. A method, comprising:

depositing a switching fluid on a first substrate;

mating the first substrate to a second substrate, the first substrate and the second substrate defining therebetween a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states; and

injecting a gas into the cavity, the gas to react with oxygen or oxides within the cavity.

12. The method of claim 11, wherein the gas is injected into the cavity via a gas injection channel that extends from within to outside the cavity;

the method further comprising sealing the gas injection channel to prevent passage of gases into or out of the cavity.

13. The method of claim 12, wherein injecting the gas into the cavity comprises injecting the gas via the gas injection channel.

14. The method of claim 11, wherein the gas is injected to react with oxygen in the switch, or oxides on or in the cavity holding the switching fluid;

the oxides including at least one of;

i) oxides on or in the switching fluid;

ii) oxides of contamination on or in the switching fluid;

iii) oxides on inner surfaces of the cavity;

iv) oxides of contamination on the inner surfaces of the cavity; and

v) oxides on or in alloys of elements in the cavity.

15. A method of reducing oxides in a switch, comprising:

depositing a switching fluid on a first substrate;

mating the first substrate to a second substrate, the first substrate and the second substrate defining therebetween a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states, and the cavity being connected to a gas supply channel extending from within to outside the cavity; and

in an environment containing a controlled pressure of one or more gases, hermetically sealing the switch, including the gas supply channel, to trap a desired pressure of the one or more gases in the cavity.

16. The method of claim 15, wherein the environment contains a controlled pressure of oxygen.

17. The method of claim 15, wherein the environment contains a controlled pressure of at least one oxide-reducing gas.

18. A switch, comprising:

first and second mated substrates defining therebetween a number of cavities;

a plurality of wettable elements exposed within one or more of the cavities;

a switching fluid, held within one or more of the cavities, that serves to connect and disconnect at least a pair of the plurality of wettable elements in response to forces that are applied to the switching fluid;

a gas, held within one or more of the cavities, to react with oxygen or oxides on or in the cavities; and

an actuating fluid, held within one or more of the cavities, that applies the forces to the switching fluid.

19. The switch of claim 18, wherein the plurality of wettable elements comprise a plurality of electrodes.

20. The switch of claim 18, wherein the plurality of wettable elements comprise a plurality of wettable pads.

21. The switch of claim 18, further comprising:

a gas injection channel that extends from within to outside the cavity; and

a seal blocking the gas injection channel to prevent passage of gases into or out of the cavity.

22. The switch of claim 18, wherein the gas comprises hydrogen gas, mixed with at least one of:

nitrogen gas and helium gas.

23. The switch of claim 18, wherein the switching fluid comprises one of:

mercury, a mercury alloy, gallium, a gallium alloy, sodium potassium, and sodium potassium alloy.

24. The switch of claim 18, wherein the gas reacts with at least one of:

i) oxides on or in the switching fluid;

ii) oxides of contamination on or in the switching fluid;

iii) oxides on or in the wettable elements;

iv) oxides of contamination on or in the wettable elements;

v) oxides on walls of the cavity;

vi) oxides of contamination on walls of the cavity;

vii) oxides on or in alloys of elements in the cavity;

or viii) oxygen.